Adhesive composition for temporarily bonding use in wafer manufacturing

Patent metadata

Field	Value
Publication number	US-9714317-B2
Application number	US-201414309915-A
Country	US
Kind code	B2
Filing date	Jun 20, 2014
Priority date	Dec 30, 2011
Publication date	Jul 25, 2017
Grant date	Jul 25, 2017

Abstract

The present invention relates to a temporarily bonded adhesive composition used in wafer manufacturing, to the production method and use thereof. The adhesive composition comprises a component A and a component B, wherein the component A comprises an epoxy resin; and the component B comprises a thiol, an amine and a water soluble polymer.

First claim

What is claimed is:

1. A two part adhesive composition, comprising a first component A and a second component B, wherein component A comprises an epoxy resin in an amount of 25 wt. %-40 wt. % based on the total weight of the adhesive composition, and the component B comprises a thiol in an amount of 20 wt. %-30 wt. %, an amine in an amount of 1.5 wt. %-4 wt. % and a water-soluble polymer in an amount of 1 wt. %-3 wt. %, each based on the total weight of the adhesive composition, wherein after the adhesive composition is cured between substrates and when the cured adhesive composition is exposed to water in a temperature range of about 55° C. to 80° C. the substrates demount from the cured adhesive.

2. The adhesive composition according to claim 1 , in which the epoxy resin is selected from the group consisting of bisphenol A type epoxy resins, bisphenol S type epoxy resins, bisphenol F type epoxy resins, phenol novolac epoxy resins, cresol novolac epoxy resins, epoxy diluents and combination thereof.

3. The adhesive composition according to claim 1 , in which the epoxy resin is selected from the group consisting of bisphenol A type epoxy resins, bisphenol F type epoxy resins and combination thereof.

4. The adhesive composition according to claim 1 , in which the thiol is selected from the group consisting of multifunctional polythiols, difunctional monomeric thiols, trifunctional monomeric thiols, multifunctional monomeric thiols and combination thereof.

5. The adhesive composition according to claim 1 , in which the thiol is one or more selected from the group consisting of diethylene glycol dimercaptopropionate, 4-t-butyl-1,2-benzenedithiol, bis-(2-mercaptoethyl) sulfide, 4,4′-thiodibenzenethiol, benzenedithiol, ethylene glycol dimercaptoacetate, ethylene glycol dimercaptopropionate-1,2-ethylene (3-mercaptopropionate), polyethylene glycol dimercaptoacetate, polyethylene glycol di(3-mercaptopropionate), 2,2-bis(mercaptomethyl)-1,3-propanedithiol, 2,5-dimercaptomethyl-1,4-dithiane, bisphenofluorene bis(ethoxy-3-mercaptopropionate), 4,8-bis(mercaptomethyl)-3,6,9-trithia-1,11-undecanedithiol, 2-mercaptomethyl-2-methyl-1,3-propanedithiol, 1,8-dimercapto-3,6-dioxaoctane, and thioglycerol bismercapto-acetate, trimethylolpropane (trismercaptopropionate), trimethylolpropane tris(3-mercaptoacetate), tris(3-mercaptopropyl)isocyanurate, 1,2,3-trimercaptopropane, and tris(3-mercaptopropionate)triethyl-1,3,5-triazine-2,4,6-(1H,3H,5H)-trione, poly(mercaptopropyl methyl) siloxane, 4-mercaptomethyl-3,6-dithia-1,8-octanedithiolpentaerythritol tetrakis (3-mercaptoacetate), and pentaerythritol tetrakis (3-mercapto-propionate), polythiols having a polyester as a backbone, polythiols having a polyurethane as a backbone, polythiols having a polyacrylate as a backbone and polythiols having a polyether as a backbone.

6. The adhesive composition according to claim 1 , in which the amine is selected from the group consisting of polyamines, tertiary amines and combination thereof.

