Triaxial magnetic field sensor

Patent metadata

Field	Value
Publication number	US-9733316-B2
Application number	US-201214239786-A
Country	US
Kind code	B2
Filing date	Aug 27, 2012
Priority date	Aug 30, 2011
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

The present invention discloses a triaxial magnetoresistive sensor. It comprises a substrate integrated with a biaxial magnetic field sensor, a Z-axis sensor that has a sensing direction along Z-axis perpendicular to the two axes of the biaxial magnetic field sensor, and an ASIC. The biaxial magnetic field sensor comprises an X-axis bridge sensor and a Y-axis bridge sensor. The Z-axis sensor and the two-axis sensor are electrically interconnected with the ASIC. A single-chip implementation of the triaxial magnetic field sensor comprises a substrate, onto which a triaxial magnetic field sensor and an ASIC are stacked. The triaxial magnetic field sensor comprises an X-axis bridge sensor, a Y-axis bridge sensor, and a Z-axis bridge sensor. The above design provides a highly integrated sensor with high sensitivity, low power consumption, good linearity, wide dynamic range, excellent thermal stability, and low magnetic noise.

First claim

The invention claimed is:

1. A triaxial magnetoresistive sensor, comprising a substrate integrated with a biaxial sensor, a Z-axis sensor that has a sensing direction along the Z-axis, and an ASIC, wherein the biaxial sensor includes a X-axis bridge sensor that has a sensing direction along the X-axis and a Y-axis bridge sensor that has a sensing direction along the Y-axis, such that any two of the X, Y, and Z axes are mutually orthogonal, and wherein the Z-axis sensor and the biaxial sensor are both electrically connected to the ASIC,
wherein the z-axis sensor includes at least two MTJ sensors attached to opposite slopes of a beveled groove, each opposite slope being inclined with respect to the Z-axis, each of the at least two MTJ sensors having a surface and being sensitive to a magnetic field component parallel to their respective surface, and wherein the at least two MTJ sensors in combination are only sensitive to a magnetic field component in the Z-axis.

2. A triaxial magnetoresistive sensor as in claim 1 , wherein the X-axis bridge sensor and the Y-axis bridge sensor are MTJ bridge sensors.

3. A triaxial magnetoresistive sensor as in claim 1 , wherein the biaxial sensor is located on a single substrate.

4. A triaxial magnetoresistive sensor as in claim 1 , wherein the biaxial sensor is electrically connected to the ASIC by gold bonding wires.

5. A triaxial magnetoresistive sensor as in claim 1 , wherein the biaxial sensor is electrically connected to the ASIC using solder bumps.

6. A triaxial magnetoresistive sensor as in claim 1 , wherein the X-axis bridge sensor is a referenced bridge sensor and the Y-axis bridge sensor is a push-pull sensor.

7. A triaxial magnetoresistive sensor as in claim 1 , wherein the at least two MTJ sensors are symmetrically attached to opposite slopes of the beveled groove.

8. A triaxial magnetoresistive sensor as in claim 7 , wherein the at least two MTJ sensors are configured to provide a sensing direction along the Z-axis.

9. A triaxial magnetoresistive sensor, comprising:
a substrate;
an ASIC stacked on the substrate; and
a triaxial sensor electrically connected to the ASIC using copper vias either through an insulation layer on the ASIC or through the substrate,
wherein the triaxial sensor includes a X-axis bridge sensor that has a sensing direction along a X-axis, a Y-axis bridge sensor that has a sensing direction along a Y-axis, and a Z-axis sensor that has a sensing direction along a Z-axis, wherein the Z-axis sensor includes at least two MTJ sensors attached to opposite slopes of a beveled groove, each opposite slope being inclined with respect to the Z-axis, each of the at least two MTJ sensors having a surface and being sensitive to a magnetic field component parallel to their respective surface, and wherein the at least two MTJ sensors in combination are only sensitive to a magnetic field component in the Z-axis, and
wherein any two of X, Y, and Z axes are mutually orthogonal.

10. A triaxial magnetoresistive sensor as in claim 9 , wherein the X-axis bridge sensor and the Y-axis bridge sensor are MTJ bridge sensors.

11. A triaxial magnetoresistive sensor as in claim 9 , wherein the triaxial sensor, the insulation layer, the ASIC, and the substrate are stacked, and the insulation layer is provided with copper conductors positioned to electrically connect the components of the triaxial sensor and the ASIC.

12. A triaxial magnetoresistive sensor as in claim 9 , wherein the insulation layer, the ASIC, the substrate and a triaxial sensor are arranged in a stack, wherein copper conductors pass through the substrate to interconnect the triaxial sensor with the ASIC.

13. A triaxial magnetoresistive sensor as in claim 9 , wherein the triaxial sensor includes a Hall Effect or giant Hall Effect magnetic field sensor.

14. A triaxial magnetoresistive sensor as in claim 9 , wherein the at least two MTJ sensors are configured to provide a sensing direction along the Z-axis.

Assignees

• Lei Xiaofeng
• Zhang Xiaojun
• Li Wei
• Xue Songsheng
• Multidemension Tech Co Ltd

Inventors

• Lei Xiaofeng
• Zhang Xiaojun
• Li Wei
• Xue Songsheng

Classifications

• G01R33/096

  anisotropic magnetoresistance sensors · CPC title

• G01R33/0206 Primary

  Three-component magnetometers · CPC title

• G01R33/09

  Magnetoresistive devices · CPC title

• G01R33/028

  Electrodynamic magnetometers · CPC title

• G01R33/0052

  Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips (devices based on galvano-magnetic effect or the like H10N50/85) · CPC title