High-temperature, spin-on, bonding compositions for temporary wafer bonding using sliding approach

Patent metadata

Field	Value
Publication number	US-9728439-B2
Application number	US-77007510-A
Country	US
Kind code	B2
Filing date	Apr 29, 2010
Priority date	Oct 6, 2006
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

New compositions and methods of using those compositions as bonding compositions are provided. The compositions comprise a polymer dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a carrier wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened to allow the wafers to slide apart at the appropriate stage in the fabrication process.

First claim

We claim:

1. A wafer debonding method comprising:
providing a stack comprising first and second substrates bonded together via a bonding layer formed from a bonding composition comprising:
a tackifier; and
a compound selected from the group consisting of rubbers, styrene-isoprene-styrene, styrene-butadiene-styrene, halogenated butyl rubber, and mixtures thereof,
said tackifier and said compound being dispersed or dissolved in a solvent system, said bonding composition comprising at least about 30% by weight said solvent system, based upon the total weight of the composition taken as 100% by weight, wherein the bonding composition is essentially free of foaming agents;

subjecting said stack to heat so as to soften said bonding layer; and
moving said first substrate and said second substrate relative to each other to separate said first and second substrates from each other.

2. The method of claim 1 , wherein said stack has an axis that passes through both the first and second substrates, wherein said first substrate and said second substrate move relative to each other in a direction generally transverse to said axis.

3. The method of claim 1 , wherein said first and second substrates move relative to each other in a direction generally perpendicular to mating surfaces of said first and second substrates.

4. The method of claim 1 , further comprising subjecting said stack to a temperature of at least about 190° C.

5. The method of claim 1 , further comprising thinning one of said substrates prior to subjecting said stack to heat.

6. The method of claim 1 , further comprising subjecting said stack to a process selected from the group consisting of backgrinding, metallizing, patterning, and combinations thereof prior to subjecting said stack to heat.

7. The method of claim 1 , wherein said bonding composition further comprises an ingredient selected from the group consisting of adhesion promoting agents, antioxidants, surfactants, and mixtures of the foregoing.

8. The method of claim 1 , wherein said first substrate has a first surface and a second surface remote from said first surface, said first surface comprising at least one active site and a plurality of topographical features, and said bonding layer is bonded to said second surface of said first substrate.

9. The method of claim 8 , wherein said second substrate comprises a bonding surface that is bonded to said bonding layer.

10. The method of claim 9 , wherein:
each of said topographical features have an end surface remote from the first surface of said first substrate, at least one of the end surfaces is farther from the first surface of the first substrate than a remaining of said end surfaces and defines a plane that is substantially parallel to said first surface; and
the distance from said plane to the bonding surface on said second substrate varying by less than about 10% across said plane and said bonding surface of said second substrate.

11. The method of claim 1 , wherein said first substrate:
has a first surface and a second surface remote from said first surface;
comprises at least one active site and a plurality of topographical features on said second surface; and
is selected from the group consisting of microelectromechanical system devices, display devices, flexible substrates, semiconductors, dielectric layers, ion implant layers, and substrates comprising silicon, aluminum, tungsten, tungsten silicide, gallium arsenide, germanium, tantalum, tantalum nitrite, SiGe, and mixtures of the foregoing.

12. The method of claim 1 , wherein said second substrate comprises a carrier wafer comprising a material selected from the group consisting of sapphire, ceramic, glass, quartz, aluminum, silver, and silicon.

13. The method of claim 1 , wherein said providing a stack comprises:
applying the bonding composition to one of the first and second substrates to form a bonding composition-coated substrate and a bonding composition-free substrate; and
contacting the bonding composition-free substrate with the bonding composition-coated substrate so as to bond the substrates together.

14. The method of claim 13 , wherein said applying comprises spincoating the bonding composition onto one of the first and second substrates.

Assignees

• Pillalamarri Sunil K
• Li Chenghong
• Brewer Science Inc

Inventors

• Pillalamarri Sunil K
• Li Chenghong

Classifications

• H10P72/7422

  used to protect an active side of a device or wafer · CPC title

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/74 Primary

  using temporarily an auxiliary support · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• H10P50/00

  Etching of wafers, substrates or parts of devices · CPC title