Charged particle beam apparatus and sample image acquiring method

Patent metadata

Field	Value
Publication number	US-9741526-B2
Application number	US-201414912521-A
Country	US
Kind code	B2
Filing date	Mar 10, 2014
Priority date	Sep 6, 2013
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.

First claim

The invention claimed is:

1. A charged-particle beam apparatus comprising:
a charged-particle optical column that irradiates a sample with a primary charged-particle beam;
a housing that forms a part of the charged-particle beam apparatus and that has an inside thereof which is evacuated by a vacuum pump;
a membrane which is able to maintain differential pressure between a space which is evacuated and a space in which the sample is disposed, and through which the primary charged-particle beam transmits or passes;
a detector that detects secondary charged-particles that are obtained by irradiating the sample with the primary charged-particle beam;
a distance adjusting mechanism that varies a distance between the sample and the membrane; and
a control section that monitors the distance between the sample and the membrane based on a detection signal that is output from the detector or an image that is generated from the detection signal;
wherein the control section detects that the distance between the sample and the membrane becomes a specific distance or becomes closer than the specific distance by brightness information or resolution information of the detection signal or brightness or resolution of an image generated from the detection signal when the primary charged-particle beam is applied by first irradiation energy;
further comprising:
an irradiation energy control section that varies irradiation energy of the primary charged-particle beam to the sample in at least two or more conditions;
wherein the control section acquires the image of the sample from the detection signal that is obtained from the sample by applying the primary charged-particle beam by second irradiation energy that is higher than the first irradiation energy after the distance between the sample and the membrane is detected to be the specific distance or closer than the specific distance.

2. The charged-particle beam apparatus according to claim 1 ,
wherein the control section monitors the distance between the sample and the membrane based on brightness of a portion that is in a predetermined distance from an edge of the membrane in the image or a distance of a portion, which is darker than predetermined brightness, from the edge of the membrane in the image.

3. A charged-particle beam apparatus comprising:
a charged-particle optical column that irradiates a sample with a primary charged-particle beam;
a housing that forms a part of the charged-particle beam apparatus and that has an inside thereof which is evacuated by a vacuum pump;
a membrane which is able to maintain differential pressure between a space which is evacuated and a space in which the sample is disposed, and through which the primary charged-particle beam transmits or passes;
a detector that detects secondary charged-particles that are obtained by irradiating the sample with the primary charged-particle beam;
a distance adjusting mechanism that varies a distance between the sample and the membrane;
a control section that monitors the distance between the sample and the membrane based on a detection signal that is output from the detector or an image that is generated from the detection signal; and
a threshold setting section that sets a threshold of a parameter obtained from the detection signal that is output from the detector or the image that is generated from the detection signal;
wherein the control section monitors whether or not a value of the parameter reaches the threshold that is set by the threshold setting section;
wherein the distance between the sample and the membrane is closed by the distance adjusting mechanism until the distance reaches the threshold; and
wherein the parameter is the resolution information of the detection signal generated from the sample, or the resolution of the image that is generated from the detection signal.

4. A sample image acquiring method using a charged-particle beam apparatus including a charged-particle optical column that irradiates a sample with a primary charged-particle beam; a housing that forms a part of the charged-particle beam apparatus and that has an inside thereof which is evacuated by a vacuum pump; a membrane which is able to maintain differential pressure between a space which is evacuated and a space in which the sample is disposed, and through which the primary charged-particle beam transmits or passes; and a detector that detects secondary charged-particles that are obtained by irradiating the sample with the primary charged-particle beam, the method comprising:
a step of monitoring a distance between the sample and the membrane based on a detection signal that is output from the detector or an image that is generated from the detection signal;
wherein detecting or recognizing that the distance between the sample and the membrane becomes a specific distance or becomes closer than the specific distance by detecting or recognizing brightness information or resolution information of the detection signal or brightness or resolution of an image generated from the detection signal when the primary charged-particle beam is applied by first irradiation energy, is performed; and
a step of acquiring the image of the sample from the detection signal when the primary charged-particle beam is applied by second irradiation energy that is higher than the first irradiation energy after the distance between the sample and the membrane is detected or recognized to be the specific distance or closer than the specific distance.

5. The sample image acquiring method according to claim 4 , further comprising:
a step of monitoring the distance between the sample and the membrane based on brightness of a portion that is in a predetermined distance from an edge of the membrane in the image or a distance of a portion, which is darker than predetermined brightness, from the edge of the membrane in the image.

6. A sample image acquiring method using a charged-particle beam apparatus including a charged-particle optical column that irradiates a sample with a primary charged-particle beam; a housing that forms a part of the charged-particle beam apparatus and that has an inside thereof which is evacuated by a vacuum pump; a membrane which is able to maintain differential pressure between a space which is evacuated and a space in which the sample is disposed, and through which the primary charged-particle beam transmits or passes; and a detector that detects secondary charged-particles that are obtained by irradiating the sample with the primary charged-particle beam, the method comprising:
a step of monitoring a distance between the sample and the membrane based on a detection signal that is output from the detector or an image that is generated from the detection signal;
a step of determining a threshold of a parameter obtained from the detection signal that is output from the detector or the image that is generated from the detection signal,
a step of monitoring whether or not the parameter reaches the threshold, and a step of causing the distance between the sample and the membrane to be closer to each other until the distance reaches the threshold;
wherein the parameter is the resolution information of the detection signal generated from the sample, or the resolution of the image that is generated from the detection signal.

Assignees

• Hitachi High Tech Corp

Inventors

• Ominami Yusuke
• Nishimura Masako
• Kawanishi Shinsuke
• Suzuki Hiroyuki

Classifications

• H01J2237/28

  Scanning microscopes · CPC title

• H01J37/18

  Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel} · CPC title

• H01J2237/202

  Movement · CPC title

• H01J2237/164

  Particle-permeable windows · CPC title

• H01J37/16 Primary

  Vessels; Containers · CPC title