Optical coupler

Patent metadata

Field	Value
Publication number	US-9709734-B2
Application number	US-201615085766-A
Country	US
Kind code	B2
Filing date	Mar 30, 2016
Priority date	Jul 18, 2014
Publication date	Jul 18, 2017
Grant date	Jul 18, 2017

Abstract

Embodiments of the present disclosure are directed toward techniques and configurations for an optical coupler. In some embodiments, the device may include an optical waveguide to transmit light input from a light source. The optical waveguide may include a semiconductor layer, having a trench with one facet that comprises an edge formed under an approximately 45 degree angle and another facet formed substantially normal to the semiconductor layer. The edge may interface with another medium to form a mirror to receive inputted light and reflect received light substantially perpendicularly to propagate the received light. Other embodiments may be described and/or claimed.

First claim

What is claimed is:

1. An optical apparatus comprising:
a substrate;
a buried oxide (BOX) layer disposed above the substrate;
an inter-dielectric layer disposed above a semiconductor layer; and
an optical waveguide to transmit light input from a light source, wherein the optical waveguide includes the semiconductor layer, having a trench with one facet that comprises an edge formed under an approximately 45 degree angle and another facet formed substantially normal to the semiconductor layer, wherein the edge interfaces with another medium to form a mirror to receive inputted light and reflect received light substantially perpendicularly to propagate the received light, wherein the semiconductor layer is disposed on the BOX layer, and wherein the trench extends through the inter-dielectric layer into the semiconductor layer.

2. The optical apparatus of claim 1 , wherein the another medium comprises air that fills the trench, wherein the optical apparatus further comprises a reflective material disposed at least on the one facet comprising the edge.

3. The optical apparatus of claim 2 , wherein the apparatus further comprises an anti-reflection coating disposed at least inside the trench, wherein the reflective material is disposed on top of the anti-reflection coating.

4. The optical apparatus of claim 1 , further comprising:
a dielectric coating disposed at least inside the trench; and
another semiconductor layer disposed on top of the dielectric coating to fill the trench;
wherein the another medium comprises the another semiconductor layer, and wherein the formed mirror is to provide a total internal reflection (TIR) of light directed at the mirror substantially perpendicular to the semiconductor layer.

5. The optical apparatus of claim 4 , wherein the semiconductor layer comprises silicon (Si) and the another semiconductor layer comprises polycrystalline silicon.

Assignees

• Intel Corp

Inventors

• Krishnamurthi Mahesh
• Ryckman Judson
• Rong Haisheng
• Liao Ling
• Frish Harel
• Harel Oshrit
• Barkai Assia
• Na Yun-Chung
• Liu Han-Din

Classifications

• G02B2006/12152

  Mode converter · CPC title

• G02B2006/12147

  Coupler · CPC title

• G02B6/122 Primary

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B6/4214 Primary

  the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence) · CPC title