Arc evaporated Me11-aMe2aZI/Mo1-b-cSicBbZII multilayer coatings

Patent metadata

Field	Value
Publication number	US-9752234-B2
Application number	US-201515326065-A
Country	US
Kind code	B2
Filing date	Jul 24, 2015
Priority date	Jul 24, 2014
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

A coating including a multilayer film, which includes a multi-layered structure including layers of the type I and layers of the type II. The layers of the type I are metal nitride with a chemical composition given by the formula Me1 1-a Me2 a ZI and the layers of the type II are a Mo-comprising material with chemical composition given by the formula Mo 1-b-c Si c B b ZII or Mo 1-b-c Si c B b . Also described is a method for depositing the above mentioned coating.

First claim

What is claimed is:

1. Coating comprising a multilayer film exhibiting a multilayered structure formed by a plurality N≧2 of layers type I and type II deposited alternated one on each other, characterized in that:
the layers of type I consist of a metal nitride comprising material I having chemical composition Me1 1-a Me2 a ZI, and
the layers of type II consist of a Mo comprising material II having chemical composition
Mo 1-b-c Si c B b ZII or Mo 1-b-c Si c B b ,

where:
Me1 is one element selected from the groups IVB, VB, and VIIB of the periodic table of the elements excepting Mo,
Me2 is one element selected from the group IIIA of the periodic table of the elements and Si,
ZI is N or NO or NC or NCO,
ZII is one or more elements selected from N, O and C,
b and c are atomic concentration coefficients and 1−b−c>0, 0<b≦0.99, and 0<c≦0.99.

2. Coating according to claim 1 , characterized in that:
the layers of type I comprise at least mainly and mostly TiAlN or are TiAlN layers, and
the layers of type II comprise at least mainly and mostly MoSiB or are MoSiB layers.

3. Coating according to claim 1 characterized in that the layers of the type I and II have individual thicknesses in nanometer magnitude and the bilayer period λ corresponding to the sum of the thickness of one layer of the type I and one layer of the type II deposited one on each other or the sum of the thickness of one layer of the type II and one layer of the type I deposited one on each other in the multilayer film has a value 4 and 240 nm.

4. Coating according to claim 3 characterized in that the bilayer period λ is less than 100 nm or less than 50 nm.

5. Coating according to claim 1 characterized in that the layers of type I have an individual thickness larger than the layers of type II.

6. Coating according to claim 2 , characterized in that:
the layers of type I are TiAlN layers having chemical composition Ti 1-x Al x N, and
the layers of type II are MoSiB layers having chemical composition Mo 1-y-z Si y B z , where:
the coefficients x, y and z correspond to the concentration in atomic percentage of Al in the TiAlN layers without considering the nitrogen concentration,
the coefficients y and z correspond to the concentrations in atomic percentage of Si and B in the MoSiB layers, respectively,
25≦x≦80, 1−y−z>y+z, y>0, and z>0.

7. Coating according to claim 6 , characterized in that 1−y−z>50, z<30.

8. Coating according to claim 6 , characterized in that 1−y−z<80.

9. Method for producing a coating according to claim 1 characterized in that the layers of the type I are produced by using cathodic arc PVD techniques.

10. Method for producing a coating according to claim 1 characterized in that the layers of the type II are produced by using sputter or HIPIMS PVD techniques.

11. Method according to claim 9 , wherein the layers of type I are produced by using cathodic arc PVD techniques and the type II are produced by using sputter or HIPIMS PVD techniques.

12. Coating according to claim 1 wherein the multilayer structure is formed by N≧4 of the layers type I and type II.

13. Coating according to claim 1 wherein Me1 is Ti, Me2 is Al, and ZI is N.

Assignees

• Oerlikon Surface Solutions Ag Pfaffikon

Inventors

• Riedl Helmut
• Arndt Mirjam
• Polcik Peter
• Mayrhofer Paul Heinz

Classifications

• C23C14/325

  Electric arc evaporation · CPC title

• C23C28/42 Primary

  characterized by the composition of the alternating layers · CPC title

• C23C14/0641

  Nitrides (C23C14/0617 takes precedence) · CPC title

• C23C14/067

  Borides · CPC title

• C23C14/3485

  using pulsed power to the target · CPC title