Embedded polysilicon resistors with crystallization barriers

Patent metadata

Field	Value
Publication number	US-9716136-B1
Application number	US-201615071641-A
Country	US
Kind code	B1
Filing date	Mar 16, 2016
Priority date	Mar 16, 2016
Publication date	Jul 25, 2017
Grant date	Jul 25, 2017

Abstract

A method of forming an embedded polysilicon resistor body contact. According to the method, a transistor is formed in and above a crystalline active region that is positioned in a semiconductor layer of a multilayer semiconductor device. A resistor region is defined in single crystal semiconductor material of the semiconductor layer formed on a buried insulating layer. The resistor region is adjacent the transistor. An amorphized semiconductor material is formed in the resistor region. A barrier is formed in the amorphized semiconductor material. The barrier is between the transistor and an electrical body contact for the transistor. The amorphized semiconductor material is annealed, forming a polysilicon semiconductor. The barrier prevents the amorphized region from recrystallizing back to single crystal silicon.

First claim

What is claimed is:

1. A method comprising:
forming a transistor in and above a crystalline active region that is positioned in a semiconductor layer of a multilayer semiconductor device;
defining a resistor region in single crystal semiconductor material of the semiconductor layer formed on a buried insulating layer, the resistor region being adjacent the transistor;
forming an amorphized semiconductor material in the resistor region by implanting a first ion into the resistor region;
forming a barrier in the amorphized semiconductor material by implanting a second ion into at least a portion of the amorphized semiconductor material, the barrier being between the transistor and an electrical body contact for the transistor and physically separating the amorphized semiconductor material in the resistor region of the semiconductor layer from the single crystal semiconductor material of the semiconductor layer; and
annealing the amorphized semiconductor material, the barrier preventing the amorphized semiconductor material in the resistor region from recrystallizing back to single crystal silicon.

2. The method according to claim 1 , the first ion implant comprising one of:
nitrogen (N2), argon (Ar), germanium (Ge), and xenon (Xe).

3. The method according to claim 1 , the second ion implant comprising one of carbon (C), oxygen (O), fluorine (F), nitrogen (N), argon (Ar), and xenon (Xe).

4. The method according to claim 1 , the barrier further comprising a tunneling barrier formed in a trench.

5. The method according to claim 1 , the annealing recrystallizing the amorphized semiconductor material into a polycrystalline structure.

6. A method, comprising:
forming a resistor region and a crystalline active region in a semiconductor layer that is formed on a buried insulating layer;
forming a transistor element in and above the crystalline active region;
forming an amorphized semiconductor material in the resistor region;
forming a barrier in the amorphized semiconductor material by implanting an ion into at least a portion of the amorphized semiconductor material, the barrier being between the transistor element and an electrical body contact for the transistor element and physically separating the amorphized semiconductor material in the resistor region of the semiconductor layer from the crystalline active region of the semiconductor layer; and
annealing the amorphized semiconductor material, the annealing recrystallizing the amorphized semiconductor material into a polycrystalline structure.

7. The method according to claim 6 , the resistor region comprising single crystal semiconductor material.

8. The method according to claim 7 , the forming the barrier further comprising:
thermal nitridation of the single crystal semiconductor material.

9. The method according to claim 6 , the barrier preventing the amorphized semiconductor material from recrystallizing back to single crystal semiconductor material.

10. The method according to claim 6 , the forming the amorphized semiconductor material further comprising implanting an ion of one of nitrogen (N2), argon (Ar), germanium (Ge), and xenon (Xe) into the resistor region.

11. The method according to claim 6 , the barrier being formed using ion implant comprising one of carbon (C), oxygen (O), fluorine (F), nitrogen (N), argon (Ar), and xenon (Xe).

12. The method according to claim 6 , the barrier further comprising a tunneling barrier formed in a trench.

Assignees

• Globalfoundries Inc

Inventors

• Abou-Khalil Michel J
• Shank Steven M
• Stamper Anthony K

Classifications

• H01L28/20 Primary

  Electricity · mapped topic

• H10D1/47 Primary

  Resistors having no potential barriers · CPC title