Resin composition, resin sheet, and production method for semiconductor device

Patent metadata

Field	Value
Publication number	US-9738763-B2
Application number	US-201414783641-A
Country	US
Kind code	B2
Filing date	May 30, 2014
Priority date	Jun 13, 2013
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

Provided is a resin sheet, wherein in a stress measurement in which a dynamic shear strain is applied in a direction parallel to a surface, the difference between a loss tangent as measured when a strain amplitude is 10% of the sheet thickness and a loss tangent as measured when the amplitude is 0.1% is equal to or greater than 1 at a temperature of 80° C. and a frequency of 0.5 Hz. The resin sheet of the present invention can provide a semiconductor device with excellent connection reliability, wherein air bubbles and cracks are less likely to occur in the resin sheet. In the resin composition of the present invention, aggregates are less likely to occur during storage. The resin sheet obtained by forming the resin composition into a sheet has good flatness. The hardened material thereof can provide a circuit board or a semiconductor device with high connection reliability.

First claim

The invention claimed is:

1. A resin composition comprising:
an epoxy compound of a naphthalene skeleton epoxy resin or an anthracene skeleton epoxy resin (a),
a microcapsule type hardening acceleration agent (b),
inorganic particles (c), and
a compound (d) represented by Formula (1):

wherein r, s, and t each represent an integer of 0 to 2, and
amount of the microcapsule type hardening acceleration agent (b) is 0.1 to 50 parts by weight based on 100 parts by weight of the epoxy compound (a).

2. The resin composition according to claim 1 , wherein the compound (d) represented by Formula (1) is acetylacetone.

3. The resin composition according to claim 1 , wherein the inorganic particles (c) have a dispersion particle diameter of 300 nm or less.

4. A method of producing a resin sheet, comprising:
applying the resin composition according to claim 1 to an exfoliative substrate; and then
removing volatile components to obtain a resin sheet.

5. A method of manufacturing a semiconductor device, comprising:
interposing a resin sheet obtained by the production method according to claim 4 between a first circuit component and a second circuit component; and
electrically connecting the first circuit component and the second circuit component by applying heat and pressure.

6. The method of manufacturing a semiconductor device according to claim 5 , wherein the pressure in applying heat and pressure is 200 N to 500 N.

7. A resin sheet produced according to the method of claim 4 , wherein in a stress measurement in which a dynamic shear strain is applied in a direction parallel to a surface, the difference between a loss tangent as measured when a strain amplitude is 10% of the sheet thickness and a loss tangent as measured when the amplitude is 0.1% of the sheet thickness is equal to or greater than 1 at a temperature of 80° C. and a frequency of 0.5 Hz.

8. A method of manufacturing a semiconductor device, comprising:
interposing the resin sheet according to claim 7 between a first circuit component and a second circuit component; and
electrically connecting the first circuit component and the second circuit component by applying heat and pressure.

9. The method of manufacturing a semiconductor device according to claim 8 , wherein the pressure in applying heat and pressure is 200 N to 500 N.

10. The resin composition according to claim 1 , wherein the amount of the microcapsule type hardening acceleration agent (b) is 5 to 50 parts by weight based on 100 parts by weight of the epoxy compound (a).

11. The resin composition according to claim 1 , comprising the anthracene skeleton epoxy resin.

12. The resin composition according to claim 1 , wherein a microcapsule type hardening acceleration agent (b) comprises a dicyandiamide hardening acceleration agent, amine adduct hardening acceleration agent, organic acid hydrazine hardening acceleration agent and/or an aromatic sulfonium salt hardening acceleration agent, and
the inorganic particles (c) comprise silica, alumina, titania, silicon nitride, boron nitride, aluminum nitride, iron oxide, glass, and/or barium sulfate.

Assignees

• Toray Industries

Inventors

• Shimba Yoichi
• Matsumura Kazuyuki
• Nonaka Toshihisa

Classifications

• H10W99/00

  Subject matter not provided for in other groups of this subclass · CPC title

• H05K3/305

  Affixing by adhesive · CPC title

• B29K2063/00

  Use of {EP, i.e.} epoxy resins {or derivatives thereof}, as moulding material · CPC title

• C08K3/013

  Fillers, pigments or reinforcing additives · CPC title

• B29C41/02

  for making articles of definite length, i.e. discrete articles · CPC title