System And Method For Forming Bonded Substrates
US-2015367340-A1 · Dec 24, 2015 · US
US9733189B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9733189-B2 |
| Application number | US-201113824712-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 27, 2011 |
| Priority date | Oct 27, 2010 |
| Publication date | Aug 15, 2017 |
| Grant date | Aug 15, 2017 |
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The invention relates to a smoke analysis characterization cell employing optical spectroscopy, which comprises: a reaction chamber, an inlet orifice for injecting smoke into the reaction chamber; an outlet orifice for discharging the smoke from the reaction chamber; and an analysis window for the entry of a laser beam intended to form the plasma inside the reaction chamber, which cell is characterized in that the system further includes a blower for blowing an inert gas close to the analysis window; and a shielding gas injector for the shielded injection of the smoke into the reaction chamber, the shielding being provided by a jet of inert gas around the smoke.
Opening claim text (preview).
The invention claimed is: 1. A characterisation system comprising: a characterisation cell for smoke analysis by optical spectrometry, comprising: a reaction chamber; an inlet orifice for the inlet of smoke into the reaction chamber; an outlet orifice for the evacuation of smoke from the reaction chamber; an analysis window for entry of a laser beam intended to form the plasma inside the reaction chamber; a fan for ensuring scanning of inert gas in the vicinity of the analysis window; and a shielding injector coaxially aligned with the inlet orifice configured to coaxially inject smoke shielded by a jet of inert gas around the smoke into the reaction chamber; a collector downstream of the outlet orifice of the cell configured to recover the smoke after its analysis; a pressure regulator for keeping the pressure constant in the reaction chamber of the cell, wherein the pressure regulator comprises a regulation valve placed downstream of the collector to compensate for a loss of charge due to clogging of filters of the collector, wherein the regulation valve is connected to a pressure probe placed in the cell for measuring the pressure therein for its servo-control, and wherein the regulation valve is servo-controlled as a function of the pressure measured inside the cell and which is adapted to open progressively as the collector gets clogged; a reactor for the generation of smoke; a second collector positioned downstream of the reactor; a second regulation valve for regulating the pressure inside the reactor; wherein the second regulation valve is placed downstream of the second collector, wherein the second regulation valve is connected to a second pressure probe placed in the reactor for measuring the pressure therein for its servo-control, and wherein the second regulation valve is servo-controlled as a function of the pressure measured inside the reactor and which is adapted to open progressively as the second collector gets clogged. 2. The system of claim 1 , wherein the cell further comprises an arm extending between the reaction chamber and the analysis window, the arm being formed in two parts of different cross-sections, the larger cross-section part being arranged nearer the analysis window and the smaller cross-section part being arranged nearer the reaction chamber to form a Venturi and to ensure overpressure nearer the window. 3. The system of claim 1 , wherein the flow rate of inert gas generated by the fan is adjustable. 4. The system of claim 1 , wherein the flow rate of inert gas generated by the coaxial shielding injector is adjustable. 5. The system of claim 1 , wherein the injector is a circular double nozzle having first and second coaxial orifices, the first orifice having a disc-shaped cross-section for the inlet of smoke, and the second orifice having a ring-shaped cross-section which encloses the first orifice for the inlet of inert gas. 6. The system of claim 1 , wherein the cell further comprises a viewing window for observation of the plasma produced inside the reaction chamber during its operation. 7. The system of claim 1 , wherein the fan also ensures scanning of inert gas in the vicinity of the viewing window. 8. The system of claim 1 , wherein the flow rate of inert gas generated by the Venturi is adjustable. 9. The system of claim 1 , wherein the cell further comprises an arm extending between the reaction chamber and the inlet orifice. 10. The system of claim 1 , wherein the cell further comprises an arm extending between the reaction chamber and the outlet orifice. 11. The system of claim 1 , wherein the cell further comprises a first arm extending between the reaction chamber and the inlet orifice, a second arm extending between the reaction chamber and the outlet orifice, and a third arm extending between the reaction chamber and the analysis window. 12. The system of claim 11 , wherein the first and second arms extend along a first axis, and the third arm extends along a second axis that is perpendicular to the first axis. 13. The system of claim 11 , wherein the third arm is formed in two parts of different cross-sections, the larger cross-section part being arranged nearer the analysis window and the smaller cross-section part being arranged nearer the reaction chamber to form a Venturi and to ensure overpressure nearer the window. 14. The system of claim 1 , wherein the smoke is a smoke of nanoparticles. 15. The system of claim 1 , wherein the second regulation valve regulates the pressure inside the reactor so as to keep said pressure constant. 16. The system of claim 1 , wherein the second regulation valve is placed at the outlet of the second collector. 17. The system of claim 1 , wherein the second regulation valve is adapted to open progressively as filters of the second collector gets clogged due to nanoparticles. 18. The system of claim 1 , wherein an outlet of the reactor is connected to a pump which creates a flow of smoke.
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