Fluid control device

Patent metadata

Field	Value
Publication number	US-9719599-B2
Application number	US-201414898888-A
Country	US
Kind code	B2
Filing date	Nov 12, 2014
Priority date	Dec 27, 2013
Publication date	Aug 1, 2017
Grant date	Aug 1, 2017

Abstract

As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

First claim

The invention claimed is:

1. A fluid control device comprising:
a main body having a rectangular parallelepiped shape;
main gas input-output ports and vent gas input-output ports provided at both ends in a longitudinal direction of the main body, the main gas input-output ports being disposed at a certain distance in a width direction from the vent gas input-output ports;
a main gas passage communicating between the main gas input-output ports;
a vent gas passage communicating between the vent gas input-output ports;
a plurality of sub-gas inlets provided on one side of the body;
a plurality of on-off valves disposed in positions corresponding to the sub-gas inlets, the on-off valves being arranged in the width direction; and
a plurality of sub-gas inflow passages leading to inlets of the on-off valves from the sub-gas inlets,
wherein the main body is formed by disposing, in the longitudinal direction, passage blocks having portions accommodating the on-off valves,
each of the passage blocks has, as passages forming the main gas passage, first inverted-V passages opened at both ends in the longitudinal direction and a first outlet passage communicating between an apex of the first inverted-V passage and an outlet of each of the on-off valves,
each of the passage blocks has, as passages forming the vent gas passage, a second inverted-V passage opened at both ends in the longitudinal direction and a second outlet passage communicating between an apex of the second inverted-V passage and the outlet of each of the on-off valves, and
each of the passage blocks has, as the sub-gas inflow passages, an inlet passage leading to the inlet of the on-off valve, a common inlet passage continued to the inlet passage and communicating with the sub-gas inlet, and a communication path continued to the inlet passage and continued to the common inlet passage.

2. The fluid control device according to claim 1 ,
wherein each of the on-off valves includes a seat disposed detachably on a periphery of the outlet passage formed in each of the passage blocks, a seat holder disposed detachably in the portion of each of the passage blocks, the seat holder holding the seat, and a diaphragm opening and closing a fluid passage by being pushed against or separated from the seat, a fluid having flowed into the inlet passage communicating with the outlet passage via a through hole provided in the seat holder.

Assignees

• Fujikin Kk

Inventors

• Kitano Taichi
• Shinohara Tsutomu
• Yakushijin Tadayuki
• Nakata Tomohiro
• Tanikawa Tsuyoshi
• Yamaji Michio

Classifications

• F16K7/14 Primary

  arranged to be deformed against a flat seat · CPC title

• F15B13/0817

  Multiblock manifolds · CPC title

• F16K27/003

  Housing formed from a plurality of the same valve elements · CPC title