7. The adhesive composition according to claim 1 , in which the amine is selected from the group consisting of aliphatic polyamines, arylaliphatic polyamines, cycloaliphatic polyamines, aromatic polyamines, heterocyclic polyamines, polyalkoxy polyamines, dicyandiamide and derivatives thereof, aminoamides, imide, ketimines, triethylamine, tributylamine, N-ethyl-diisopropylamine, N,N,N′,N′-tetramethyl-ethylenediamine, pentamethyl-diethylenetriamine and higher grade homologues thereof, N,N,N′,N′-tetramethyl-propylenediamine, pentamethyldipropylenetriamine and higher grade homologues thereof, N,N,N′,N′-tetramethyl-1,3-butylenediamine, N,N,N′,N′-tetramethyl-1,6-hexylenediamine, bis-(dimethylamino)-methane, N,N-dimethylbenzylamine, N,N-dimethyl-cyclohexylamine, N-methyl-dicyclohexylamine, N,N-dimethyl-hexadecylamine, bis-(N,N-diethylaminoethyl)-adipate, N,N-dimethyl-2-phenylethylamine, tri-(3-dimethylaminopropyl)amine, 1,4-diazabicyclo[2,2,2]octane, 1,8-diazabicyclo[5,4,0]undec-7-ene, 1,5-diazabicyclo[4,3,0]nonyl-5-ene, N-methylmorpholine, N-ethylmorpholine, N-cocoylmorpholine, N-aminoethylpiperazine, N,N′-dimethylpiperazine, N-methyl-N′-dimethylaminoethyl-piperazine, bis-(dimethylaminoethyl)-piperazine, 1,3,5-tri-(dimethylaminopropyl)-hexahydrotriazine, or bis-(2-dimethylaminoethyl)-ether and 2,4,6-tri(dimethylaminomethyl)phenol.

8. The adhesive composition according to claim 1 , in which the amine is selected from the group consisting of N-aminoethylpiperazine, N,N-dimethylbenzyiamine, 2,4,6-tri (dimethylaminomethyl)phenol and combination thereof.

9. The adhesive composition according to claim 1 , in which the water-soluble polymer is selected from the group consisting of polyvinylpyrrolidone, polyvinyl acetate and combination thereof.

10. The adhesive composition according to claim 1 , in which at least one of the first component A and the second component B further comprises a filler.

11. The adhesive composition according to claim 10 , in which based on the total weight of the adhesive composition, the amount of the filler is 15 wt. %-50 wt. %.

12. A method for producing the two part adhesive composition according to claim 1 , comprising steps of:
(1) producing the first component A by homogeneously mixing the epoxy resin;
(2) producing the second component B by forming a premix and homogeneously mixing the premix with the amine, wherein the premix is formed by dissolving the water-soluble polymer in the thiol, so that the water-soluble polymer is dispersed in the thiol.

13. An adhesive composition produced by performing the method according to claim 12 and mixing the first component A and the second component B.

14. A method of bonding together two or more substrates with the adhesive composition according to claim 1 , and thereafter demounting the bonded substrates, comprising the steps of:
applying the adhesive composition onto a first substrate;
mating a second substrate to the adhesive composition—applied first substrate and permitting the adhesive composition to cure between the first substrate and the second substrate thereby forming a bonded assembly;
slicing the bonded assembly to form sliced portions of the bonded assembly;
exposing the sliced portions of the bonded assembly to water in a temperature range of from about 55° C. to about 80° C. to demount the sliced first substrate from the sliced second substrate of the sliced portions of the bonded assembly.

15. The process according to claim 14 , wherein the first substrate is a silicon ingot and the second substrate is a support.

Assignees

• Henkel Ag & Co Kgaa
• Henkel IP & Holding GmbH

Inventors

• Li Leo
• Attarwala Shabbir

Classifications

• C08G59/50 Primary

  Amines · CPC title

• C09J163/00

  Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins · CPC title

• C08G59/4064

  sulfur containing compounds (C08G59/4021, C08G59/4028 take precedence) · CPC title

• C08G59/66

  Mercaptans · CPC title

• C08L63/00

  Compositions of epoxy resins; Compositions of derivatives of epoxy resins · CPC title