Semiconductor compound structure and method of fabricating the same using graphene or carbon nanotubes, and semiconductor device including the semiconductor compound structure

Patent metadata

Field	Value
Publication number	US-9748094-B2
Application number	US-201113095122-A
Country	US
Kind code	B2
Filing date	Apr 27, 2011
Priority date	Sep 3, 2010
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

A semiconductor compound structure and a method of fabricating the semiconductor compound structure using graphene or carbon nanotubes, and a semiconductor device including the semiconductor compound structure. The semiconductor compound structure includes a substrate; a buffer layer disposed on the substrate, and formed of a material including carbons having hexagonal crystal structures; and a semiconductor compound layer grown and formed on the buffer layer.

First claim

What is claimed is:

1. A semiconductor device comprising:
a substrate having a first surface;
a lower electrode disposed above the first surface of the substrate;
a buffer layer disposed on the lower electrode and above the first surface of the substrate, and comprising carbons having hexagonal crystal structures;
a light emission layer formed on the buffer layer, and formed of a semiconductor compound;
an insulating layer formed to bury a lower portion of the light emission layer on the buffer layer; and
an upper electrode formed to cover the light emission layer and the insulating layer.

2. The semiconductor device of claim 1 , further comprising a wetting layer formed on the buffer layer for depositing the light emission layer.

3. The semiconductor device of claim 1 , wherein the light emission layer comprises a first semiconductor layer formed on the buffer layer, an active layer formed on the first semiconductor layer, and a second semiconductor layer formed on the active layer.

4. The semiconductor device of claim 1 , wherein the light emission layer comprises a group III-V compound semiconductor material.

5. The semiconductor device of claim 1 , wherein the buffer layer comprises graphene or graphite.

6. The semiconductor device of claim 5 , wherein the light emission layer is formed as a plurality of rods.

7. The semiconductor device of claim 1 , wherein the buffer layer comprises carbon nanotubes (CNTs).

8. The semiconductor device of claim 7 , wherein the light emission layer is formed to cover the CNTs.

9. The semiconductor device of claim 1 , further comprising a resistive layer between the lower electrode and the buffer layer.

10. The semiconductor device of claim 1 , further comprising a catalyst layer on the lower electrode for forming the buffer layer.

11. The semiconductor device of claim 1 , wherein the lower electrode is formed on an upper surface of the substrate.

12. The semiconductor device of claim 1 , wherein the lower electrode is disposed to be separated from the substrate, and the insulating layer fills a space between the substrate and the lower electrode.

Assignees

• Choi Jun-Hee
• Kim Un-Jeong
• Lee Sang-Jin
• Samsung Electronics Co Ltd

Inventors

• Choi Jun-Hee
• Kim Un-Jeong
• Lee Sang-Jin

Classifications

• H10P14/3206

  Carbon, e.g. diamond-like carbon · CPC title

• H10P14/2922

  being non-crystalline insulating materials, e.g. glass or polymers · CPC title

• H10P14/3414 Primary

  being group IIIA-VIA materials · CPC title

• H01L21/02538 Primary

  Electricity · mapped topic

• H01L33/08

  Electricity · mapped topic