Charged particle source

Patent metadata

Field	Value
Publication number	US-9754760-B2
Application number	US-201715404694-A
Country	US
Kind code	B2
Filing date	Jan 12, 2017
Priority date	Dec 9, 2014
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

First claim

What is claimed is:

1. An electron beam inspection tool, comprising:
an electron source for providing an electron beam;
an auxiliary lens for condensing the electron beam;
an objective lens for focusing the electron beam on a sample;
a scanning unit for scanning the electron beam on the sample;
a detector for receiving signal electrons emanated from the sample; and
a condenser lens system, comprising:
a first magnetic lens above an electron source; and
a second magnetic electron source below the electron source,
wherein when a first magnetic field generated by the first magnetic lens is anti-symmetric to a second magnetic field generated by said second magnetic lens at a tip of the electron source, a compound magnetic field superposed by the first and second magnetic field is weakest at the tip and largest immediately long an optical axis of the electron source, and the compound magnetic field provides a high resolution mode,
wherein when the first magnetic field generated by the first magnetic lens is symmetric to the second magnetic field generated by the second magnetic lens at the tip of the electron source, the compound magnetic field superposed by the first and second magnetic field is largest at the tip of the electron source, and the compound magnetic field provides a high throughput mode.

2. The electron beam inspection tool according to claim 1 , further comprising a plat with a plurality of apertures between the condenser lens system and the auxiliary lens.

3. The electron beam inspection tool according to claim 2 , wherein the objective lens is an immersion lens.

4. The electron beam inspection tool according to claim 2 , wherein the objective lens is SORIL system.

Assignees

• Hermes Microvision Inc

Inventors

• Li Shuai

Classifications

• H01J2237/06375

  Arrangement of electrodes · CPC title

• H01J2237/083

  Beam forming · CPC title

• H01J37/065

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title

• H01J3/20

  Magnetic lenses · CPC title

• H01J2237/06308

  Thermionic sources · CPC title