Methods of forming materials for at least a portion of a NFT and NFTs formed using the same

Patent metadata

Field	Value
Publication number	US-9728208-B2
Application number	US-201514972288-A
Country	US
Kind code	B2
Filing date	Dec 17, 2015
Priority date	Jun 24, 2013
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

A method including depositing a plasmonic material at a temperature of at least 150° C.; and forming at least a peg of a near field transducer (NFT) from the deposited plasmonic material.

First claim

What is claimed is:

1. A method comprising:
depositing a plasmonic material at a temperature of at least 150° C., the plasmonic material comprising gold (Au) and at least one of the following elements: Cu, Rh, Ru, Ag, Ta, Cr, Al, Zr, V, Pd, Ir, Co, W, Ti, Mg, Fe and Mo; and
forming at least a peg of a near field transducer (NFT) from the deposited plasmonic material.

2. The method according to claim 1 , wherein the plasmonic material is deposited at a temperature of at least 150° C.

3. The method according to claim 1 , wherein the plasmonic material comprises Au and at least one of Cu, Rh, Ru, V and Zr.

4. The method according to claim 1 , wherein the plasmonic material comprises Au and at least Rh.

5. The method according to claim 1 further comprising forming at least a disk of the NFT from a material deposited at a temperature of at least 150° C.

6. The method according to claim 5 , wherein the material deposited to form the disk is deposited in a different step than the material deposited to form the peg.

7. The method according to claim 1 , wherein the plasmonic material is sputter deposited.

8. The method according to claim 1 , wherein the plasmonic material comprises from 0.5% to 30% of the at least one element.

9. The method according to claim 4 , wherein the plasmonic material comprises not greater than 2% Rh.

10. The method according to claim 1 , wherein the material is not annealed.

11. The method according to claim 1 , wherein the peg has an average grain size of at least about 50 nm.

12. A near field transducer (NFT) comprising:
a peg, the peg having an average grain size of not less than 75 nm and the peg comprises gold (Au) and at least one of the following elements: Cu, Rh, Ru, Ag, Ta, Cr, Al, Zr, V, Pd, Ir, Co, W, Ti, Mg, Fe and Mo.

13. The NFT according to claim 12 , wherein the material making up the peg was deposited at a temperature of not less than 175° C.

14. The NFT according to claim 12 , wherein the plasmonic material is deposited at a temperature of at least 180° C.

15. The NFT according to claim 12 , wherein the peg comprises from 0.5% to 30% of the at least one element.

16. The NFT according to claim 12 , wherein the peg comprises gold (Au) and not greater than 2% of Rh.

17. The NFT according to claim 12 , wherein the NFT further comprises a disk having an average grain size of not less than 75 nm.

18. A method comprising:
depositing a plasmonic material at a temperature of at least 150° C., the plasmonic material comprising gold (Au) and at least one of the following elements: Cu, Rh, Ru, Ag, Ta, Cr, Al, Zr, V, Pd, Ir, Co, W, Ti, Mg, Fe and Mo; and
forming at least a peg of a near field transducer (NFT) from the deposited plasmonic material,
wherein neither the deposited material is annealed nor the peg is annealed once formed, and the peg has an average grain size of not less than 50 nm.

19. The method according to claim 18 , wherein the deposited plasmonic material comprises gold (Au) and Rh.

20. The method according to claim 18 further comprising forming at least a disk from a material deposited at a temperature of at least 150° C.

Assignees

• Seagate Technology Llc

Inventors

• Sahoo Sarbeswar
• Zhao Tong
• Kautzky Michael C

Classifications

• G11B5/3163

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title

• G11B7/1387

  using the near-field effect · CPC title

• G11B5/4866

  the arm comprising an optical waveguide, e.g. for thermally-assisted recording · CPC title

• G11B5/314 Primary

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title