Polishing pad with secondary window seal

Patent metadata

Field	Value
Publication number	US-9731397-B2
Application number	US-201514594661-A
Country	US
Kind code	B2
Filing date	Jan 12, 2015
Priority date	Mar 15, 2013
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

First claim

What is claimed is:

1. A polishing pad for a chemical mechanical polishing apparatus, comprising:
a polishing article having a polishing surface, a bottom surface and an aperture formed through the polishing article, the aperture including a first section adjacent the polishing surface and a second section farther from the polishing surface than the first section, wherein the polishing article includes a projection extending inwardly into the aperture such that the first section has a different lateral dimension from the second section, the projection having a laterally extending first surface located between a plane of the polishing surface and a plane of the bottom surface;
a window having a first portion positioned in the first section of the aperture and a second portion extending from the first portion into the second section of the aperture, the window having a second surface substantially parallel to the first surface;
a first adhesive adhering the first surface of the projection to the second surface of the window to secure the window to the projection; and
a second adhesive of different material composition than the first adhesive, the second adhesive positioned laterally between the second portion of the window and a portion of the polishing article that is farther from the polishing surface than the first adhesive.

2. The polishing pad of claim 1 , wherein the first surface is substantially parallel to the polishing surface.

3. The polishing pad of claim 1 , wherein the first section of the aperture is wider than the second section of the aperture, and the projection is laterally adjacent the second section of the aperture.

4. The polishing pad of claim 3 , wherein the first surface is an upper surface of the projection and the second surface is a lower surface of the window.

5. The polishing pad of claim 1 , wherein the first section of the aperture is narrower than the second section of the aperture, and the projection is laterally adjacent the first section of the aperture.

6. The polishing pad of claim 5 , wherein the first surface is a lower surface of the projection and the second surface is an upper surface of the window.

7. The polishing pad of claim 1 , wherein the second adhesive has greater adhesion to the window than the first adhesive.

8. The polishing pad of claim 1 , wherein the second adhesive is positioned laterally between the first adhesive and the second section of the window.

9. A polishing pad for a chemical mechanical polishing apparatus, comprising:
a polishing article having a polishing surface, a bottom surface and an aperture formed through the polishing article, the aperture including a first section adjacent the polishing surface and a second section farther from the polishing surface than the first section, wherein the polishing article includes a projection extending inwardly into the aperture such that the first section has a different lateral dimension from the second section, the projection having a laterally extending first surface located between a plane of the polishing surface and a plane of the bottom surface;
a window having a first portion positioned in the first section of the aperture and a second portion extending from the first portion into the second section of the aperture, the window having a second surface substantially parallel to the first surface;
a first adhesive adhering the first surface of the projection to the second surface of the window to secure the window to the projection; and
a second adhesive of different material composition than the first adhesive, the second adhesive positioned laterally between the first adhesive and the second portion of the window.

10. The polishing pad of claim 9 , wherein the first surface is substantially parallel to the polishing surface.

11. The polishing pad of claim 9 , wherein the first section of the aperture is wider than the second section of the aperture, and the projection is laterally adjacent the second section of the aperture.

12. The polishing pad of claim 10 , wherein the first surface is an upper surface of the projection and the second surface is a lower surface of the first portion of the window.

13. The polishing pad of claim 9 , wherein the second adhesive includes a portion positioned laterally between the second portion of the window and a portion of the polishing article that is farther from the polishing surface than the first adhesive.

14. The polishing pad of claim 9 , wherein the second adhesive has greater adhesion to the window than the first adhesive.

15. A polishing pad for a chemical mechanical polishing apparatus, comprising:
a polishing article having a polishing surface, a bottom surface and an aperture formed through the polishing article, the aperture including a first section adjacent the polishing surface and a second section farther from the polishing surface than the first section, wherein the polishing article includes a projection extending inwardly into the aperture such that the first section has a different lateral dimension from the second section, the projection having a laterally extending first surface located between a plane of the polishing surface and a plane of the bottom surface;
a window having a first portion positioned in the first section of the aperture and a second portion extending from the first portion into the second section of the aperture, the window having a second surface substantially parallel to the first surface;
a first adhesive adhering the first surface of the projection to the second surface of the window to secure the window to the projection; and
a second adhesive of different material composition than the first adhesive, the second adhesive positioned laterally between the first adhesive and a portion of the polishing article that is farther from the polishing surface than the first adhesive.

16. The polishing pad of claim 15 , wherein the first surface is substantially parallel to the polishing surface.

17. The polishing pad of claim 15 , wherein the first section of the aperture is narrower than the second section of the aperture, and the projection is laterally adjacent the first section of the aperture.

18. The polishing pad of claim 17 , wherein the first surface is a lower surface of the projection and the second surface is an upper surface of second portion of the window.

19. The polishing pad of claim 15 , wherein the second adhesive includes a portion positioned laterally between the second portion of the window and a portion of the polishing article that is farther from the polishing surface than the first adhesive.

20. The polishing pad of claim 15 , wherein the second adhesive has greater adhesion to the window than the first adhesive.

Assignees

• Applied Materials Inc

Inventors

• Alagarsamy Rajkumar
• Hu Yongqi
• Yavelberg Simon
• Gopalan Periya
• Mahon Christopher R

Classifications

• B24B37/205 Primary

  provided with a window for inspecting the surface of the work being lapped · CPC title

• B24B49/12

  involving optical means · CPC title

• B24B37/22

  characterised by a multi-layered structure · CPC title

• B24B37/20

  Lapping pads for working plane surfaces · CPC title