Two-dimensional scalable high-power optical phased array architecture with beam steering
US-2024340089-A1 · Oct 10, 2024 · US
US9755752B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9755752-B2 |
| Application number | US-201414153494-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 13, 2014 |
| Priority date | Nov 5, 2013 |
| Publication date | Sep 5, 2017 |
| Grant date | Sep 5, 2017 |
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A method of manufacturing an optical communication device aligns an optical sub-assembly and an optical modulator on a carrier wafer. A first sub-mount supports the optical sub-assembly and a second sub-mount supports the optical modulator. Pre-defined break lines are placed on the carrier wafer to accommodate separation of the sub-assembly and the optical modulator. The first sub-mount connects the optical sub-assembly to a thermoelectric cooler by either an epoxy, a spacer layer, or both. The optical sub-assembly is aligned in the x/y/z directions relative to the second sub-mount in a position to match an optical height of the optical modulator in the z-direction, wherein the z-direction is a vertical direction relative to the carrier wafer.
Opening claim text (preview).
What is claimed: 1. A method of manufacturing an optical communication device, comprising: positioning a first thermally conductive sub-mount configured to accommodate an optical laser on a carrier wafer substantially adjacent to a first pre-defined break line in the carrier wafer; positioning a second sub-mount configured to accommodate an optical modulator on the carrier wafer substantially adjacent to a second pre-defined break line in the carrier wafer; aligning the first thermally conductive sub-mount in x/y/z directions relative to the second sub-mount in a position to match an optical height of the optical modulator in the z-direction, wherein the z-direction is a vertical direction relative to the carrier wafer; securing the first thermally conductive sub-mount to a thermally conductive and electrically non-conductive spacer; securing the thermally conductive and electrically non-conductive spacer to a thermo-electrical cooler in a position that defines a gap between the first thermally conductive sub-mount and the thermo-electrical cooler; securing the second sub-mount to an optical device platform; and removing a portion of the carrier wafer between the first thermally conductive and second sub-mounts. 2. The method of claim 1 , further comprising: sealing the first thermally conductive sub-mount in a hermetic enclosure; and providing a connector in communication with the second sub-mount in order to use the optical communication device in an optical network. 3. The method of claim 2 , further comprising: ensuring proper coupling of laser beams sent from the first thermally conductive sub-mount to the second sub-mount; and adding an optical flat in order to recover coupling loss between the first thermally conductive sub-mount and the second sub-mount. 4. The method of claim 1 , further comprising filling the gap with a non-conductive epoxy. 5. The method of claim 1 , further comprising adjusting a height of the spacer in the z direction for the aligning of the first thermally conductive sub-mount to the second sub-mount. 6. The method of claim 1 , wherein the aligning comprises an alignment in the z-direction via bond line control between the first thermally conductive sub-mount and the optical laser and the second sub-mount and the optical modulator. 7. The method of claim 1 , further comprising aligning the first thermally conductive sub-mount and the second sub-mount in the x and y directions that are horizontal directions relative to the carrier wafer using a jaw tool. 8. The method of claim 1 further comprising aligning the first thermally conductive sub-mount and second sub-mount in the x and y directions using an inverted pyramid alignment feature. 9. The method of claim 1 , wherein the first thermally conductive sub-mount is configured to accommodate four lasers. 10. The method of claim 9 , wherein the first thermally conductive sub-mount is further configured to accommodate an isolator. 11. The method of claim 1 , further comprising the step of using a ceramic filled epoxy to attach the portion of the first thermally conductive sub-mount configured to accommodate an optical laser to the thermo-electrical cooler in order to decrease the risk of electrical shortage at the first thermally conductive sub-mount.
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