Substrate Processing Method, Apparatus, and System
US-2024363405-A1 · Oct 31, 2024 · US
US9725803B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9725803-B2 |
| Application number | US-201514790996-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 2, 2015 |
| Priority date | Jul 2, 2015 |
| Publication date | Aug 8, 2017 |
| Grant date | Aug 8, 2017 |
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A method of treating a carbon-carbon structure is provided. The method includes the step of infiltrating the carbon-carbon structure with a ceramic preparation comprising an oxide compound and at least one of a boron compound or an oxide-boron compound to obtain a uniform distribution of the ceramic preparation within a porosity of the carbon-carbon structure. The carbon-carbon structure may be densified by chemical vapor infiltration (CVI) and heat treated to form borides. Heat treating the carbon-carbon may comprise a temperature ranging from 1000° C. to 1900° C.
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What is claimed is: 1. A method of treating a carbon-carbon structure, comprising: infiltrating the carbon-carbon structure with a ceramic preparation to obtain a uniform distribution of the ceramic preparation within a porosity of the carbon-carbon structure, wherein the ceramic preparation comprises an oxide compound, wherein the ceramic preparation comprises at least one of a boron compound or an oxide-boron compound, wherein the at least one of the boron compound or the oxide-boron compound comprises nano particles coated with a polymeric layer; densifying the carbon-carbon structure by chemical vapor infiltration (CVI); and heat treating the carbon-carbon structure to form borides. 2. The method of claim 1 , further comprising forming boride particles within the carbon-carbon structure, wherein the boride particles comprise at least one of zirconium diboride, titanium diboride, or yttrium diboride. 3. The method of claim 1 , further comprising partially densifying the carbon-carbon structure before the infiltrating the carbon-carbon structure with the ceramic preparation. 4. The method of claim 1 , further comprising partially densifying the carbon-carbon structure after infiltrating the carbon-carbon structure with the ceramic preparation. 5. The method of claim 1 , further comprising preparing the ceramic preparation from at least one of a boron-oxide source or an oxide source and a boron source, wherein the ceramic preparation comprises at least one of a ceramic colloidal suspension or a sol gel. 6. The method of claim 5 , wherein the oxide source comprises at least one of zirconia, yttria stabilized zirconia, TiO 2 , or Y 2 O 3 , wherein the oxide source comprises at least one of submicron or nano particle size. 7. The method of claim 5 , wherein the boron source comprises at least one of boron powder, boron carbide powder, boron oxide powder, or boric acid, wherein the boron powder comprises a size less than 2 micrometers. 8. The method of claim 1 , further comprising adding a polyelectrolyte dispersant to the ceramic preparation to coat the at least one of the oxide compound or the oxide-boron compound with a carbon film. 9. The method of claim 1 , further including selecting a solid content of the ceramic preparation to leave an amount of a ceramic from 0.5% to 12% by weight of the carbon-carbon structure in response to completing a densification of the carbon-carbon structure. 10. The method of claim 1 , further comprising adding a carbon source to the ceramic preparation, wherein the carbon source comprises at least one of polyvinyl alcohol, polyacrylamide, hydro ethylcellulose, or an aqueous emulsion of polyester, epoxy, or phenolic. 11. The method of claim 1 , wherein the heat treating the carbon-carbon structure comprises a temperature ranging from 1000° C. to 1900° C. 12. A method of treating a carbon-carbon structure, comprising: forming the carbon-carbon structure; treating the carbon-carbon structure with heat at a first temperature ranging from 1000° C. to 2200° C.; infiltrating the carbon-carbon structure with a ceramic preparation comprising at least one of a ceramic colloidal suspension or a sol gel, the ceramic preparation comprising at least one of a boride compound or an oxide compound, wherein the ceramic preparation comprises nano particles coated with a polymeric layer; densifying the carbon-carbon structure by chemical vapor infiltration (CVI); and treating the carbon-carbon structure with heat at a second temperature ranging from 1000° C. to 1900° C. 13. The method of claim 12 , further comprising forming boride particles within the carbon-carbon structure, wherein the boride particles comprise at least one of zirconium diboride, titanium diboride, or yttrium diboride. 14. The method of claim 12 , further comprising partially densifying the carbon-carbon structure before the infiltrating the carbon-carbon structure with the ceramic preparation. 15. The method of claim 12 , further comprising partially densifying the carbon-carbon structure after infiltrating the carbon-carbon structure with the ceramic preparation. 16. The method of claim 12 , further comprising preparing the ceramic preparation from at least one of a boron-oxide source or an oxide source and a boron source. 17. The method of claim 16 , wherein the oxide source comprises at least one of zirconia, yttria stabilized zirconia, TiO 2 , or Y 2 O 3 . 18. The method of claim 16 , wherein the oxide source comprises at least one of zirconia, yttria stabilized zirconia, TiO 2 , or Y 2 O 3 , wherein the oxide source comprises at least one of submicron or nano particle size. 19. The method of claim 12 , further comprising adding a polyelectrolyte dispersant to the ceramic preparation to coat the at least one of the oxide compound or the oxide-boron compound with a carbon film. 20. The method of claim 12 , further including selecting a solid content of the ceramic preparation to leave an amount of a ceramic from 0.5% to 12% by weight of the carbon-carbon structure in response to completing a densification of the carbon-carbon structure.
Yttrium oxide or oxide-forming salts thereof · CPC title
Carbon fibres in a carbon matrix · CPC title
Sol-gel processing · CPC title
Gas infiltration of green bodies or pre-forms · CPC title
Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title
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