Tantalum-containing film forming compositions and vapor deposition of tantalum-containing films
US-9748249-B2 · Aug 29, 2017 · US
US9714262B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9714262-B2 |
| Application number | US-201314414865-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 19, 2013 |
| Priority date | Jul 19, 2012 |
| Publication date | Jul 25, 2017 |
| Grant date | Jul 25, 2017 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A composition for forming a passivation layer, comprising a compound represented by Formula (I): M(OR 1 ) m . In Formula (I), M comprises at least one metal element selected from the group consisting of Nb, Ta, V, Y and Hf, each R 1 independently represents an alkyl group having from 1 to 8 carbon atoms or an aryl group having from 6 to 14 carbon atoms, and m represents an integer from 1 to 5.
Opening claim text (preview).
The invention claimed is: 1. A composition for forming a passivation layer, comprising a compound represented by the following Formula (I) and a compound represented by the following Formula (II): M(OR 1 ) m (I) wherein, in Formula (I) and Formula (II), M comprises at least one metal element selected from the group consisting of Nb, Ta, V, Y and Hf, each R 1 independently represents an alkyl group having from 1 to 8 carbon atoms or an aryl group having from 6 to 14 carbon atoms, m represents an integer from 1 to 5, each R 2 independently represents an alkyl group having from 1 to 8 carbon atoms, n represents an integer from 1 to 3, each of X 2 and X 3 independently represents an oxygen atom or a methylene group, and each of R 3 , R 4 and R 5 independently represents a hydrogen atom or an alkyl group having from 1 to 8 carbon atoms, wherein the weight/weight ratio of the compound represented by Formula (I) and the compound represented by Formula (II) is from 50/50 to 90/10 and having a fixed charge density of from −7.8×10 9 to −8.3×10 11 . 2. The composition for forming a passivation layer according to claim 1 , further comprising a liquid medium. 3. The composition for forming a passivation layer according to claim 1 , further comprising a resin. 4. The composition for forming a passivation layer according to claim 3 , wherein the composition further comprising a liquid medium, and a total content of the liquid medium and the resin being from 5% by mass to 98% by mass based on the total content of the composition. 5. The composition for forming a passivation layer according to claim 1 , wherein a total content of the compound represented by Formula (I) and the compound represented by Formula (II) being from 0.1% by mass to 80% by mass based on the total content of the composition. 6. A semiconductor substrate having a passivation layer, comprising: the semiconductor substrate; and the passivation layer that is a thermally-treated product of the composition for forming a passivation layer according to claim 1 that is provided at an entire or partial surface of the semiconductor substrate. 7. A photovoltaic cell element, comprising: a semiconductor substrate having a pn junction of a p-type layer and an n-type layer; a passivation layer that is a thermally-treated product of the composition for forming a passivation layer according to claim 1 and that is provided at an entire or partial surface of the semiconductor substrate; and an electrode provided at at least one of the p-type layer or the n-type layer. 8. A photovoltaic cell, comprising; the photovoltaic cell element according to claim 7 ; and a wiring material provided on the electrode of the photovoltaic cell element.
Photovoltaic [PV] energy · CPC title
without C-Metal linkages · CPC title
Compounds of elements of Group 5 of the Periodic Table without metal-carbon linkages · CPC title
without C-aluminium linkages · CPC title
Cross-Sectional Technologies · mapped topic
Related publications grouped by family.
Answers are generated from the same data shown on this page.