Sensor, method for forming the same, and method of controlling the same

Patent metadata

Field	Value
Publication number	US-9746356-B2
Application number	US-201314758661-A
Country	US
Kind code	B2
Filing date	Dec 31, 2013
Priority date	Jan 2, 2013
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

According to embodiments of the present invention, a sensor for determining a flow parameter of a fluid is provided. The sensor includes a polymer membrane, an elongate microstructure extending from the polymer membrane, and a hydrogel coupled to at least a portion of the elongate microstructure, wherein the hydrogel and the elongate microstructure are arranged to cooperate to cause a displacement of the polymer membrane in response to a fluid flowing and interacting with the sensor, and wherein the sensor is configured to provide a measurement indicative of a flow parameter of the fluid based on the displacement of the polymer membrane. According to further embodiments of the present invention, a method for forming a sensor and a method of controlling a sensor are also provided.

First claim

The invention claimed is:

1. A sensor for determining a flow parameter of a fluid, the sensor comprising:
a polymer membrane;
an elongate microstructure extending at least substantially perpendicularly from a surface of the polymer membrane; and
a strain gauge formed on the polymer membrane;
wherein the elongate microstructure is arranged to cause a displacement of the polymer membrane in response to a fluid flowing and interacting with the sensor, and
wherein the strain gauge is configured to provide a measurement indicative of a flow parameter of the fluid based on the displacement of the polymer membrane.

2. The sensor as claimed in claim 1 , wherein the strain gauge is formed on the surface of the polymer membrane.

3. The sensor as claimed in claim 1 , wherein the strain gauge comprises a serpentine shape and is arranged at least substantially surrounding the elongate microstructure.

4. The sensor as claimed in claim 3 , wherein the serpentine shape is defined by a plurality of first elements extending radially from the elongate microstructure, and a plurality of second elements arranged circumferentially around the elongate microstructure,
wherein each respective second element of the plurality of second elements is arranged in between respective adjacent first elements of the plurality of first elements and connects the respective adjacent first elements.

5. The sensor as claimed in claim 4 , wherein each first element has a radial length that is larger than a circumferential length of each second element.

6. The sensor as claimed in claim 4 , wherein each first element has a width that is smaller than a width of each second element.

7. The sensor as claimed in claim 1 , wherein the elongate microstructure has a length of between about 2500 μm and about 4000 μm.

8. The sensor as claimed in claim 1 , wherein the elongate microstructure has an aspect ratio of between about 6 and about 10.

9. The sensor as claimed in claim 1 , wherein the elongate microstructure comprises a stereolithographically defined elongate microstructure.

10. The sensor as claimed in claim 1 , wherein the elongate microstructure comprises a polymer.

11. The sensor as claimed in claim 1 , wherein the elongate microstructure has a cylindrical structure.

12. The sensor as claimed in claim 1 , wherein the polymer membrane comprises a liquid crystal polymer.

13. The sensor as claimed in claim 12 , wherein the liquid crystal polymer has a circular shape.

14. The sensor as claimed in claim 1 , further comprising a hydrogel coupled to at least a portion of the elongate microstructure, the portion being an end of the elongate microstructure distal to the polymer membrane.

15. The sensor as claimed in claim 14 , further comprising a plurality of nanofibers at least substantially encapsulated by the hydrogel.

16. The sensor as claimed in claim 15 , wherein each nanofiber has a diameter of between about 500 nm and about 1000 nm.

17. A method for forming a sensor for determining a flow parameter of a fluid, the method comprising:
providing a polymer membrane;
forming an elongate microstructure extending at least substantially perpendicularly from a surface of the polymer membrane;
forming a strain gauge on the polymer membrane;
wherein the elongate microstructure is arranged to cause a displacement of the polymer membrane in response to a fluid flowing and interacting with the sensor, and
wherein the strain gauge is configured to provide a measurement indicative of a flow parameter of the fluid based on the displacement of the polymer membrane.

18. The method as claimed in claim 17 , wherein forming an elongate microstructure comprises stereolithographically defining the elongate microstructure.

19. The method as claimed in claim 17 , further comprising forming a hydrogel coupled to at least a portion of the elongate microstructure, the portion being an end of the elongate microstructure distal to the polymer membrane.

20. The method as claimed in claim 19 , further comprises forming a plurality of nanofibers,
wherein forming a hydrogel comprises forming the hydrogel at least substantially encapsulating the plurality of nanofibers.

Assignees

• Univ Nanyang Tech
• Massachusetts Inst Technology

Inventors

• Kottapalli Ajay Giri Prakash
• Miao Jianmin
• Asadniaye Fard Jahromi Mohsen
• Triantafyllou Michael

Classifications

• G01F1/28 Primary

  by drag-force, e.g. vane type or impact flowmeter · CPC title

• G01L9/0051

  using variations in ohmic resistance · CPC title

• G01F1/206

  Measuring pressure, force or momentum of a fluid flow which is forced to change its direction · CPC title

• G01P5/04 Primary

  using deflection of baffle-plates · CPC title

• B33Y10/00

  Processes of additive manufacturing · CPC title