Cmos-based process for manufacturing a semiconductor gas sensor

Patent metadata

Field	Value
Publication number	US-9746437-B1
Application number	US-201715398025-A
Country	US
Kind code	B1
Filing date	Jan 4, 2017
Priority date	Aug 3, 2016
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

A CMOS-based process for manufacturing a semiconductor gas sensor includes the steps of: I) providing a semi-product, II) etching a substrate to remove a portion of the substrate and a portion of a first insulation layer so as to form a gas-sensing cavity, thereby to expose at least one sensing electrode; and III) depositing a gas-sensitive layer to cover the at least one sensing electrode.

First claim

What is claimed is:

1. A CMOS-based process for making a semi-product for manufacturing a semiconductor gas sensor, comprising the steps of:
(a) preparing a substrate made from a semiconductor material and having a first surface and a second surface opposite to the first surface;
(b) depositing a first insulation layer on the first surface of the substrate;
(c) forming in an integrated circuit area an N-type doped region and a P-type doped region under the first surface of the substrate;
(d) simultaneously forming on the first insulation layer a plurality of gate electrodes and at least one sensing electrode using a depositable conductive material, each of the gate electrodes being located above a corresponding one of the N-type and P-type doped regions, the at least one sensing electrode being located in a sensing area;
(e) depositing a second insulation layer on the first insulation layer so as to cover the gate electrodes and the at least one sensing electrode;
(f) forming a P-type doped source sub-region and a P-type doped drain sub-region in the N-type doped region and an N-type doped source sub-region and an N-type doped drain sub-region in the P-type doped region;
(g) forming a plurality of via holes each of which extends through the first and second insulation layers and communicates with a corresponding one of the P-type doped source sub-region, the P-type doped drain sub-region, the N-type doped source sub-region, and the N-type doped drain sub-region;
(h) simultaneously forming on the second insulation layer a micro-heater and a plurality of connecting ends of connecting portions using a resistive heating material, the micro-heater being in the sensing area and above the at least one sensing electrode, each of the connecting portions extending to fill a corresponding one of the via holes; and
(i) depositing a third insulation layer on the second insulation layer to cover the micro-heater while leaving the connecting ends of the connecting portions exposed.

2. The method according to claim 1 , wherein the depositable conductive material is polycrystalline silicon.

3. The method according to claim 1 , wherein the resistive heating material is selected from the group consisting of tantalum nitride, tungsten, and a combination thereof.

4. A CMOS-based process for manufacturing a semiconductor gas sensor, comprising the steps of:
(I) providing a semi-product made by the method according to claim 1 ;
(II) etching from the second surface of the substrate to remove a portion of the substrate and a portion of the first insulation layer so as to form a gas-sensing cavity, thereby to expose the at least one sensing electrode; and
(III) depositing a gas-sensitive layer to cover the at least one sensing electrode.

5. The method according to claim 4 , wherein in step (II), the first insulation layer is etched via deep reactive ion etching or inductively coupled plasma etching.

6. A semiconductor gas sensor manufactured by the method according to claim 4 .

Assignees

• Univ Nat Chiao Tung

Inventors

• Chiou Jin-Chern
• Tsai Shang-Wei

Classifications

• H10P50/283

  by chemical means · CPC title

• B81C1/00246

  Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate · CPC title

• B81C1/00206 Primary

  Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties · CPC title

• G01N27/00

  Investigating or analysing materials by the use of electric, electrochemical, or magnetic means (G01N3/00 – G01N25/00 take precedence; measurement or testing of electric or magnetic variables or of electric or magnetic properties of materials G01R) · CPC title

• G01N27/128 Primary

  Microapparatus · CPC title