Negative stiffness system for gravity compensation of micropositioner

Patent metadata

Field	Value
Publication number	US-9752643-B2
Application number	US-201314652055-A
Country	US
Kind code	B2
Filing date	Dec 6, 2013
Priority date	Dec 12, 2012
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

A negative stiffness system for gravity compensation of a micropositioner of wafer table in lithography machine, characterized in that, the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends of the negative stiffness springs and the positive stiffness spring are connected together and fixed to the bottom surface of a rotor of the micropositioner, and lower ends of the negative stiffness springs and the positive stiffness spring are connected to a base, respectively. The system reduces the stiffness in vertical direction and prevents the influence of permanent magnet on its surroundings, while improving the bearing capacity.

First claim

What is claimed is:

1. A negative stiffness system for gravity compensation of a micropositioner, wherein the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends of the negative stiffness springs and the positive stiffness spring are connected together and fixed to a bottom surface of a rotor of the micropositioner, and lower ends of the negative stiffness springs and the positive stiffness spring are connected to a base, respectively,
wherein an initial angle θ 0 of each of the negative stiffness springs with respect to a horizontal plane satisfies the following specific stiffness ratio α QZS of each of the negative stiffness springs to the positive stiffness spring at a quasi-zero stiffness point;

α
QZS

=

γ

2
⁢

(

1
-
γ

)

,

wherein, the stiffness ratio α QZS is k 0 /k v ;
L 0 : an initial length of each of the negative stiffness springs;
L: a length of each of the negative stiffness springs that is deformed;
γ: cosine of the initial angle θ 0 of each of the negative stiffness springs, defined as γ=cos θ 0 ;
α: a length of projection of each of the negative stiffness springs in a horizontal direction, defined as α=L cos θ 0 ;
k 0 : a stiffness of each of the negative stiffness springs; and
k v : a stiffness of the positive stiffness spring,
wherein the base includes a first sidewall portion, a second sidewall portion, and a middle portion, the middle portion being disposed between the first sidewall portion and the second sidewall portion to connect the first and second sidewall portions,
wherein each of the lower ends of the negative stiffness springs are connected to an inner surface of a corresponding one of the first and second sidewall portions, and
wherein the lower end of the positive stiffness spring is connected to a top surface of the middle portion.

2. The negative stiffness system according to claim 1 , wherein when the negative stiffness system comprises three sets of quasi-zero stiffness units, the three sets of quasi-zero stiffness units are arranged in a triangle, and
wherein when the negative stiffness system comprises four sets of quasi-zero stiffness units, the four sets of quasi-zero stiffness units are arranged in a rectangle.

3. The negative stiffness system according to claim 1 , wherein the upper ends of the negative stiffness springs and the upper end of the positive stiffness spring are directly connected together.

Assignees

• Shanghai Microelectronics Equi
• Univ Tsinghua

Inventors

• Zhu Yu
• Zhang Ming
• Liu Zhao
• Cheng Rong
• Wang Jing
• Tian Li
• Xu Dengfeng
• Yang Kaiming
• Hu Jinchun
• Yin Wensheng
• Mu Haihua
• Liu Hao
• Hu chuxiong

Classifications

• F16F15/067 Primary

  using only wound springs · CPC title

• F16F2228/063

  Negative stiffness · CPC title

• G03F7/70

  Microphotolithographic exposure; Apparatus therefor (photo-masks G03F1/00) · CPC title

• G03F7/70716

  Stages · CPC title

• G03F7/70816

  Bearings · CPC title