193nm laser and inspection system
US-9318869-B2 · Apr 19, 2016 · US
183NM laser and inspection system
US9748729B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9748729-B2 |
| Application number | US-201514872890-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 1, 2015 |
| Priority date | Oct 3, 2014 |
| Publication date | Aug 29, 2017 |
| Grant date | Aug 29, 2017 |
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Abstract
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A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic generator generates a fifth harmonic of the fundamental light. The frequency mixing module mixes the down-converted signal and the fifth harmonic to produce the laser output light at a frequency equal to a sum of the fifth harmonic frequency and the down-converted frequency. The OPS generates the down-converted signal by generating a down-converted seed signal at the down-converted frequency, and then mixing the down-converted seed signal with a portion of the fundamental light. At least one of the frequency mixing, frequency conversion or harmonic generation utilizes an annealed, deuterium-treated or hydrogen-treated CLBO crystal.
First claim
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The invention claimed is: 1. A laser assembly for generating laser output light having an output wavelength in the range of approximately 180 nm to approximately 185 nm, the laser assembly comprising: a fundamental laser configured to generate fundamental light having a fundamental wavelength equal to approximately 1064 nm and a corresponding fundamental frequency; a second harmonic generator coupled to the fundamental laser such that the second harmonic generator receives a fir…
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Physics · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Physics · mapped topic
- H01F17/0006Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9748729B2 cover?
- A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic gen…
- Who is the assignee on this patent?
- Kla Tencor Corp
- What technology area does this patent fall under?
- Primary CPC classification H01F17/0006. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 29 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 10 related publications on this page (citations in our corpus or others sharing the same primary CPC).