Memory devices, methods of manufacturing the same, and methods of accessing the same

Patent metadata

Field	Value
Publication number	US-9735287-B2
Application number	US-201314888651-A
Country	US
Kind code	B2
Filing date	May 30, 2013
Priority date	May 3, 2013
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

Memory devices, methods of manufacturing the same, and methods of accessing the same are provided. In one embodiment, the memory device may include a substrate, a back gate formed on the substrate, and a transistor. The transistor may include fins formed on opposite sides of the back gate on the substrate and a gate stack formed on the substrate and intersecting the fins. The memory device may further include a back gate dielectric layer formed on side and bottom surfaces of the back gate. The back gate dielectric layer may have a thickness reduced portion at a region facing the fins on one side of the gate stack.

First claim

I claim:

1. A memory device, comprising:
a substrate;
a back gate, which is formed on the substrate and extends in a first direction;
a transistor, comprising fins, which are formed on opposite sides of the back gate on the substrate, respectively, and extend in the first direction with the back gate disposed therebetween, and a gate stack, which is formed on the substrate and extends in a second direction crossing the first direction and thus intersects the fins; and
a back gate dielectric layer, which is formed on the side and bottom surfaces of the back gate so that the back gate is electrically floating,
wherein in the first direction, the back gate dielectric layer has a first end region on one side with respect to the gate stack and a second end region, opposite to the first end region, on an opposing side with respect to the gate stack; and,
wherein the back gate dielectric layer has a portion facing the fins on one of the first end region and the second end region and reduced in thickness than remaining portions of the back gate dielectric layer.

2. The memory device according to claim 1 , wherein the back gate dielectric layer comprises a first dielectric layer and a second dielectric layer formed sequentially on the side and bottom surfaces of the back gate, wherein the first dielectric layer has an opening at said one region where the thickness reduced portion is.

3. The memory device according to claim 2 , wherein the first dielectric layer and the second dielectric layer each comprise high-K dielectrics.

4. The memory device according to claim 2 , wherein one of the first and second dielectric layers comprises high-K dielectrics and the other of the first and second dielectric layers comprises oxide.

5. The memory device according to claim 4 , wherein the first dielectric layer comprises high-K dielectrics with a thickness of about 2-25 nm, and the second dielectric layer comprises oxide with a thickness of about 1-3 nm.

6. The memory device according to claim 1 , wherein the substrate comprises a well region, wherein the back gate extends into the well region by a depth of about 20-300 nm.

7. The memory device according to claim 1 , wherein the back gate has a top surface substantially flush with or higher than that of each of the fins.

8. The memory device according to claim 1 , wherein the back gate comprises a conductive material, with a width of about 5-30 nm.

9. The memory device according to claim 1 , wherein the fin comprises any of Si, Ge, SiGe, GaAs, GaSb, AlAs, InAs, InP, GaN, SiC, InGaAs, InSb, or InGaSb, with a width of about 3-28 nm.

10. The memory device according to claim 1 , further comprising:
an isolation layer formed on the substrate and exposing a portion of each of the fins, wherein the gate stack is electrically isolated from the substrate by the isolation layer; and
a punch-through stopper formed beneath the portions of the fins exposed by the isolation layer.

11. The memory device according to claim 1 , wherein the gate stack defines a channel region in each of the fins, and the transistor further comprises source and drain regions on opposite sides of the channel region, wherein the thickness reduced portion is disposed on the same side as the drain region with respect to the gate stack.

12. The memory device according to claim 11 , wherein the source and drain regions each further comprise a semiconductor layer grown on surfaces of portions of each of the fins on opposite sides with respect to the gate stack.

13. A method of manufacturing a memory device, comprising the steps of:
forming a back gate groove in a substrate;
forming a back gate dielectric layer on side and bottom walls of the back gate groove;
forming a back gate by filling a conductive material into the back gate groove;
exposing a portion of the back gate dielectric layer by selectively removing a portion of the back gate at one end of the back gate groove, reducing the exposed portion of the back gate dielectric layer in thickness, and then refilling a further conductive material into the back gate groove;
forming fins abutting the back gate dielectric layer by patterning the substrate; and
forming a gate stack on the substrate to intersect the fins,
wherein the portion of the back gate dielectric layer which is reduced in thickness is disposed on one side of the gate stack and faces the fins.

14. The method according to claim 13 , wherein the step of forming the back gate dielectric layer comprises the step of:
sequentially forming a first dielectric layer and a second dielectric layer on the side and bottom walls of the back gate groove, and
wherein reducing the exposed portion of the back gate dielectric layer in thickness comprises the step of:
selectively removing an exposed portion of the second dielectric layer.

15. The method according to claim 13 , wherein the gate stack defines a channel region in each of the fins, and the method further comprises the step of forming source and drain regions on opposite sides of the channel region, wherein the thickness reduced portion is disposed on the same side as the drain region.

16. The method according to claim 13 , wherein forming the back gate groove comprises the steps of:
forming a patterning auxiliary layer on the substrate and patterning the patterning auxiliary layer to have an opening at a position corresponding to the back gate groove;
forming a pattern transfer layer on side walls of the patterning auxiliary layer facing the opening;
forming the back gate groove by etching the substrate with the patterning auxiliary layer and the pattern transfer layer as a mask, and
wherein forming the fins comprises the steps of:
selectively removing the patterning auxiliary layer; and
forming the fins by etching the substrate with the pattern transfer layer as a mask.

17. The method according to claim 16 , wherein the substrate comprises any of Si, Ge, SiGe, GaAs, GaSb, AlAs, InAs, InP, GaN, SiC, InGaAs, InSb, or InGaSb, and the patterning auxiliary layer comprises amorphous silicon, and
wherein the method further comprises the step of forming a protection layer on a top surface of the patterning auxiliary layer to protect the patterning auxiliary layer during the etching of back gate groove.

18. The method according to claim 17 , further comprising the step of forming a stop layer on the substrate, on which the patterning auxiliary layer is disposed.

19. The method according to claim 18 , wherein the protection layer comprises nitride, the pattern transfer layer comprises nitride, and the stop layer comprises oxide.

20. The method according to claim 16 , wherein the pattern transfer layer is formed on the side walls of the patterning auxiliary layer in a spacer formation process.

21. A method of accessing the memory device according to claim 1 , comprising the steps of:
applying an ON voltage through a word line to turn on the transistor, electrically floating a drain of the transistor, and applying a first bias to a source of the transistor through a bit line, so that carriers flow from the source to the drain and tunnel into and thus are stored in the back gate through the thickness reduced portion of the back gate dielectric layer, to store a first state in the memory device; and
applying the ON voltage through the word line to turn on the transistor, electrically floating the drain of the transistor, and applying a second bias to the source of the transistor through the bit line, so that the carriers stored i

Assignees

• Inst Of Microelectronics Cas

Inventors

• Zhu Huilong

Classifications

• H01L29/2003

  Electricity · mapped topic

• G11C16/10

  Programming or data input circuits · CPC title

• H01L29/0653

  Electricity · mapped topic

• H01L27/11521

  Electricity · mapped topic

• H01L29/0638

  Electricity · mapped topic