Matching back pressures on differential oil-filled diaphragms

Patent metadata

Field	Value
Publication number	US-9739677-B2
Application number	US-201514683537-A
Country	US
Kind code	B2
Filing date	Apr 10, 2015
Priority date	Dec 19, 2012
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

Exemplary embodiments of the present invention provide a differential pressure transducer that comprises first and second diaphragms of different configurations, i.e., different diameters and/or thicknesses. The pressure transducer provides more versatility over prior art designs as the diaphragms can be of different configurations yet still maintain substantially similar back pressures. Therefore, the errors commonly associated with back pressures are eliminated because the back pressures from the diaphragms ultimately cancel out in the sensor's differential pressure measurement.

First claim

The invention claimed is:

1. A pressure transducer, comprising:
a first diaphragm housed in a first section of a header, the first diaphragm having a first stiffness and being adapted to receive a first pressure;
a second diaphragm housed in a second section of the header, the second diaphragm having a second stiffness and being adapted to receive a second pressure, wherein the first stiffness and the second stiffness are different; and
a sensor module in communication with the first diaphragm and the second diaphragm via first and second oil-filled volumes, respectively, the sensor module adapted to output a signal indicating a difference between the first and second pressures;
wherein the first diaphragm receives a first back pressure from the first oil-filled volume and the second diaphragm receives a second back pressure from the second oil-filled volume.

2. The pressure transducer of claim 1 , wherein the first diaphragm and the second diaphragm are of different diameters.

3. The pressure transducer of claim 1 , wherein the first diaphragm and the second diaphragm are of different thicknesses.

4. The pressure transducer of claim 1 , wherein one of the first diaphragm or the second diaphragm comprises a different convolution to impart a different stiffness relative to a corresponding second diaphragm or first diaphragm.

5. The pressure transducer of claim 4 , wherein the first diaphragm and the second diaphragm are of equivalent thicknesses.

6. The pressure transducer of claim 1 , wherein the sensor module is a piezoresistive sensor.

7. The pressure transducer of claim 6 , wherein the sensor module comprises a Wheatstone bridge including at least one piezoresistor.

8. A pressure transducer, comprising:
a first diaphragm having a first stiffness housed in a first section of a header, the first diaphragm adapted to receive a first pressure and deflect indicative of the first pressure;
a first oil-filled volume defined on a backside of the first diaphragm, the first oil-filled volume adapted to transmit the deflection of the first diaphragm to a sensor module, and wherein the first diaphragm receives a first back pressure from the first oil-filled volume;
a second diaphragm having a second stiffness housed in a second section of the header, the second diaphragm adapted to receive a second pressure and deflect indicative of the first pressure; and
a second oil-filled volume defined on a backside of the second diaphragm, the second oil-filled volume adapted to transmit the deflection of the second diaphragm to the sensor module via an oil-filled channel housed in a middle section of the header, and wherein the second diaphragm receives a second back pressure from the second oil-filled volume; and
wherein the first stiffness and the second stiffness are different.

9. The pressure transducer of claim 8 , wherein deflection of the first and second diaphragms is determined by:

y
c

≈

Pr
4

Et
3

where y c is deflection at the center of the diaphragms, P is the pressure on the diaphragms, r is the radius of the diaphragms, E is Young's Modulus, and t is diaphragm thickness.

10. The pressure transducer of claim 8 , wherein expansion of oil in the first and second oil-filled volumes is determined by:
ΔV≈VTβ

where ΔV is the change in volume, V is the original volume, T is the temperature, and β is the volumetric expansion coefficient of the oil.

11. The pressure transducer of claim 8 , wherein the sensor module is adapted to output a signal indicative of a difference between the first and second pressures.

12. The pressure transducer of claim 8 , wherein the first diaphragm and the second diaphragm are of different thicknesses.

13. The pressure transducer of claim 8 , wherein the first diaphragm and the second diaphragm are of different diameters.

14. The pressure transducer of claim 8 , wherein the first diaphragm and the second diaphragm are of different thicknesses.

15. The pressure transducer of claim 8 , wherein one of the first diaphragm or the second diaphragm comprises a different convolution to impart a different stiffness relative to a corresponding second diaphragm or first diaphragm.

16. The pressure transducer of claim 15 , wherein the first diaphragm and the second diaphragm are of equivalent thicknesses.

17. The pressure transducer of claim 8 , wherein the first diaphragm and the second diaphragm are fabricated from a metal.

18. The pressure transducer of claim 8 , wherein the header is fabricated from a metal.

19. The pressure transducer of claim 8 , wherein the sensor module comprises a Wheatstone bridge including at least one piezoresistor located thereon.

20. A pressure transducer, comprising:
a first diaphragm having a first stiffness and housed in a first section of a header, the first diaphragm adapted to receive a first pressure and deflect indicative of the first pressure;
a first oil-filled volume of a first configuration defined on a backside of the first diaphragm, the first oil-filled volume adapted to transmit the deflection of the first diaphragm to a sensor module, and wherein the first diaphragm receives a first back pressure from the first oil-filled volume;
a second diaphragm having a second stiffness and housed in a second section of the header, the second diaphragm adapted to receive a second pressure and deflect indicative of the second pressure; and
a second oil-filled volume of a second configuration defined on a backside of the second diaphragm, the second oil-filled volume adapted to transmit the deflection of the second diaphragm to the sensor module via a channel housed in a middle section of the header, and wherein the second diaphragm receives a second back pressure from the second oil-filled volume;
wherein the first configuration and the second configuration are different.

Assignees

• Kurtz Nora D
• Kulite Semiconductor Products Inc

Inventors

• Kurtz Anthony D
• Derosa Lou
• Gardner Robert

Classifications

• G01L19/04

  Means for compensating for effects of changes of temperature {, i.e. other than electric compensation} · CPC title

• G01L9/0055 Primary

  bonded on a diaphragm · CPC title

• G01L9/0052 Primary

  of piezoresistive elements (circuits therefor G01L9/06) · CPC title

• G01L13/025

  using diaphragms · CPC title