Micro-chamber for inspecting sample material

Patent metadata

Field	Value
Publication number	US-9741529-B2
Application number	US-201615221510-A
Country	US
Kind code	B2
Filing date	Jul 27, 2016
Priority date	Jul 29, 2015
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A micro-chamber for inspecting sample material can be filled with sample material immersed in a liquid without the need of applying vacuum tubing's to the micro-chamber. The micro-chamber includes an inspection volume for holding the sample material for observation. The inspection volume is defined by a first rigid layer, a second rigid layer spaced from the first rigid layer, and a hermetic seal between the first and the second rigid layers. One of the rigid layers includes thin part can be punctured. The liquid with immersed sample material, when placed upon the thin part, is sucked into the evacuated inspection volume when the thin part is punctured.

First claim

The invention claimed is:

1. A micro-chamber for inspecting sample material, the sample material immersed in a liquid when filling the micro-chamber, the micro-chamber comprising:
an inspection volume for holding the sample material, the inspection volume defined by:
a first rigid layer,
a second rigid layer spaced from the first rigid layer, and
a hermetic seal between the first and the second rigid layers,

wherein
prior to filling the inspection chamber with the liquid with immersed sample material,
a thin part of at least one of the rigid layers separates the inspection volume from the outside,
the thin part is equipped to be punctured, and
the inspection volume is an evacuated volume,

as a result of which the liquid with immersed sample material, when placed upon the thin part, is sucked into the inspection volume when the thin part is punctured.

2. The micro-chamber of claim 1 in which the micro-chamber is equipped with a window transparent to radiation, as a result of which said radiation can enter and/or leave the inspection volume via this window.

3. The micro-chamber of claim 2 in which the micro-chamber is equipped with two windows transparent to radiation, one window in the first rigid layer and the second window in the second rigid layer, the windows positioned relative to each other such, that radiation entering the inspection volume via one window can leave the inspection volume via the other window, thereby enabling transmissive inspection of the sample material.

4. The micro-chamber of claim 2 , in which the radiation is radiation from the group of infrared light, visible light, ultra-violet light, X-ray, energetic electrons, neutrons, and the entrance window is transparent to said radiation.

5. The micro-chamber of claim 1 , in which the hermetic seal is formed by an elastomer.

6. The micro-chamber of claim 1 , in which the hermetic seal is formed by bonding the first and the second rigid layer to each other.

7. The micro-chamber of claim 1 in which the first and the second rigid layer are spaced less than 10 μm from each other, preferably less than 2.5 μm.

8. The micro-chamber of claim 1 in which at least one of the two rigid layers is a semiconductor chip.

9. A method of filling a micro-chamber according to claim 1 for inspecting sample material, the method comprising:
providing a micro-chamber according to claim 1 ,
providing sample material immersed in a liquid,
placing a droplet of the liquid with immersed sample material on the thin part of the micro-chamber,
puncturing the thin part,
inspecting the sample material.

10. The method of claim 9 in which, after puncturing the thin part and prior to inspection, the method comprises a step of evaporating the liquid in which the sample material is immersed.

11. The method of claim 9 in which, after puncturing the thin part and prior to inspection, the method comprises a step of sealing the puncture.

12. The method of claim 9 in which inspection of the sample material comprises exposing the sample material to radiation from the group of infrared light, visible light, ultra-violet light, X-ray, energetic electrons, neutrons, and the window through which said radiation is admitted to the sample is transparent to said radiation.

13. The method of claim 9 in which inspection of the sample material comprises detecting radiation emitted by the sample material, the radiation from the group of infrared light, visible light, ultra-violet light, X-ray, energetic electrons, neutrons, and the window through which said radiation is detected is transparent to said radiation.

14. The method of claim 9 in which after puncturing the thin part and before inspection of the sample material the method comprises a step of vitrifying the micro-chamber and the sample material in it.

15. A method of inspecting sample material, comprising:
providing a micro-chamber, the micro-chamber comprising an inspection volume, the inspection volume being evacuated and defined by a first rigid layer and a second rigid layer spaced from the first layer, with a hermetic seal between the first and second layers, at least one of the layers having with a thin part equipped to be punctured;
providing sample material immersed in a liquid;
placing a droplet of liquid containing the sample material on the thin part of the micro-chamber;
admitting liquid containing sample material to enter the micro-chamber by puncturing the thin part; and
inspecting the sample material.

16. The method of claim 15 , wherein the micro-chamber further comprises a window, the window being transparent to radiation.

17. The method of claim 16 , wherein the first layer and second layers are each equipped with a window, arranged such that the sample material is placed between the windows and inspection of the sample comprises detecting radiation transmitted through the sample material.

18. The method of claim 15 , wherein inspection of the sample comprises detecting radiation emitted from the sample material.

19. The method of claim 15 , further comprising allowing the liquid in which the sample material is contained to evaporate before inspecting the sample material.

20. The method of claim 15 , further comprising vitrifying the micro-chamber and the sample material contained within before inspecting the sample material.

Assignees

• Fei Co

Inventors

• Mele Luigi
• Dona Pleun
• Van Veen Gerard Nicolaas Anne

Classifications

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• G01N1/04

  in the solid state, e.g. by cutting · CPC title

• H01J2237/2003

  Environmental cells · CPC title

• H01J2237/2005

  Seal mechanisms · CPC title