Apparatus and method for supplying chemical solution on semiconductor substrate

Patent metadata

Field	Value
Publication number	US-9707571-B2
Application number	US-201414585550-A
Country	US
Kind code	B2
Filing date	Dec 30, 2014
Priority date	Dec 30, 2014
Publication date	Jul 18, 2017
Grant date	Jul 18, 2017

Abstract

A method of providing a liquid over a substrate is provided. The method includes providing the liquid over the substrate via a first opening of a flow path formed in a spray nozzle. The method further includes sucking back the liquid away from the first opening of the flow path. The method also includes holding the chemical solution in the flow path to keep a front surface of the chemical solution located in a tapered flow path section of the flow path.

First claim

What is claimed is:

1. A spray nozzle, comprising:
a main body extending along a longitudinal axis and having a bottom surface; and
a flow path formed in the main body along the longitudinal axis and defined by an inner wall, wherein the flow path comprises a first opening formed on the bottom surface of the main body, and in a direction away from the first opening, the flow path sequentially comprises:
a first flow path section, connected to the first opening;
a second flow path section immediately connected to the first flow path section via a second opening; and
a third flow path section immediately connected to the second flow path section via a third opening, wherein the second and the third flow path both have a constant width, and the width of the third flow path is greater than the width of the second flow path;
wherein the inner wall of the first flow path section that immediately connects the first opening to the second opening has an inclined angle relative to the longitudinal axis, the second opening and the third opening have the same width, and the first flow path section at the second opening has the same width as the third opening.

2. The spray nozzle as claimed in claim 1 , wherein the inner wall of the flow path is connected with a first edge of the first opening, and a first width of the first opening ranges from about 0.8 mm to about 2.4 mm.

3. The spray nozzle as claimed in claim 1 , wherein the inner wall connects the first edge of the first opening to a second edge of the second opening, wherein a distance between the first opening and the second opening ranges from about 3 mm to about 10 mm.

4. The spray nozzle as claimed in claim 1 , wherein the inner wall connects the first edge of the first opening to a second edge of the second opening, wherein a ratio of a second width of the second opening and the first width of the first opening ranges from about 1.01 to about 12.5.

5. The spray nozzle as claimed in claim 1 , wherein the first flow path section has a circular cross-sectional shape, and a cross-sectional area of the first flow path section is gradually increased away from the first opening along the longitudinal axis.

6. The spray nozzle as claimed in claim 1 , wherein the main body is made of a transparent material.

7. The spray nozzle as claimed in claim 1 , wherein the bottom surface is an inclined surface with an increasing height along a direction approaching a center of the bottom surface.

8. The spray nozzle as claimed in claim 1 , wherein the flow path is tapered in a direction toward the first opening along the longitudinal axis.

9. The spray nozzle as claimed in claim 1 , wherein a second width of the second opening along a direction perpendicular to the longitudinal axis is in a range of about 1.21 mm to about 5 mm.

10. The spray nozzle as claimed in claim 1 , wherein the flow path comprises a connecting wall connecting the inner wall of the first flow path section and the inner wall of the second flow path section, wherein the connecting wall extends along a direction perpendicular to the longitudinal axis.

11. The spray nozzle as claimed in claim 1 , wherein an edge of the second opening is immediately connected to the inner wall of the first flow path section that is inclined relative to the longitudinal axis, and the edge of the second opening is immediately connected to the inner wall of the second flow path section that is parallel to the longitudinal axis.

12. The spray nozzle as claimed in claim 1 , wherein an outer surface of the main body at the first section is tapered toward the bottom surface.

13. A spray nozzle, comprising:
a main body extending along a longitudinal axis and having a bottom surface; and
a flow path formed in the main body along the longitudinal axis and comprising a first opening formed on the bottom surface of the main body, wherein in a direction away from the first opening, the flow path sequentially comprises:
a first flow path section immediately connected to the bottom surface, wherein the first flow path is tapered in a direction toward the first opening along the longitudinal axis;
a second flow path section immediately connected to the first flow path section via a second opening; and
a third flow path section immediately connected to the second flow path section via a third opening, wherein the second opening and the third opening have the same width, and the first flow path section at the second opening has the same width as the third opening;
wherein the second and the third flow path both have a constant width, and the width of the third flow path is greater than the width of the second flow path.

14. The spray nozzle as claimed in claim 13 , wherein the first flow path section of the flow path comprises an inner wall connected with a first edge of the first opening that is formed on the bottom surface and having an inclined angle of about 6 degrees to about 14 degrees relative to the longitudinal axis.

15. The spray nozzle as claimed in claim 14 , wherein the inner wall connects a first edge of the first opening to a second edge of the second opening, wherein a volume of the flow path from the first opening to the second opening ranges from about 1.66 mm 3 to about 84.93 mm 3 .

16. The spray nozzle as claimed in claim 14 , wherein the inner wall connects the first opening to the second opening, wherein a first width of the first opening ranges from about 0.8 mm to about 2.4 mm, and a ratio of a second width of the second opening and the first width of the first opening ranges from about 1.01 to about 12.5.

17. The spray nozzle as claimed in claim 13 , wherein the main body is made of a transparent material.

18. The spray nozzle as claimed in claim 13 , wherein the bottom surface is an inclined surface with an increasing height along a direction approaching a center of the bottom surface.

19. The spray nozzle as claimed in claim 13 , wherein a second width of the second opening along a direction perpendicular to the longitudinal axis is in a range of about 1.21 mm to about 5 mm.

20. The spray nozzle as claimed in claim 13 , wherein the flow path is defined by an inner wall and comprises a connecting wall connecting the inner wall of the first flow path section and the inner wall of the second flow path section, wherein the connecting wall extends along a direction perpendicular to the longitudinal axis.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Tian Shih-Jhang
• Su Pei-Yi
• Dai Yi-Ming

Classifications

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• B05B1/06

  in annular, tubular or hollow conical form · CPC title

• B05B1/02 Primary

  designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, {or having an outlet of particular shape}(B05B1/26, B05B1/28, B05B1/34 take precedence) · CPC title

• H01L21/6708

  Electricity · mapped topic