Gradient SiNO anti-reflective layers in solar selective coatings

Patent metadata

Field	Value
Publication number	US-9719697-B2
Application number	US-201414297716-A
Country	US
Kind code	B2
Filing date	Jun 6, 2014
Priority date	Jun 20, 2013
Publication date	Aug 1, 2017
Grant date	Aug 1, 2017

Abstract

A solar selective coating includes a substrate, a cermet layer having nanoparticles therein deposited on the substrate, and an anti-reflection layer deposited on the cermet layer. The cermet layer and the anti-reflection layer may each be formed of intermediate layers. A method for constructing a solar-selective coating is disclosed and includes preparing a substrate, depositing a cermet layer on the substrate, and depositing an anti-reflection layer on the cermet layer.

First claim

What is claimed is:

1. A solar-selective coating comprising:
a substrate;
at least one cermet layer comprising chromium (Cr) nanoparticles in chromium nitric oxide (CrNO) therein deposited on the substrate; and
at least one anti-reflection layer deposited on the at least one cermet layer, wherein the at least one anti-reflection layer comprises nitrogen (N), oxygen (O), and at least one component selected from the group consisting of boron (B), silicon (Si), germanium (Ge), arsenic (As), selenium (Se), antimony (Sb), and tellurium (Te), wherein the coating comprises a solar absorptance (α) of at least about 0.75 in a wavelength range of about 0.3 μm to about 2.5 μm.

2. The coating of claim 1 , further comprising a buffer layer disposed between the substrate layer and the at least one cermet layer.

3. The coating of claim 1 , wherein the at least one cermet layer comprises a gradient of at least one property.

4. The coating of claim 3 , further comprising a plurality of cermet layers.

5. The coating of claim 4 , wherein each of the plurality of cermet layers has a ratio of the metal to ceramic atoms that is lower than the previous cermet layer.

6. The coating of claim 1 , wherein the at least one anti-reflection layer comprises a gradient of at least one property.

7. The coating of claim 6 , further comprising a plurality of anti-reflection layers.

8. The coating of claim 7 , wherein each of the plurality of anti-reflection layers has a lower density or a lower ratio of semi-metallic or metallic elements to nitric oxide than the previous anti-reflective layer.

9. The coating of claim 1 comprising a thermal emittance of less than about 0.25 at about 82° C.

10. The coating of claim 1 , wherein the at least one cermet layer is less than 150 nm thick.

11. A method for constructing a solar-selective coating comprising:
depositing at least one cermet layer comprising chromium (Cr) nanoparticles in chromium nitric oxide (CrNO) on a substrate; and
depositing at least one anti-reflection layer on the cermet layer, wherein the at least one anti-reflection layer comprises nitrogen (N), oxygen (O), and at least one component selected from the group consisting of boron (B), silicon (Si), germanium (Ge), arsenic (As), selenium (Se), antimony (Sb), and tellurium (Te) to form the solar-selective coating, wherein the solar-selective coating comprises a solar absorptance (α) of at least about 0.75 in a wavelength range of about 0.3 μm to about 2.5 μm.

12. The method of claim 11 , further comprising preparing the substrate prior to depositing the at least one cermet layer, wherein preparing a substrate comprises:
cleaning at least one surface of the substrate; and
depositing a buffer layer on the cleaned surface.

13. The method of claim 11 , wherein depositing the at least one cermet layer on the substrate comprises depositing a cermet gradient on the substrate.

14. The method of claim 13 , wherein depositing the cermet gradient comprises depositing a plurality of cermet layers.

15. The method of claim 14 , wherein depositing the cermet gradient comprises controlling a ratio of metal atoms to ceramic atoms in each cermet layer of the plurality of cermet layers to form a gradient.

16. The method of claim 11 wherein depositing at least one anti-reflection layer on the substrate comprises depositing a plurality of anti-reflection layers to form a gradient.

17. The method of claim 16 , wherein depositing the at least one anti-reflection layer comprises controlling a ratio of inert gases during the deposition of each anti-reflection layer of the plurality of anti-reflection layers.

18. A solar-selective coating comprising:
a conductive substrate;
a buffer layer deposited on the conductive substrate via chemical vapor deposition (CVD);
a cermet layer comprising chromium (Cr) nanoparticles in chromium nitric oxide (CrNO) deposited on the buffer layer, wherein the cermet layer further comprises a gradient in a ratio of metal to ceramic; and
at least one anti-reflection layer deposited on the cermet layer, wherein the at least one anti-reflection layer comprises nitrogen (N), oxygen (O), and at least one component selected from the group consisting of boron (B), silicon (Si), germanium (Ge), arsenic (As), selenium (Se), antimony (Sb), and tellurium (Te), wherein the solar-selective coating comprises a solar absorptance (α) of at least about 0.75, in the wavelength range of about 0.3 μm to about 2.5 μm.

19. The coating of claim 18 , wherein the at least one anti-reflection layer comprises a plurality of anti-reflection layers.

20. The coating of claim 19 , wherein each of the plurality of anti-reflection layers has a lower density than the previous anti-reflective layer.

21. The coating of claim 19 , wherein each of the plurality of anti-reflection layers has a lower ratio of semi-metallic or metallic elements to nitric oxide than the previous anti-reflective layer.

Assignees

• Univ Houston System
• Massachusetts Inst Technology

Inventors

• Ren Zhifeng
• Cao Feng
• Sun tianyi
• Chen Gang

Classifications

• C23C28/324

  with at least one metal matrix material layer comprising a mixture of at least two metals or metal phases or a metal-matrix material with hard embedded particles, e.g. WC-Me · CPC title

• C23C28/325

  with layers graded in composition or in physical properties · CPC title

• C23C28/322

  only coatings of metal elements only · CPC title

• C23C28/34

  including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates · CPC title

• C23C28/36

  including layers graded in composition or physical properties · CPC title