Touch sensing unit and display device including the same
US-12164734-B2 · Dec 10, 2024 · US
US9727195B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9727195-B2 |
| Application number | US-201514971798-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 16, 2015 |
| Priority date | Apr 12, 2011 |
| Publication date | Aug 8, 2017 |
| Grant date | Aug 8, 2017 |
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A method for fabricating a touch panel includes forming a routing and pad pattern group on a substrate to include first and second routing lines, first pad electrodes connected to the first routing line, and second pad electrodes connected to the second routing line, by using a first mask, forming a sensor electrode pattern group on the substrate having the routing and pad pattern group formed thereon to include first sensor electrodes formed in a first direction, second sensor electrodes formed in a second direction, and connection portions that each connects adjacent first sensor electrodes, by using a second mask, forming a first insulating layer to include contact holes to expose portions of the second sensor electrodes, respectively, by using a third mask and forming bridges that each connects adjacent second sensor electrodes through the contact holes and a second insulating layer on the bridges, by using a fourth mask.
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What is claimed is: 1. A method for fabricating a touch panel, comprising: forming a routing and pad pattern group on a substrate to include first and second routing lines, first pad electrodes connected to the first routing line, and second pad electrodes connected to the second routing line, by using a first mask; forming a sensor electrode pattern group on the substrate having the routing and pad pattern group formed thereon to include first sensor electrodes formed in a first direction, second sensor electrodes formed in a second direction, and connection portions that each connects adjacent first sensor electrodes, by using a second mask; forming a first insulating layer to include contact holes to expose portions of the second sensor electrodes, by using a third mask; and forming both bridges that each connects adjacent second sensor electrodes through the contact holes and a second insulating layer on the bridges, by using a fourth mask, wherein the forming both bridges and the second insulating layer on the bridges includes forming the second insulating layer only on a top surface and not on a side surface of the bridges. 2. The method as claimed in claim 1 , wherein the step of forming a first insulating layer includes removing the first insulating layer from a pad portion region to open the pad portion region having the first and second pad electrodes formed thereon. 3. The method as claimed in claim 1 , wherein the step of forming a sensor electrode pattern group includes: forming a first transparent conductive layer on the substrate including the first and second routing lines, and the first and second pad electrodes; crystallizing the first transparent conductive layer; and patterning the first transparent conductive layer to form the first sensor electrodes, the second sensor electrodes, and the connection portions. 4. The method as claimed in claim 3 , wherein the patterning of the first transparent conductive layer further comprises forming a first transparent pad electrode on the first pad electrode, and a second transparent pad electrode on the second pad electrode. 5. The method as claimed in claim 1 , wherein the step of forming both bridges and a second insulating layer on the bridges includes: forming a second transparent conductive layer on the first insulating layer; forming the second insulating layer on the second transparent conductive layer; and patterning the second insulating layer and the second transparent conductive layer by using the fourth mask to form the bridges. 6. The method as claimed in claim 5 , wherein the step of patterning includes: selectively removing the second insulating layer by photolithography and dry etching with the fourth mask except a region where the bridges are to be formed thereon; and patterning the second transparent conductive layer by wet etching by using the fourth mask to form the bridges. 7. The method as claimed in claim 6 , wherein the second transparent conductive layer is an amorphous layer. 8. The method as claimed in claim 7 , further comprising crystallizing the bridges after the patterning of the second transparent conductive layer.
by capacitive means · CPC title
Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices · CPC title
using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes · CPC title
using a single layer of sensing electrodes · CPC title
Input devices, e.g. touch panels · CPC title
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