Silicone elastomers capable of large isotropic dimensional change

Patent metadata

Field	Value
Publication number	US-9708451-B2
Application number	US-201414189964-A
Country	US
Kind code	B2
Filing date	Feb 25, 2014
Priority date	Feb 25, 2014
Publication date	Jul 18, 2017
Grant date	Jul 18, 2017

Abstract

Described herein is a highly effective route towards the controlled and isotropic reduction in size-scale, of complex 3D structures using silicone network polymer chemistry. In particular, a class of silicone structures were developed that once patterned and cured can ‘shrink’ micron scale additive manufactured and lithographically patterned structures by as much as 1 order of magnitude while preserving the dimensions and integrity of these parts. This class of silicone materials is compatible with existing additive manufacture and soft lithographic fabrication processes and will allow access to a hitherto unobtainable dimensionality of fabrication.

First claim

What is claimed is:

1. A method for isotropically reducing a silicone-based elastomer which comprises a network of crosslinked poly(siloxane) having its internal space occupied by a guest molecule, comprising removing said guest molecule from said silicone-based elastomer, wherein said silicone-based elastomer is isotropically reduced by at least 20 volume %.

2. The method of claim 1 , wherein said silicone-based elastomer is isotropically reduced by at least 50 volume %.

3. A method for making a patterned silicone structure comprising molding and/or etching a silicone-based elastomer to form a pattern comprising at least one line having a width of 500 μm or less, wherein said silicone-based elastomer comprises a network of crosslinked polysiloxane having its internal space occupied by a guest molecule;
and removing said guest molecule from said silicone-based elastomer to isotropically reduce the volume by at least 20%.

4. A method for making a patterned silicone structure comprising lithographically depositing a silicone-based elastomer onto a substrate to form a pattern comprising at least one line having a width of 500 μm or less, wherein said silicone-based elastomer comprises a network of crosslinked polysiloxane having its internal space occupied by a guest molecule;
and removing said guest molecule from said silicone-based elastomer to isotropically reduce the volume by at least 20%.

5. The method of claim 1 , wherein said crosslinked poly(siloxane) comprises crosslinked poly(alkyl siloxane).

6. The method of claim 1 , wherein said crosslinked poly(siloxane) comprises crosslinked poly(dimethyl siloxane).

7. The method of claim 1 , wherein said crosslinked poly(siloxane) is obtained by reacting a reaction mixture comprising vinyl-terminated poly(siloxane) with a crosslinker, wherein the molar mass of the poly(siloxane) is between 5,000 to 200,000 g/mol.

8. The method of claim 1 , wherein said silicone-based elastomer is a gel comprising at least 30 volume % occupied by said guest molecule.

9. The method of claim 1 , wherein said silicone-based elastomer is a gel comprising at least 50 volume % occupied by said guest molecule.

10. The method of claim 1 , wherein said guest molecule has an affinity for said poly(siloxane) that is greater than said poly(siloxane)'s own intra/intermolecular interaction strength.

11. The method of claim 1 , wherein said guest molecule is a volatile solvent molecule evaporable by heating, and wherein said guest molecule is removed from said silicone-based elastomer by heating.

12. A method for isotropically expanding a silicone-based elastomer which comprises a network of crosslinked poly(siloxane), comprising mixing the crosslinked poly(siloxane) with a guest molecule which allows the guest molecule to occupy internal space of the crosslinked poly(siloxane), wherein said crosslinked poly(siloxane) is obtained by reacting a reaction mixture comprising vinyl-terminated poly(siloxane) with a crosslinker, wherein the molar mass of the poly(siloxane) is between 5,000 to 200,000 g/mol.

13. The method of claim 12 , wherein said crosslinked poly(siloxane) comprises crosslinked poly(alkyl siloxane).

14. The method of claim 12 , wherein said crosslinked poly(siloxane) comprises crosslinked poly(dimethyl siloxane).

15. The method of claim 12 , wherein said silicone-based elastomer is a gel comprising at least 30 volume % occupied by said guest molecule.

16. The method of claim 12 , wherein said silicone-based elastomer is a gel comprising at least 50 volume % occupied by said guest molecule.

17. The method of claim 12 , wherein said guest molecule has an affinity for said poly(siloxane) that is greater than said poly(siloxane)'s own intra/intermolecular interaction strength.

18. The method of claim 12 , wherein said guest molecule is a volatile solvent molecule evaporable by heating.

19. A composition comprising a silicone-based elastomer, said silicone-based elastomer comprising a network of crosslinked poly(siloxane) having its internal space occupied by a guest molecule, and wherein said silicone-based elastomer is a gel comprising at least 50 volume % occupied by said guest molecule, and wherein the guest molecule is removable from said silicone-based elastomer to isotropically reduce said silicone-based elastomer.

20. The composition of claim 19 , wherein said silicone-based elastomer is a gel comprising at least 70 volume % occupied by said guest molecule.

21. The composition of claim 19 , wherein said silicone-based elastomer comprises crosslinked poly(dimethyl siloxane).

Assignees

• L Livermore Nat Security Llc

Inventors

• Lewicki James
• Worsley Marcus A

Classifications

• C08J3/075

  Macromolecular gels · CPC title

• C08G77/32 Primary

  Post-polymerisation treatment · CPC title

• B01L2400/04

  Moving fluids with specific forces or mechanical means · CPC title

• B01L2200/12

  Specific details about manufacturing devices · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title