Superalloy target
US-11866805-B2 · Jan 9, 2024 · US
US9726402B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9726402-B2 |
| Application number | US-201314764372-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 11, 2013 |
| Priority date | Feb 8, 2013 |
| Publication date | Aug 8, 2017 |
| Grant date | Aug 8, 2017 |
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The present invention describes a hybrid multilayer solar selective coating having high thermal stability useful for high temperature solar thermal power generation. The hybrid multilayer solar selective coating of the present invention has been deposited using a novel combination of sputtering and sol-gel methods on metallic and non-metallic substrates, preferably on SS 304 and 321 with chrome interlayer. The hybrid multilayer solar selective coating of the present invention consists of stacks of Ti/chrome interlayer, aluminum titanium nitride (AlTiN), aluminum titanium oxynitride (AlTiON), aluminum titanium oxide (AlTiO) and organically modified silica (ormosil) layers. The chrome interlayer was deposited using an electroplating method, whereas, Ti, AlTiN, AlTiON and AlTiO layers were prepared using a four-cathode reactive unbalanced pulsed direct current magnetron sputtering technique. The ormosil layer was deposited using a sol-gel technique, which provides the enhanced absorptance and improved long term thermal stability in air and vacuum. The present invention provides a hybrid multilayer solar selective coating having absorptance >0.950, emittance <0.11 (SS substrate with chrome interlayer) and long term high thermal stability (in the order of 1000 hrs under cyclic heating conditions at 500° C. in air and 600° C. in vacuum). The hybrid multilayer solar selective coating of the present invention exhibits higher solar selectivity ratio in the order of 5-9 on metal and non-metal substrates. The hybrid multilayer solar selective absorber coating of the present invention has high oxidation resistance, stable microstructure, high adherence and graded composition particularly suitable for applications in concentrating collectors like evacuated receiver tubes and Fresnel receiver tubes useful for solar steam generation.
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The invention claimed is: 1. A hybrid multilayer solar selective coating comprising a tandem stack of layers containing an interlayer of chromium, a first absorber layer of aluminum-titanium nitride (AlTiN), a second absorber layer of aluminum-titanium oxynitride (AlTiON), an antireflection layer of aluminum-titanium oxide (AlTiO) and a barrier layer of organically modified silica (ormosil), wherein said coating exhibits a thermal resistance up to 500° C. in air and up to 600° C. in vacuum with a solar selectivity ratio in the order of 5 to 9. 2. The hybrid multilayer solar selective coating as claimed in claim 1 , wherein said coating is stable under UV irradiation, external environment and thermal shock. 3. The hybrid multilayer solar selective coating as claimed in claim 1 , wherein thicknesses of first absorber layer, second absorber layer, antireflection layer and barrier layer are in the range of 30-70 nm, 20-40 nm, 30-55 nm and 50-200 nm, respectively. 4. The hybrid multilayer solar selective coating as claimed in claim 1 , wherein thickness of chrome interlayer is in the range of 3-7 μm. 5. The hybrid multilayer solar selective coating as claimed in claim 1 , wherein the composition of the first absorber layer is: Al=25-55 at. %, Ti=10-25 at. % and N=30-50 at. %, second absorber layer is: Al=15-30 at. %, Ti=10-15 at. %, N=10-20 at. %, anti-reflection layer is Al=15-30 at. %, Ti=5-15 at. % and O=40-80 at. % organically modified sol-gel silica layer (ormosil) is Si=16-30 at. %, C=3-15 at. %, O=25-59 at. % and H=8-44 at. %. 6. The hybrid multilayer solar selective coating as claimed in claim 1 , wherein said coating is useful for solar thermal power generation. 7. A process for the preparation of a hybrid multilayer solar selective coating as claimed in claim 1 , comprising the steps of: a. metallographically polishing and chemically cleaning of substrate in an ultrasonic agitator in acetone, absolute alcohol and trichloroethylene; b. depositing a interlayer either by sputtering or electroplating; c. depositing solar absorber layers consisting of aluminum titanium nitride (AlTiN), aluminum titanium oxynitride (AlTiON) and aluminum titanium oxide (AlTiO) using four-cathode reactive pulsed direct current unbalanced magnetron sputtering system; d. depositing ormosil layer by dip-coating to obtain hybrid multilayer solar selective coating. 8. The process as claimed in claim 7 , wherein said substrate is selected from metallic and non-metallic group. 9. The process as claimed in claim 8 , wherein said substrate comprises stainless steel having a chrome interlayer configured for reducing emittance. 10. The process as claimed in claim 7 , wherein said ormosil layer is prepared by sol gel method using a sol prepared by two precursor silanes consisting of (a) a silane of formula SiR′ 4 , wherein R′ is a hydrolysable alkoxy group and (b) silane of the formula SiR′ n R″ (4-n) , where R′ is a hydrolysable alkoxy group and R″ is non-hydrolysable group comprising of any one of the groups such as alkyl, vinyl, alkenyl or aryl group, or alkyl group with a functional group such as epoxy, amino, isocyanate or acrylate group containing at least one such non-hydrolysable group. 11. The process as claimed in claim 10 , wherein the silane of formula SiR′ 4 and the silane of the formula SiR′ n R″ (4-n) are present in a molar ratio of 1:10 to 10:1. 12. The process as claimed in claim 10 , wherein the silane of formula SiR′ 4 comprises tetraethoxysilane and the silane of the formula SiR′ n R″ (4-n) comprises methyl triethoxysilane. 13. The hybrid multilayer solar selective coating as claimed in claim 1 , wherein said coating has an absorptance of 0.950 or more and an emittance of 0.11 or less.
including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates · CPC title
After-treatment of electroplated surfaces · CPC title
Mechanical Engineering · mapped topic
Reactive sputtering · CPC title
Sol or sol-gel processing · CPC title
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