Vaporizing system

Patent metadata

Field	Value
Publication number	US-9725800-B2
Application number	US-201514794109-A
Country	US
Kind code	B2
Filing date	Jul 8, 2015
Priority date	Mar 31, 2015
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

According to one embodiment, a vaporizing system comprises first and second tanks that can accumulate liquid source and first, second, and third pipes. The first pipe allows first gas to be sent out of the first tank. The second pipe allows second gas to be sent out of the second tank. The third pipe is connected to the first and second pipes and allows the first and second gas to be sent out to an external apparatus. The first tank is placed on an upper side of the second tank in a stacked manner.

First claim

What is claimed is:

1. A vaporizing system comprising:
a first tank that can accumulate liquid source;
a second tank that can accumulate the liquid source;
a first pipe to send first gas generated by the liquid source vaporizing in the first tank out of the first tank therethrough;
a second pipe to send second gas generated by the liquid source vaporizing in the second tank out of the second tank therethrough;
a third pipe connected to the first and second pipes and to send out the first and second gas to an external apparatus therethrough,
a third tank that can accumulate the liquid source; and
a fourth pipe to send third gas generated by the liquid source vaporizing in the third tank out of the third tank therethrough,
wherein the first tank is placed on an upper side of the second tank in a stacked manner,
the third pipe is connected to the fourth pipe and allows the first to third gas to be sent out to the external apparatus therethrough, and
the second tank is placed on an upper side of the third tank in a stacked manner.

2. The vaporizing system according to claim 1 , further comprising a fifth pipe placed between the first tank and the second tank and to dribble the liquid source in the first tank from a bottom side of the first tank into the second tank therethrough.

3. The vaporizing system according to claim 2 , further comprising:
a first liquid level detecting unit that detects a liquid surface height of the liquid source in the second tank; and
a first valve placed in the fifth pipe,
wherein when the first liquid level detecting unit detects that a liquid level of the liquid source has reached a first predetermined height, the first valve stops the dribble of the liquid source from the first tank into the second tank.

4. The vaporizing system according to claim 3 , wherein when the first liquid level detecting unit detects that the liquid level of the liquid source has fallen to a second predetermined height, the first valve causes the liquid source to resume dribbling from the first tank into the second tank.

5. The vaporizing system according to claim 2 , further comprising:
a first check valve placed in the second tank,
wherein when a liquid level of the liquid source in the second tank reaches a fifth predetermined height, the first check valve blocks the fifth pipe to stop the dribble of the liquid source from the first tank into the second tank while preventing the liquid source from flowing backward from the second tank to the first tank.

6. The vaporizing system according to claim 2 , wherein the fifth pipe extends through a bottom of the first tank and through a top of the second tank.

7. The vaporizing system according to claim 1 , further comprising a sixth pipe placed between the second tank and the third tank and to dribble the liquid source in the second tank from a bottom side of the second tank into the third tank therethrough.

8. The vaporizing system according to claim 7 , further comprising:
a second liquid level detecting unit that detects a liquid surface height of the liquid source in the third tank; and
a second valve placed in the sixth pipe,
wherein when the second liquid level detecting unit detects that a liquid level of the liquid source has reached a third predetermined height, the second valve stops the dribble of the liquid source from the second tank into the third tank.

9. The vaporizing system according to claim 8 , wherein when the second liquid level detecting unit detects that the liquid level of the liquid source has fallen to a fourth predetermined height, the second valve causes the liquid source to resume dribbling from the second tank into the third tank.

10. The vaporizing system according to claim 7 , further comprising:
a second check valve placed in the third tank,
wherein when a liquid level of the liquid source in the third tank reaches a sixth predetermined height, the second check valve blocks the sixth pipe to stop the dribble of the liquid source from the second tank into the third tank while preventing the liquid source from flowing backward from the third tank to the second tank.

11. The vaporizing system according to claim 7 , wherein the sixth pipe extends through a bottom of the second tank and through atop of the third tank.

12. The vaporizing system according to claim 1 , further comprising:
a third valve placed in the third pipe,
wherein the third valve is placed on a downstream side of connection positions between the third pipe and the first and second pipes.

13. The vaporizing system according to claim 12 , further comprising:
a mass flow controller placed in the third pipe,
wherein the mass flow controller is placed on a downstream side of the third valve.

14. The vaporizing system according to claim 1 , wherein the first, second, and third tanks are surrounded by heaters.

15. The vaporizing system according to claim 1 , further comprising a seventh pipe placed on an upper side of the first tank and to dribble the liquid source from a feeding device supplying the liquid source into the first tank therethrough.

16. The vaporizing system according to claim 15 , further comprising:
a third liquid level detecting unit that detects a liquid surface height of the liquid source in the first tank; and
a fourth valve placed in the seventh pipe,
wherein when the third liquid level detecting unit detects that a liquid level of the liquid source has reached a seventh predetermined height, the fourth valve stops the supply of the liquid source from the feeding device to the first tank.

17. The vaporizing system according to claim 16 , wherein when the third liquid level detecting unit detects that the liquid level of the liquid source has fallen to an eighth predetermined height, the fourth valve causes the liquid source to resume supplying from the feeding device to the first tank.

18. The vaporizing system according to claim 15 , further comprising:
a third check valve placed in the first tank,
wherein when a liquid level of the liquid source in the first tank reaches a ninth predetermined height, the third check valve blocks the seventh pipe stop the supply of the liquid source from the feeding device to the first tank while preventing the liquid source from flowing backward from the first tank into the seventh pipe.

19. A vaporizing system comprising:
a first tank that can accumulate liquid source;
a second tank that can accumulate the liquid source;
a first pipe to send first gas generated by the liquid source vaporizing in the first tank out of the first tank therethrough;
a second pipe to send second gas generated by the liquid source vaporizing in the second tank out of the second tank therethrough;
a third pipe connected to the first and second pipes and to send out the first and second gas to an external apparatus therethrough,
a seventh pipe placed on an upper side of the first tank and to dribble the liquid source from a feeding device supplying the liquid source into the first tank therethrough;
a third liquid level detecting unit that detects a liquid surface height of the liquid source in the first tank;
a fourth valve placed in the seventh pipe; and
a third check valve placed in the first tank,
wherein the first tank is placed on an upper side of the second tank in a stacked manner, and
when the third check valve is closed, and the third liquid level detecting unit detects that a liquid level of the liquid source has reached a tenth predetermined height, the fourth valve stops the supply of the liqui

Assignees

• Toshiba Kk

Inventors

• Kusunoki Mari
• Miyazaki Shinji

Classifications

• C23C16/4485 Primary

  by evaporation without using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title

• Y10T137/86228

  With communicating opening in common walls of tanks or compartments · CPC title

• Y10T137/8622

  Plural top-to-bottom connected tanks · CPC title

• Y10T137/86187

  Plural tanks or compartments connected for serial flow · CPC title

• Y10T137/4857

  With manifold or grouped outlets · CPC title