Three-dimensional conductive electrode for solar cell

Patent metadata

Field	Value
Publication number	US-9741880-B2
Application number	US-201514710149-A
Country	US
Kind code	B2
Filing date	May 12, 2015
Priority date	Jun 30, 2011
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A photovoltaic device and method include forming a plurality of pillar structures in a substrate, forming a first electrode layer on the pillar structures and forming a continuous photovoltaic stack including an N-type layer, a P-type layer and an intrinsic layer on the first electrode. A second electrode layer is deposited over the photovoltaic stack such that gaps or fissures occur in the second electrode layer between the pillar structures. The second electrode layer is wet etched to open up the gaps or fissures and reduce the second electrode layer to form a three-dimensional electrode of substantially uniform thickness over the photovoltaic stack.

First claim

What is claimed is:

1. A method for forming a photovoltaic device, comprising: forming a plurality of pillar structures in a substrate; forming a first electrode layer on the pillar structures;
forming a continuous photovoltaic stack including an N-type layer, a P-type layer and an intrinsic layer on the first electrode layer;
depositing a second electrode layer over the photovoltaic stack such that air gaps occur in the second electrode layer between the pillar structures, wherein the air gaps extend in a stack direction for a majority of the height of the pillar structures and wherein only a single air gap is formed between each set of adjacent pillar structures;
further depositing the second electrode layer to enclose the air gaps in the second electrode layer, wherein the enclosed air gaps extend in a stack direction for a majority of the height of the pillar structures; and
wet etching the second electrode layer to reduce the second electrode layer and to form a three-dimensional electrode over the photovoltaic stack.

2. The method as recited in claim 1 , wherein the second electrode layer includes a transparent conductive oxide and the step of depositing includes depositing the second electrode layer by sputtering.

3. The method as recited in claim 2 , wherein the transparent conductive oxide includes ZnO.

4. The method as recited in claim 1 , wherein the substrate includes glass.

5. The method as recited in claim 1 , wherein wet etching includes employing hydrochloric acid.

6. The method as recited in claim 1 , wherein depositing includes depositing the second electrode layer to a thickness of between about 3 microns to about 5 microns.

7. A photovoltaic device, comprising:
a substrate layer having a plurality of pillar structures formed therein;
a first electrode formed over the substrate layer and extending over the pillar structures;
a continuous photovoltaic stack conformally formed over the first electrode; and
a second electrode formed on the photovoltaic stack and including air gaps between the pillar structures buried within the second electrode, wherein only a single air gap is enclosed within the second electrode layer between sets of adjacent pillar structures so that the single air gap between each set of adjacent pillar structures extends in a stack direction for a majority of the height of the pillar structures.

8. The device as recited in claim 7 , wherein the photovoltaic stack includes a P-type layer, an N-type layer and an intrinsic layer disposed therebetween.

9. The device as recited in claim 7 , wherein the substrate includes glass.

10. The device as recited in claim 7 , further comprising at least one additional continuous photovoltaic stack formed on the continuous photovoltaic stack.

11. The device as recited in claim 7 , wherein the second electrode includes a thickness of between about 3 and 5 microns.

12. The device as recited in claim 7 , wherein the second electrode includes a three-dimensional texture surface that is opposite a surface of the second electrode in contact with the pillar structures.

13. The device as recited in claim 7 , wherein the second electrode layer includes a transparent conductive oxide.

14. The device as recited in claim 13 , wherein the transparent conductive oxide includes ZnO.

Assignees

• IBM

Inventors

• Fogel Keith E
• Hong Augustin J
• Kim Jeehwan
• Sadana Devendra K

Classifications

• Y02E10/50

  Photovoltaic [PV] energy · CPC title

• H01L31/077

  Electricity · mapped topic

• H01L31/035281

  Electricity · mapped topic

• H01L31/1804

  Electricity · mapped topic

• H01L31/03762

  Electricity · mapped topic