Corrosion resistant retaining rings

Patent metadata

Field	Value
Publication number	US-9744640-B2
Application number	US-201514885944-A
Country	US
Kind code	B2
Filing date	Oct 16, 2015
Priority date	Oct 16, 2015
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

Implementations described herein protect a retaining ring for a polishing system from corrosive polishing chemistries. In one embodiment, a retaining ring has a ring-shaped body having a top surface, an inside diameter sidewall, an outer diameter sidewall and a bottom surface. The inside diameter side wall is configured to circumscribe a substrate. The ring shaped body has a rigid ring-shaped portion, a polymeric ring-shaped portion stacked on the rigid ring-shaped portion and covering at least three sides of the rigid ring-shaped portion, a plurality of grooves formed in the bottom surface, and a plurality of wash ports formed through the polymeric ring-shaped portion, wherein the wash ports are isolated from the rigid ring-shaped portion.

First claim

What is claimed is:

1. A retaining ring for a polishing system, the retaining ring comprising:
a ring-shaped body having a top surface, an inside diameter sidewall, an outer diameter sidewall and a bottom surface, the inside diameter side wall configured to circumscribe a substrate; wherein the ring shaped body comprises:
a rigid ring-shaped portion;
a polymeric ring-shaped portion stacked on the rigid ring-shaped portion and covering at least three sides of the rigid ring-shaped portion;
a plurality of grooves formed in the bottom surface, and
a plurality of wash ports formed through the polymeric ring-shaped portion, wherein the wash ports are isolated from the rigid ring-shaped portion by a polymeric material continuous with the polymeric ring-shaped portion.

2. The retaining ring of claim 1 , wherein the wash ports are non-perpendicular relative to a centerline of the ring-shaped body.

3. The retaining ring of claim 1 , wherein the polymeric ring-shaped portion comprises:
protrusions extending into the rigid ring-shaped portion, the wash ports formed through the protrusions.

4. The retaining ring of claim 3 , wherein an inside diameter of the wash ports are covered by the polymeric ring-shaped portion, the polymeric ring-shaped portion comprised by the polymeric material.

5. The retaining ring of claim 1 , wherein the rigid ring-shaped portion is completely encapsulated by the polymeric ring-shaped portion, the polymeric ring-shaped portion comprised by the polymeric material.

6. The retaining ring of claim 1 further comprising:
a polymeric coating formed in an inside diameter of the wash ports, the polymeric coating isolating the rigid ring-shaped portion from the wash ports, the polymeric coating comprised by the polymeric material.

7. A retaining ring for a polishing system, the retaining ring comprising:
a ring-shaped body having a top surface, an inside diameter sidewall, an outer diameter sidewall and a bottom surface, the inside diameter side wall configured to circumscribe a substrate; wherein the ring shaped body comprises:
a metal ring-shaped portion;
a polymeric ring-shaped portion covering the exterior of the rigid ring-shaped portion;
a plurality of grooves formed in the bottom surface of the ring-shaped body, and
a plurality of wash ports formed through the polymeric ring-shaped portion, wherein the wash ports are isolated from the metal ring-shaped portion by a polymeric material continuous with the polymeric ring-shaped portion.

8. The retaining ring of claim 7 , wherein the wash ports are non-perpendicular relative to a centerline of the ring-shaped body.

9. The retaining ring of claim 7 , wherein the polymeric ring-shaped portion comprises:
protrusions extending into the metal ring-shaped portion, the wash ports formed through the protrusions.

10. The retaining ring of claim 9 , wherein an inside diameter of the wash ports are covered by the polymeric ring-shaped portion, the polymeric ring-shaped portion comprised by the polymeric material.

11. The retaining ring of claim 7 , wherein the metal ring-shaped portion is completely encapsulated by the polymeric ring-shaped portion, the polymeric ring-shaped portion comprised by the polymeric material.

12. The retaining ring of claim 7 further comprising:
a polymeric coating formed in an inside diameter of the wash ports, the polymeric coating isolating the metal ring-shaped portion from the wash ports, the polymeric coating comprised by the polymeric material.

13. The retaining ring of claim 7 , wherein the metal ring-shaped portion is fabricated from stainless steel.

14. The retaining ring of claim 13 , wherein the polymeric ring-shaped portion is fabricated at least one of polyphenylene sulfide (PPS), polyethylene terephthalate, polyetheretherketone, and polybutylene terephthalate.

Assignees

• Applied Materials Inc

Inventors

• Sheelavant Gangadhar
• Yavelberg Simon
• Hu Yongqi

Classifications

• B24B37/32 Primary

  Retaining rings · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title