Vacuum pump with back-up bearing contact sensor
US-9822788-B2 · Nov 21, 2017 · US
US9752615B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9752615-B2 |
| Application number | US-76965107-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 27, 2007 |
| Priority date | Jun 27, 2007 |
| Publication date | Sep 5, 2017 |
| Grant date | Sep 5, 2017 |
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A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.
Opening claim text (preview).
What is claimed is: 1. A method of commutating a motor comprising: operatively interfacing a stator and actuated component of the motor; arranging at least two single circuit winding sets relative to the actuated component; and independently controlling each of the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets, driving forces of the actuated component and centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. 2. The method of claim 1 , further comprising: arranging at least three single circuit winding sets relative to the actuated component; and independently controlling the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered. 3. The method of claim 1 further comprising: arranging each of the at least two single circuit winding sets as a pair of winding subsets; and offsetting winding subsets within each pair of winding subsets so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force on the actuated component. 4. The method of claim 3 , comprising offsetting the winding subset within each pair of winding subsets by 90 electrical degrees. 5. An apparatus for commutating a motor comprising: at least two single circuit winding sets arranged relative to an actuated component of the motor; and commutation circuitry operable to independently control each of the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. 6. The apparatus of claim 5 , further comprising: at least three single circuit winding sets arranged relative to the actuated component; and commutation circuitry operable to independently control the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered. 7. The apparatus of claim 5 , wherein: each of the at least two single circuit winding sets comprise a pair of winding subsets; and winding subsets within each pair of winding subsets are offset so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force. 8. The apparatus of claim 7 , wherein the winding subsets within each pair of winding subsets are offset by 90 electrical degrees. 9. A motor comprising: a stator having at least two independently controlled single circuit winding sets; an actuated component operatively interfacing the stator; and a controller communicatively connected to the at least two single circuit winding sets for controlling each of the at least two single circuit winding sets so that the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, wherein the at least two single circuit winding sets are arranged relative to the actuated component and the controller is programmed to control the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, and wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. 10. The motor of claim 9 , wherein: the stator includes at least three independently controlled single circuit winding set; the controller is communicatively connected to the at least three winding sets, and the at least three winding sets are arranged relative to the actuated component and the controller is programmed to control the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered. 11. The motor of claim 9 , wherein: each of the at least two independently controlled single circuit winding sets include a pair of winding subsets; and winding subsets within each pair of winding subsets are offset so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force. 12. The motor of claim 11 , wherein the winding subsets within each pair of winding subsets are offset by 90 electrical degrees. 13. A substrate processing apparatus comprising: a motor including: a stator having at least two independently controlled single circuit winding sets; an actuated component operatively interfacing the stator; and a controller communicatively connected to each of the at least two single circuit winding sets for controlling the at least two single circuit winding sets so that the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, wherein the at least two single circuit winding sets are arranged relative to the actuated component and the controller is programmed to control the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets, the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, and wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. 14. The substrate processing apparatus of claim 13 , wherein: the stator comprises at least three independently controlled single circuit winding sets; the controller is communicatively connected to the at least three winding sets, and the at least three winding sets are arranged relative to the actuated component and the controller is programmed to control the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered. 15. The substrate processing apparatus of claim 13 , wherein: each of the at least two independently controlled single circuit winding sets include a pair of winding subsets; and winding subsets within each pair of winding subsets are offset so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force. 16. The substrate processing apparatus of claim 15 , wherein the winding subsets within each pair of winding subsets are offset by 90 electrical degrees. 17. A method of
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