Methods, apparatus, and system for mass spectrometry

Patent metadata

Field	Value
Publication number	US-9735000-B2
Application number	US-201615045883-A
Country	US
Kind code	B2
Filing date	Feb 17, 2016
Priority date	Feb 14, 2011
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that enhance the performance of the design over comparable instruments. An efficient ion source enables relatively low power consumption without sacrificing measurement resolution. Variable geometry mechanical filters allow for variable resolution. An onboard ion pump removes the need for an external pumping source. A magnet and magnetic yoke produce magnetic field regions with different flux densities to run the ion pump and a magnetic sector mass analyzer. An onboard digital controller and power conversion circuit inside the vacuum chamber allows a large degree of flexibility over the operation of the mass spectrometer while eliminating the need for high-voltage electrical feedthroughs. The miniature mass spectrometer senses fractions of a percentage of inlet gas and returns mass spectra data to a computer.

First claim

What is claimed is:

1. A mass spectrometer comprising:
a vacuum housing defining a vacuum cavity;
an electrode, disposed within the vacuum cavity and configured to be charged to an electrode potential, to control acceleration of a charged particle propagating through the vacuum cavity;
a controller, disposed within the vacuum cavity and in electrical communication with the electrode, to modulate the electrode potential at the electrode;
a processor, operably coupled to the controller, to process digital controller signals used to modulate the electrode potential so as to increase a signal-to-noise ratio of the mass spectrometer; and
a heater, in thermal communication with at least one component within the vacuum cavity, to heat the at least one component so as to drive gas off the at least one component.

2. The mass spectrometer of claim 1 , wherein the electrode comprises a grid electrode.

3. The mass spectrometer of claim 1 , wherein the charged particle is an ion.

4. The mass spectrometer of claim 1 , wherein the charged particle is an electron.

5. The mass spectrometer of claim 4 , further comprising:
an electron source, disposed within the vacuum cavity, to provide the electron;
a cathode to repel the electron; and
an anode, disposed opposite the electrode from the electron source, to accelerate the electron toward an analyte particle to be analyzed.

6. The mass spectrometer of claim 4 , further comprising:
a conversion circuit, disposed within the vacuum cavity, to provide:
(i) an anode potential of about 100 V to about 5 kV for the anode; and
(ii) a cathode potential about 70 V below the anode potential for the cathode, and
wherein the electrode potential is between about 0 V and about 140 V below the anode potential.

7. The mass spectrometer of claim 1 , wherein the processor is configured to perform at least one of synchronous detection or stochastic system identification.

8. The mass spectrometer of claim 1 , wherein the processor is configured to perform a calibration based on the digital controller signals used to modulate the electrode potential.

9. The mass spectrometer of claim 1 , wherein the controller comprises:
at least one digital-to-analog converter to set the electrode potential.

10. The mass spectrometer of claim 1 , wherein the controller comprises:
a radio-frequency (RF) communications module, disposed within the vacuum cavity and operably coupled to the processor, to relay data and/or instructions between an inside and an outside of the vacuum housing.

11. A method of operating a mass spectrometer, the method comprising:
providing a vacuum cavity evacuated to a pressure of about 10 −5 mm Hg or less;
charging an electrode within the vacuum cavity to the electrode potential;
modulating the electrode potential so as to control acceleration of a charged particle within the vacuum cavity;
processing digital controller signals used to modulate the electrode potential to increase a signal-to-noise ratio of the mass spectrometer; and
heating at least one component within the vacuum cavity so as to drive gas off the at least one component.

12. The method of claim 11 , wherein modulating the electrode potential comprises generating the digital controller signals with a controller disposed within the vacuum cavity.

13. The method of claim 11 , wherein modulating the electrode potential comprises applying the electrode potential to a grid electrode.

14. The method of claim 11 , wherein modulating the electrode potential comprises setting the electrode potential with at least one digital-to-analog converter disposed within the vacuum cavity.

15. The method of claim 11 , wherein the charged particle is an ion.

16. The method of claim 11 , wherein the charged particle is an electron.

17. The method of claim 16 , further comprising:
providing the electron with an electron source;
accelerating the electron toward an analyte particle; and
detecting the analyte particle.

18. The method of claim 16 , wherein modulating the electrode potential comprises:
generating a voltage with a conversion circuit disposed within the vacuum cavity; and
applying the voltage to the electrode.

19. The method of claim 11 , wherein processing the digital controller signals comprises performing at least one of synchronous detection or stochastic system identification.

20. The method of claim 11 , further comprising:
relaying data and/or instructions between an inside and an outside of the vacuum housing with a radio-frequency communications module disposed within the vacuum cavity.

21. The method of claim 11 , further comprising:
calibrating the mass spectrometer based on the digital controller signals used to modulate the electrode potential.

22. A mass spectrometer comprising:
a vacuum housing defining a vacuum cavity;
a magnet in a magnetic yoke to generate a magnetic field having a first strength in a first region and a second strength in a second region;
an ion pump, positioned so as to be in the first region, to maintain a vacuum pressure of the vacuum cavity;
a mass analyzer, positioned so as to be in the second region, to determine a mass of an ionized analyte particle propagating through the vacuum cavity;
a control electrode, disposed within the vacuum cavity, to control acceleration of an electron that ionizes the analyte particle;
control electronics, disposed within the vacuum cavity and operably coupled to the conversion circuit, to modulate a potential of the control electrode;
signal processing electronics, disposed within the vacuum cavity and configured to be powered by the conversion circuit, to process signals provided by the mass analyzer; and
a heater, in thermal communication with at least one component within the vacuum cavity, to heat the at least one component so as to drive gas off the at least one component.

23. The mass spectrometer of claim 22 , wherein the magnet in the magnetic yoke is configured such that the first strength is about 0.1 Tesla and the second strength is about 0.7 Tesla when the magnetic field is generated.

24. A mass spectrometer comprising:
a vacuum housing defining a vacuum cavity;
a substrate disposed within the vacuum cavity;
an electronic component disposed on the substrate within the vacuum cavity; and
a heater, in thermal communication with the substrate, to degas the substrate.

Assignees

• The Massachusetts Inst Of Tech
• Massachusetts Inst Technology

Inventors

• Hunter Ian W
• Hemond Brian
• Hemond Harold F

Classifications

• H01J49/0013 Primary

  Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components · CPC title

• H01J49/147

  with electrons, e.g. electron impact ionisation, electron attachment (H01J49/145 takes precedence) · CPC title

• H01J49/0031

  Step by step routines describing the use of the apparatus (H01J49/0081 takes precedence) · CPC title

• H01J49/24

  Vacuum systems, e.g. maintaining desired pressures · CPC title

• H01J49/30 Primary

  using magnetic analysers {, e.g. Dempster spectrometer} · CPC title