Table device and conveyance device

Patent metadata

Field	Value
Publication number	US-9723917-B2
Application number	US-201314901378-A
Country	US
Kind code	B2
Filing date	Dec 18, 2013
Priority date	Jul 2, 2013
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

A table device including: a first base including a first reference surface; a second base including a second reference surface, and movable on the first reference surface in a direction parallel to a first axis; a first bearing member provided to the second base, and forming a gas bearing between the first bearing member and the first reference surface; a second bearing member provided to the second base, apart from the first bearing member relative to a direction parallel to a second axis perpendicular to the first axis, and forming a gas bearing between the second bearing member and the first reference surface; and a table movable on the second reference surface. A distance between the first bearing member and the second bearing member is longer than a dimension of a moving range of the table relative to the direction parallel to the second axis.

First claim

The invention claimed is:

1. A table device comprising:
a first base including a first reference surface parallel to a predetermined surface;
a second base including a second reference surface parallel to the predetermined surface, and movable on the first reference surface in a first direction parallel to a first axis existing in the predetermined surface;
a first bearing member that is provided to the second base, includes a first gas supply port facing the first reference surface, and forms a gas bearing between the first bearing member and the first reference surface with a gas supplied through the first gas supply port;
a second bearing member that is provided to the second base, apart from the first bearing member relative to a second direction parallel to a second axis perpendicular to the first axis and existing in the predetermined surface, includes a second gas supply port facing the first reference surface, and forms a gas bearing between the second bearing member and the first reference surface with a gas supplied through the second gas supply port;
a table movable on the second reference surface in the second direction parallel to the second axis;
a second guide member that is provided to the second base, and guides the table to the second direction parallel to the second axis;
a third bearing member that is provided to the table, includes a third gas supply port facing the second reference surface, and a fourth gas supply port facing a first side surface of the second guide member, the first side surface facing a first direction parallel to the first axis, forms a gas bearing between the third bearing member and the second reference surface with a gas supplied through the third gas supply port, and forms a gas bearing between the third bearing member and the first side surface with a gas supplied through the fourth gas supply port; and
a fourth bearing member that is provided to the table, includes a fifth gas supply port facing a second side surface of the second guide member, the second side surface facing an opposite direction to the first direction, and forms a gas bearing between the fourth bearing member and the first side surface with a gas supplied through the fifth supply port,
wherein a distance between the first bearing member and the second bearing member is longer than a dimension of a moving range of the table relative to the second direction parallel to the second axis.

2. The table device according to claim 1 , wherein
the moving range of the table is determined such that a center of gravity of the table is moved between the first bearing member and the second bearing member relative to the second direction parallel to the second axis.

3. The table device according to claim 1 , comprising a first guide member that is provided to the first base, and guides the second base to the first direction parallel to the first axis.

4. The table device according to claim 3 , comprising a fifth bearing member that is provided to the second base, includes a sixth gas supply port facing a third side surface of the first guide member, the third side surface facing the second direction parallel to the second axis, and forms a gas bearing between the fifth bearing member and the third side surface with a gas supplied through the sixth gas supply port, wherein
the first bearing member includes a seventh gas supply port arranged to face a fourth side surface of the first guide member, the fourth side surface facing an opposite direction to the second direction, and forms a gas bearing between the first bearing member and the fourth side surface with a gas supplied through the seventh gas supply port.

5. The table device according to claim 1 , comprising a sixth bearing member that is provided to the table, apart from the third bearing member relative to the first direction parallel to the first axis, includes an eighth gas supply port facing the second reference surface, and forms a gas bearing between the sixth bearing member and the second reference surface with a gas supplied through the eighth gas supply port.

6. The table device according to claim 1 , comprising a suction force generation device that is arranged between the first base and the second base, and generates force to pull the second base to the first base.

7. A conveyance device comprising the table device according to claim 1 .

8. A table device comprising:
a first base including a first reference surface parallel to a predetermined surface;
a second base including a second reference surface parallel to the predetermined surface, and movable on the first reference surface in a first direction parallel to a first axis existing in the predetermined surface:
a first bearing member that is provided to the second base, includes a first as supply port facing the first reference surface, and forms a gas bearing between the first bearing member and the first reference surface with a gas supplied through the first gas supply port;
a second bearing member that is provided to the second base, apart from the first bearing member relative to a second direction parallel to a second axis perpendicular to the first axis and existing in the predetermined surface, includes a second gas supply port facing the first reference surface, and forms a gas bearing between the second bearing member and the first reference surface with a gas supplied through the second gas supply port:
a table movable on the second reference surface in the second direction parallel to the second axis; and
a suction force generation device that is arranged between the first base and the second base, and generates force to pull the second base to the first base,
wherein
the suction force generation device includes a first member connected to the first base, and a second member connected to the second base and capable of generating the force to pull the second base between the second member and the first member,
the second member includes a first portion including a first lower surface facing the first member, and a second portion arranged above the first portion, and including a second lower surface, at least a part of the second lower surface extending to an outer side than the first portion,
the second portion includes a hole connecting the second lower surface and an upper surface of the second member, and
a fixing member for fixing the second member and the second base is arranged in the hole.

9. A table device comprising:
a base including a reference surface parallel to a predetermined surface;
a movable member movable on the reference surface;
a bearing member that is provided to the movable member, includes a gas supply port facing the reference surface, and forms a gas bearing between the bearing member and the reference surface with a gas supplied through the gas supply port; and
a suction force generation device that includes a first member connected to the base and a second member connected to the movable member, and generates force to pull the movable member to the base between the first member and the second member, wherein
the second member includes a first portion including a first lower surface facing the first member, and a second portion arranged above the first portion, and including a second lower surface, at least a part of the second lower surface extending to an outer side than the first portion,
the second portion includes a hole connecting the second lower surface and an upper surface of the second member, and
a fixing member for fixing the second member and the movable member is arranged in the hole.

Assignees

• Nsk Ltd

Inventors

• Satou Toshinori

Classifications

• A47B13/081 Primary

  Movable, extending, sliding table tops · CPC title

• G03F7/70716

  Stages · CPC title

• F16C32/0618

  via porous material · CPC title

• F16C32/0614

  the gas being supplied under pressure, e.g. aerostatic bearings · CPC title

• F16C29/004

  Fixing of a carriage or rail, e.g. rigid mounting to a support structure or a movable part · CPC title