Additions of organic species to facilitate crosslinker removal during PSPI cure

Patent metadata

Field	Value
Publication number	US-9740101-B2
Application number	US-201514940857-A
Country	US
Kind code	B2
Filing date	Nov 13, 2015
Priority date	Nov 13, 2015
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A formulation comprising an esterified polyamide resin with a photosensitive linkage, a polymerizable crosslinker, and an organic species is provided. The organic species is selected such that (a) when exposed to UV radiation, it copolymerizes with the polymerizable crosslinker and the photosensitive linkage on the esterified polyamide resin forming the crosslinking network, (b) during thermal cure the copolymer thus formed drops from polyimide backbones, and (c) wherein the thermal degradation temperature of the copolymer thus formed is lower than the thermal degradation temperature of the homopolymer formed from the polymerizable crosslinker and the thermal degradation temperature of the copolymer formed from the polymerizable crosslinker and the photosensitive linkage on the esterified polyamide resin. The formulation is useful in forming a semiconductor passivation layer and facilitates more complete removal of crosslinker using less stringent conditions.

First claim

What is claimed is:

1. A formulation comprising:
an esterified polyamide resin with a photosensitive linkage;
a polymerizable crosslinker selected from at least one methacrylate; and
an organic species selected from an acrylamide, wherein when the organic
species is exposed to UV radiation, the organic species forms a copolymer (Polymer 2 ) with the polymerizable crosslinker and the photosensitive linkage on the esterified polyamide resin generating a crosslinking network, wherein thermal degradation temperature of Polymer 2 is lower than thermal degradation temperature of a Polymer 1 , wherein Polymer 1 comprises the homopolymer formed from the polymerizable crosslinker, and the copolymer formed from the polymerizable crosslinker and the photosensitive linkage on the esterified polyamide resin.

2. The formulation of claim 1 wherein the polymerizable crosslinker comprises hydroxyethyl methacrylate (HEMA).

3. The formulation of claim 1 wherein the organic species comprises N-(4-chlorophenyl) acrylamide.

4. The formulation of claim 1 wherein the organic species is present at less than 20% by weight based on the weight of the polymerizable crosslinker in the formulation.

5. The formulation of claim 4 wherein the organic species is present at less than 10% by weight based on the weight of the polymerizable crosslinker in the formulation.

6. The formulation of claim 4 wherein the organic species is present at about 1% by weight to about 15% by weight based on the weight of the polymerizable crosslinker in the formulation.

7. The formulation of claim 6 wherein the organic species is present at about 2% by weight to about 10% by weight based on the weight of the polymerizable crosslinker in the formulation.

8. A passivation polymer formulation for semiconductor use comprising:
an esterified polyamide resin with a photosensitive linkage;
hydroxyethyl methacrylate (HEMA); and
N-(4-chlorophenyl) acrylamide, wherein the N-(4-chlorophenyl) acrylamide is present at less than 10% by weight based on the weight of the HEMA present in the formulation.

9. A method of removing crosslinker present in a cured passivation layer comprising:
(i) providing a formulation comprising
an esterified polyamide resin with a photosensitive linkage,
a polymerizable crosslinker selected from at least one methacylate, and
an organic species an organic species selected from an acrylamide, wherein, when the organic species is exposed to UV radiation, the organic species forms a copolymer (Polymer 2 ) with the polymerizable crosslinker and the photosensitive linkage on the esterified polyamide resin, wherein thermal degradation temperature of Polymer is lower than thermal degradation temperature of a Polymer 1 , wherein Polymer 1 comprises the homopolymer formed from the polymerizable crosslinker and the copolymer formed from the polymerizable crosslinker and the photosensitive linkage on the esterified polyamide resin;
(ii) forming a film comprising the formulation on a surface;
(iii) exposing the film to UV radiation under conditions effective to generate a crosslinking network between Polymer 2 and the esterified polyamide resin;
(iv) curing the product of step (iii) under conditions effective to convert at least a portion of the esterified polyamide resin to a cured polyimide passivation layer and to substantially remove Polymer 2 from the passivation layer.

10. The method of claim 9 wherein the polymerizable crosslinker comprises hydroxyethyl methacrylate (HEMA) and the organic species comprises N-(4-chlorophenyl) acrylamide.

11. The method of claim 10 wherein the N-(4-chlorophenyl) acrylamide is present at less than 10% by weight based on the weight of the HEMA present in the formulation.

12. The method of claim 9 wherein the curing is a thermal cure at a temperature of less than 385° C.

13. The method of claim 12 wherein the temperature is about 350° C. or less.

14. The method of claim 13 wherein the temperature is between about 270° C. to about 325° C.

15. The method of claim 13 wherein the thermal cure is less than 4 hours long.

16. The method of claim 15 wherein the thermal cure is about 2 hours long.

17. The method of claim 9 wherein the surface is on a semiconductor device.

18. The method of claim 9 wherein the method forms part of a Far Back End of Line (FBEOL) semiconductor device processing.

19. A semiconductor device comprising a passivation layer made from the formulation of claim 8 .

Assignees

• Globalfoundries Inc

Inventors

• Yuan Qin
• Chace Mark
• Liu Jun
• Protzman Janine L
• Calero Diaz Del Castillo Victoria L

Classifications

• H10P14/6538

  by exposure to UV light · CPC title

• H10P14/683

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• H10W74/47

  comprising organic materials, e.g. plastics or resins · CPC title

• H01L21/02348

  Electricity · mapped topic

• H01L21/02318

  Electricity · mapped topic