Photoelectric conversion element and imaging device

Patent metadata

Field	Value
Publication number	US-9754980-B2
Application number	US-201615193677-A
Country	US
Kind code	B2
Filing date	Jun 27, 2016
Priority date	Jun 30, 2015
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

An imaging device with excellent imaging performance is provided. An imaging device that easily performs imaging under a low illuminance condition is provided. A low power consumption imaging device is provided. An imaging device with small variations in characteristics between its pixels is provided. A highly integrated imaging device is provided. A photoelectric conversion element includes a first electrode, and a first layer, a second layer, and a third layer. The first layer is provided between the first electrode and the third layer. The second layer is provided between the first layer and the third layer. The first layer contains selenium. The second layer contains a metal oxide. The third layer contains a metal oxide and also contains at least one of a rare gas atom, phosphorus, and boron. The selenium may be crystalline selenium. The second layer may be a layer of an In—Ga—Zn oxide including c-axis-aligned crystals.

First claim

What is claimed is:

1. A photoelectric conversion element comprising:
a first electrode;
a first layer;
a second layer; and
a third layer,
wherein the first layer is positioned between the first electrode and the third layer,
wherein the second layer is positioned between the first layer and the third layer,
wherein the first layer comprises selenium,
wherein the second layer comprises a metal oxide,
wherein the third layer comprises a metal oxide,
wherein the metal oxide of the second layer comprises In, Ga, and Zn, and
wherein the metal oxide of the third layer comprises In, Ga, and Zn.

2. The photoelectric conversion element according to claim 1 , wherein the second layer comprises c-axis-aligned crystals.

3. The photoelectric conversion element according to claim 1 , wherein the selenium is crystalline selenium.

4. The photoelectric conversion element according to claim 1 ,
wherein the first layer serves as a photoelectric conversion layer, and
wherein the second layer serves as a hole injection blocking layer.

5. The photoelectric conversion element according to claim 1 , further comprising a fourth layer positioned between the first layer and the first electrode, wherein the fourth layer serves as an electron injection blocking layer.

6. The photoelectric conversion element according to claim 5 , wherein the fourth layer comprises nickel oxide or antimony sulfide.

7. The photoelectric conversion element according to claim 1 , further comprising a second electrode in contact with the third layer,
wherein the second electrode comprises indium tin oxide.

8. An imaging device comprising:
the photoelectric conversion element according to claim 1 ; and
a driver transistor,
wherein the driver transistor is electrically connected to the photoelectric conversion element.

9. The imaging device according to claim 8 , further comprising:
a microlens array or a diffraction grating; and
a color filter,
wherein the photoelectric conversion element is capable of receiving light passing through the microlens array or the diffraction grating and the color filter.

10. The imaging device according to claim 8 , wherein the driver transistor comprises an oxide semiconductor.

11. The imaging device according to claim 8 , comprising the photoelectric conversion elements, wherein a number of the photoelectric conversion elements is larger than or equal to a number enabling production of video signals with 8K resolution.

12. The photoelectric conversion element according to claim 1 , wherein the third layer has an electrical conductivity of greater than or equal to 2.0×10 1 S/cm and less than or equal to 2.6×10 2 S/cm.

13. A photoelectric conversion element comprising:
a first electrode;
a first layer;
a second layer; and
a third layer,
wherein the first layer is positioned between the first electrode and the third layer,
wherein the second layer is positioned between the first layer and the third layer,
wherein the first layer comprises selenium,
wherein the second layer comprises a metal oxide,
wherein the third layer comprises a metal oxide and also comprises at least one of a rare gas atom, phosphorus, and boron,
wherein the metal oxide of the second layer comprises In, Ga, and Zn, and
wherein the metal oxide of the third layer comprises In, Ga, and Zn.

14. An imaging device comprising:
the photoelectric conversion element according to claim 13 ; and
a driver transistor,
wherein the driver transistor is electrically connected to the photoelectric conversion element.

15. The imaging device according to claim 14 , further comprising:
a microlens array or a diffraction grating; and
a color filter,
wherein the photoelectric conversion element is capable of receiving light passing through the microlens array or the diffraction grating and the color filter.

16. The imaging device according to claim 14 , wherein the driver transistor comprises an oxide semiconductor.

17. The imaging device according to claim 14 , comprising the photoelectric conversion elements, wherein a number of the photoelectric conversion elements is larger than or equal to a number enabling production of video signals with 8K resolution.

18. A photoelectric conversion element comprising:
a first electrode;
a first layer over the first electrode;
a second layer over the first layer; and
a third layer over the second layer,
wherein the first layer comprises crystalline selenium,
wherein the first layer serves as a photoelectric conversion layer,
wherein the second layer comprises an In—Ga—Zn oxide comprising c-axis-aligned crystals,
wherein the third layer comprises an In—Ga—Zn oxide comprising c-axis-aligned crystals,
wherein the third layer further comprises at least one of xenon and phosphorus,
wherein the second layer serves as a hole injection blocking layer, and
wherein the third layer serves as an electrode.

19. An imaging device comprising:
the photoelectric conversion element according to claim 18 ; and
a driver transistor,
wherein the driver transistor is electrically connected to the photoelectric conversion element.

20. The imaging device according to claim 19 , further comprising:
a microlens array or a diffraction grating; and
a color filter,
wherein the photoelectric conversion element is capable of receiving light passing through the microlens array or the diffraction grating and the color filter.

21. The imaging device according to claim 19 , wherein the driver transistor comprises an oxide semiconductor.

22. The imaging device according to claim 19 , comprising the photoelectric conversion elements, wherein a number of the photoelectric conversion elements is larger than or equal to a number enabling production of video signals with 8K resolution.

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei
• Nonaka Yusuke
• Kataishi Riho
• Ohki Hiroshi
• Sato Yuichi
• Matsubayashi Daisuke

Classifications

• H01L27/14694

  Electricity · mapped topic

• H01L27/14696

  Electricity · mapped topic

• H01L31/0272

  Electricity · mapped topic

• H01L31/0296

  Electricity · mapped topic

• H01L27/14621

  Electricity · mapped topic