Resin, and arf dry photoresist composition comprising same and application
US-2024302749-A1 · Sep 12, 2024 · US
US9725546B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9725546-B2 |
| Application number | US-201414901261-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 6, 2014 |
| Priority date | Jun 25, 2013 |
| Publication date | Aug 8, 2017 |
| Grant date | Aug 8, 2017 |
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A moisture-curable composition includes a polymer preparable by free-radical copolymerization of monomers comprising at least one monomer A and at least one monomer B. Monomer(s) A comprise free-radically polymerizable hydrolyzable silane. Monomer(s) B include a divalent group selected from the group consisting of —(CF 2 O) a —, —(CF 2 CF 2 O) b —, —(CF 2 CF 2 CF 2 O) c —, —(CF 2 CF 2 CF 2 CF 2 O) d —, —(CF 2 CF(CF3)O) e —, and combinations thereof, wherein a, b, c, d, and e represent integers in the range of from 0 to 130, and wherein 1≦<a+b+c+d+e≦130. A composite article includes a layer of a composition on a substrate. The composition comprises a cross-linked reaction product of components including the moisture-curable composition. Methods of making the composite article are also disclosed.
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What is claimed is: 1. A moisture-curable composition comprising a polymer prepared by free-radical copolymerization of monomers comprising at least one monomer A, at least one monomer B, and at least one monomer C, wherein: each monomer A is independently represented by the formula wherein R 1 represents H or methyl, L 1 is a covalent bond or a divalent aliphatic group having from 1 to 10 carbon atoms, each Y 1 independently represents a hydrocarbyl group having from 1 to 6 carbon atoms, each Y 2 independently represents a hydrolyzable group, and g is 0, 1, or 2; each monomer B is independently represented by the formula wherein R 2 , R 3 , and R 4 represent H, methyl, trifluoromethyl, or F, wherein at least one of R 2 , R 3 , and R 4 is F, R f 1 represents a covalent bond or a divalent group selected from the group consisting of —(CF 2 O) a —, —(CF 2 CF 2 O) b —, —(CF 2 CF 2 CF 2 O) c —, —(CF 2 CF 2 CF 2 CF 2 O) d —, —(CF 2 CF(CF 3 )O) e —, and combinations thereof, wherein a, b, c, d, and e represent integers in the range of from 0 to 130, and wherein 1≦a+b+c+d+e≦130, R f 2 is a perfluoroalkyl group; and each C is independently represented by the formula wherein L 2 represents a covalent bond or divalent aliphatic group comprising from 1 to 6 carbon atoms, and R 5 represents a photocrosslinking group containing a benzophenone or substituted benzophenone moiety, and further wherein the polymer contains less than or equal to 0.49 percent by weight of fluorinated alkene. 2. The moisture-curable composition of claim 1 , wherein the weight ratio of said at least one monomeric unit B to said at least one monomeric unit A is at least 0.8. 3. The moisture-curable composition of claim 1 , wherein L 1 is a covalent bond. 4. The moisture-curable composition of claim 1 , wherein Y 2 is selected from the group consisting of alkoxy groups having from 1 to 4 carbon atoms, alkanoyloxy groups having from 2 to 4 carbon atoms, a hydroxyl group, and Cl. 5. The moisture-curable composition of claim 1 , wherein said at least one monomer B has an average sum of a+b+c+d+e in the range of from 30 to 40. 6. The moisture-curable composition of claim 1 , wherein said at least one monomer B has an average sum of a+b+c+d+e in the range of from 4 to 8. 7. A composite article comprising a composition disposed on a substrate, wherein the composition comprises a cross-linked reaction product of components comprising the moisture-curable composition of claim 1 . 8. A moisture-curable composition comprising a polymer prepared by free-radical copolymerization of monomers comprising at least one monomer A, at least one monomer B, and at least one monomer C, wherein: each monomer A is independently represented by the formula wherein R 1 represents H or methyl, L 1 is a covalent bond or a divalent aliphatic group having from 1 to 10 carbon atoms, each Y 1 independently represents a hydrocarbyl group having from 1 to 6 carbon atoms, each Y 2 independently represents a hydrolyzable group, and g is 0, 1, or 2; each monomer B is independently represented by the formula wherein R 2 , R 3 , and R 4 represent H, methyl, trifluoromethyl, or F, wherein at least one of R 2 , R 3 , and R 4 is F, R f 1 represents a covalent bond or a divalent group selected from the group consisting of —(CF 2 O) a —, —(CF 2 CF 2 O) b —, —(CF 2 CF 2 CF 2 O) c —, —(CF 2 CF 2 CF 2 CF 2 O) d —, —(CF 2 CF(CF 3 )O) e —, and combinations thereof, wherein a, b, c, d, and e represent integers in the range of from 0 to 130, and wherein 2≦a+b+c+d+e≦130, and R f 2 is a perfluoroalkyl group; and each monomer C is independently represented by the formula wherein L 2 represents a covalent bond or divalent aliphatic group comprising from 1 to 6 carbon atoms, and R 5 represents a photocrosslinking group containing a benzophenone or substituted benzophenone moiety. 9. The moisture-curable composition of claim 8 , wherein the weight ratio of said at least one monomeric unit B to said at least one monomeric unit A is at least 0.8. 10. The moisture-curable composition of claim 8 , wherein L 1 is a covalent bond. 11. The moisture-curable composition of claim 8 , wherein Y 2 is selected from the group consisting of alkoxy groups having from 1 to 4 carbon atoms, alkanoyloxy groups having from 2 to 4 carbon atoms, a hydroxyl group, and Cl. 12. The moisture-curable composition of claim 8 , wherein said at least one monomer B has an average sum of a+b+c+d+e in the range of from 30 to 40. 13. The moisture-curable composition of claim 8 , wherein said at least one monomer B has an average sum of a+b+c+d+e in the range of from 4 to 8. 14. A composite article comprising a composition disposed on a substrate, wherein the composition comprises a cross-linked reaction product of components comprising the moisture-curable composition of claim 8 .
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