Cerium oxide based composite polishing powder and preparation method thereof

Patent metadata

Field	Value
Publication number	US-9725620-B2
Application number	US-201314412366-A
Country	US
Kind code	B2
Filing date	Nov 7, 2013
Priority date	Nov 7, 2012
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

The present invention provides a cerium oxide based composite polishing powder and a preparation method thereof. The polishing powder contains the element magnesium in an amount of 0.005 wt %-5 wt % to magnesium oxide meter. The preparation method includes: (1) uniformly mixing a salt solution containing cerium serving as the main component of the polishing powder; (2) uniformly mixing a precipitating agent of an aqueous magnesium bicarbonate solution with the mixed solution prepared in step (1) to obtain a slurry; (3) aging the slurry prepared in step (2) for 0-48 h while the temperature of the slurry is kept at 30-90 degrees centigrade, and filtering the aged slurry to obtain the precursor powder of the polishing powder; (4) calcinating the precursor powder at 600-1000 degrees centigrade, then dispersing and separating the calcinated precursor powder to obtain the polishing powder. The present invention improves the polishing performance and the suspension performance of polishing powder.

First claim

The invention claimed is:

1. A cerium oxide based composite polishing powder, wherein the cerium oxide based composite polishing powder comprises the element magnesium in an amount of 0.005-5 wt % to magnesium oxide meter, the cerium oxide based composite polishing powder further comprises 0.2-8 wt % of the element of fluorine or further comprises 0.1-5 wt % of the element of phosphorus.

2. The cerium oxide based composite polishing powder according to claim 1 , wherein the content of the element of magnesium is 0.01-2 wt % to magnesium oxide meter.

3. The cerium oxide based composite polishing powder according to claim 1 , wherein further comprises: at least one of the other rare earth elements different from cerium.

4. The cerium oxide based composite polishing powder according to claim 1 , wherein the content of cerium oxide is 40-99.99 wt %.

5. The cerium oxide based composite polishing powder according to claim 1 , wherein the median particle diameter D 50 of the cerium oxide based composite polishing powder is 0.02-5 μm.

6. The cerium oxide based composite polishing powder according to claim 1 , wherein the median particle diameter D 50 of the cerium oxide based composite polishing powder is 0.5-3 μm.

Assignees

• Grirem Advanced Mat Co Ltd

Inventors

• Huang Xiaowei
• Yu Ying
• Long Zhiqi
• Wang Liangshi
• Cui Dali
• Hou Yongke
• Cui Meisheng

Classifications

• C09G1/02 Primary

  containing abrasives or grinding agents {(abrasives as such C09K3/14; polishing of semi-conductors H10P52/40)} · CPC title