Mems flow control chip for gas chromatography
US-2015369781-A1 · Dec 24, 2015 · US
US9739755B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9739755-B2 |
| Application number | US-201414287753-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 27, 2014 |
| Priority date | May 27, 2014 |
| Publication date | Aug 22, 2017 |
| Grant date | Aug 22, 2017 |
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One end of carrier gas channel, purge gas channel and split gas channel is connected to sample gasification chamber. The other end of carrier gas channel, purge gas channel, and split gas channel is connected to a flow rate control mechanism in the form of carrier gas flow rate control block, purge gas flow rate control block and split gas flow rate control block respectively. Carrier gas flow rate control block, purge gas flow rate control block and split gas flow rate control block constitute a flow rate control unit. This reduces the possibility of leakage of gas to the outside and admixture of impurities from the outside in the flow rate control mechanism.
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What is claimed is: 1. A gas chromatograph apparatus comprising: a flow rate control mechanism comprising a single block in which are integrally joined: a first connection unit for connecting a gas supply source which supplies gas; a second connection unit for connecting a gas channel for guiding gas from said gas supply source to a predetermined part; an internal channel which connects said first connection unit to said second connection unit; and a flow rate control valve which controls the flow rate of gas flowing between said first connection unit and said second connection unit by adjusting the channel width of said internal channel; analytical column for separating a sample; detector for detecting the sample which has been separated in said analytical column; sample introduction channel for guiding the sample into said analytical column; sample injection unit for injecting the sample into said sample introduction channel; and carrier gas supply unit which supplies a carrier gas to the sample injection unit for conveying the sample injected from the sample injection unit toward the analytical column, wherein the flow rate control mechanism is interposed between the carrier gas supply source and the channel of said carrier gas supply unit which communicates with the sample injection unit. 2. The gas chromatograph apparatus as described in claim 1 , further comprising, within said block, a sensor connection channel for connecting a pressure sensor to said internal channel, one end of which second channel communicates with said internal channel. 3. The gas chromatograph apparatus as described in claim 2 , wherein said block integrally retains said pressure sensor. 4. A gas chromatograph apparatus comprising: a flow rate control mechanism comprising a single block in which are integrally joined: a first connection unit for connecting a gas supply source which supplies gas; a second connection unit for connecting a gas channel for guiding gas from said gas supply source to a predetermined part; an internal channel which connects said first connection unit to said second connection unit; and a flow rate control valve which controls the flow rate of gas flowing between said first connection unit and said second connection unit by adjusting the channel width of said internal channel; an analytical column for separating a sample, a detector for detecting the sample which has been separated in said analytical column, a sample introduction channel for guiding the sample into said analytical column, a sample injection unit for injecting the sample into said sample introduction channel, a carrier gas supply unit which supplies a carrier gas to said sample injection unit for conveying the sample injected from said sample injection unit toward said analytical column, a detector gas supply unit for supplying detector gas to said detector, and the flow rate control mechanism interposed between the detector gas supply source and the channel of said detector gas supply unit which communicates with said detector. 5. The gas chromatograph of claim 4 , further comprising, within said block, a sensor connection channel for connecting a pressure sensor to said internal channel, one end of which second channel communicates with said internal channel. 6. The gas chromatograph of claim 5 , wherein said block integrally retains said pressure sensor.
using a splitter · CPC title
speed, flow rate · CPC title
Gas chromatography · CPC title
Injection (G01N30/24 takes precedence) · CPC title
with tubular diaphragm · CPC title
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