Dynamic optical head and imaging device using flexible nano film optical structure

Patent metadata

Field	Value
Publication number	US-9706928-B2
Application number	US-201514719904-A
Country	US
Kind code	B2
Filing date	May 22, 2015
Priority date	May 23, 2014
Publication date	Jul 18, 2017
Grant date	Jul 18, 2017

Abstract

The present invention relates to an optical head for revealing near field through beams irradiated from a light source of a far field optical system, the optical head including: a flexible substrate made of a soft material and adapted to allow the optical head to be brought into close contact with a measured object and attached thereto even if the measured object has a curved or flat surface; and a near-field revelation part located between the measured object and the flexible substrate in such a manner as to have one side brought into contact with the flexible substrate and the other side detachably attached to the measured object and adapted to reveal the near field through the beams irradiated from the light source.

First claim

What is claimed is:

1. An optical head for revealing near field through beams irradiated from a light source of a far field optical system, the optical head comprising:
a flexible substrate made of a soft material and adapted to allow the optical head to be brought into close contact with a measured object and attached thereto even if the measured object has a curved or flat surface; and
a near-field revelation part located between the measured object and the flexible substrate in such a manner as to have one side brought into contact with the flexible substrate and the other side detachably attached to the measured object and adapted to reveal the near field through the beams irradiated from the light source,
wherein the near-field revelation part comprises: a layer for formation of dynamic optical nano apertures; a first dielectric protective layer formed on top of the layer for formation of dynamic optical nano apertures to prevent the generation of degradation and mixing caused by the inter-diffusion between the layer for formation of dynamic optical nano apertures and the flexible substrate; and a second dielectric protective layer formed on the underside of the layer for formation of dynamic optical nano apertures to maintain a given distance between the layer for formation of dynamic optical nano apertures and the measured object.

2. An optical head for revealing near field through beams irradiated from a light source of a far field optical system, the optical head comprising:
a flexible substrate made of a soft material and adapted to allow the optical head to be brought into close contact with a measured object and attached thereto even if the measured object has a curved or flat surface; and
a near-field revelation part located between the measured object and the flexible substrate in such a manner as to have one side brought into contact with the flexible substrate and the other side detachably attached to the measured object and adapted to reveal the near field through the beams irradiated from the light source,
wherein the near-field revelation part comprises a nano-structure array.

3. The optical head according to claim 1 , wherein the optical system comprises any one selected from the group consisting of a macro optical system, a hologram light modulator, a DMD mirror, a microlens array, and a scanner.

4. The optical head according to claim 1 , wherein the flexible substrate and the near-field revelation part are formed integrally with each other.

5. The optical head according to claim 2 , wherein the nano-structure array comprises any one selected from the group consisting of a nano-hole array, a nano-island array, a nano-pillar array, a nano-line array, and a nano-dot array.

6. The optical head according to claim 2 , wherein the nano-structure array comprises a metal array formed of any one selected from the group consisting of Au, Ag, Pt, Cr and Al.

7. The optical head according to claim 1 , wherein the near-field revelation part is a flexible nano film.

8. The optical head according to claim 1 , wherein the layer for formation of dynamic optical nano apertures is made of a chalcogenide-based material.

9. The optical head according to claim 1 , wherein the layer for formation of dynamic optical nano apertures is made of AgOx or PtOx.

10. The optical head according to claim 1 , wherein the first dielectric protective layer and the second dielectric protective layer are made of an oxide-based material, a nitride-based material, a carbide-based material, or a chalcogenide-based material.

11. The optical head according to claim 10 , wherein the oxide-based material comprises any one selected from the group consisting of SiOx, ZnS—SiOx, GeOx, AlOx, BeOx, ZrOx, BaTiOx, SrTiOx, and TaOx.

12. The optical head according to claim 10 , wherein the nitride-based material comprises any one selected from the group consisting of SiNx, BNx, and AlNx.

13. The optical head according to claim 10 , wherein the carbide-based material comprises SiCx.

14. The optical head according to claim 10 , wherein the chalcogenide-based material comprises any one selected from the group consisting of ZnS and ZnSe.

15. The optical head according to claim 1 , wherein the flexible substrate comprises any one selected from the group consisting of PC, COP, PI, PET, OPP, PE, PP, PMMA, and acrylic films, or any one selected from the group consisting of sodalime glass, borosilicate glass, fused silica glass, quartz glass, and biocompatible polymers (such as PLA, PGA, PLGA, LPLA, DUPLA, PCL, PDO and PDMS).

16. The optical head according to claim 1 , wherein the first dielectric protective layer has a thickness in the range of 30 to 500 nm, the layer for formation of dynamic optical nano apertures has a thickness in the range of 5 to nm, and the second dielectric protective layer has a thickness in the range of 5 to 60 nm.

17. The optical head according to claim 15 , wherein the films have a thickness in the range of 0.04 to 500 um.

18. The optical head according to claim 1 , further comprising a nano lubricating layer formed on the underside thereof to prevent friction and contamination of the measured object.

19. A near-field optical imaging device comprising:
a light source irradiating light therefrom;
a relay lens unit having one or more lenses adapted to pass the light transmitted to a measured object or reflected from the measured object therethrough and to focus the light irradiated from the light source thereon;
a multi-light array adapted to allow the light focused by the relay lens unit to be incident thereon;
an optical head adapted to reveal near field on the beams irradiated from the light source of a far-field optical system passing through the multi-light array; and
a photo detector adapted to detect the light reflected from the measured object,
wherein the optical head comprises: a flexible substrate made of a soft material and adapted to allow the optical head to be brought into close contact with the measured object and attached thereto even if the measured object has a curved or flat surface; and a near-field revelation part located between the measured object and the flexible substrate in such a manner as to have one side brought into contact with the flexible substrate and the other side detachably attached to the measured object and adapted to reveal the near field through the beams irradiated from the light source.

20. The near-field optical imaging device according to claim 19 , wherein the multi-light array comprises any one selected from the group consisting of a macro optical system, a hologram light modulator, a DMD mirror, a microlens array, and a scanner.

21. The near-field optical imaging device according to claim 19 , wherein the flexible substrate and the near-field revelation part are formed integrally with each other.

22. The near-field optical imaging device according to claim 19 , wherein the near-field revelation part comprises a nano-structure array.

23. The near-field optical imaging device according to claim 22 , wherein the nano-structure array comprises any one selected from the group consisting of a nano-hole array, a nano-island array, a nano-pillar array, a nano-line array, and a nano-dot array.

24. The near-field optical imaging device according to claim 22 , wherein the nano-structure array comprises a metal array formed of any one selected from the group consisting of Au, Ag, Pt, Cr and Al.

25.

Assignees

• Industry-Academic Cooperation Foundation Yonsei Univ

Inventors

• Kang Shinill
• Han Jungjin
• Cho Eikhyun
• Shim Jongmyeong
• Choi Wonjoon
• Kim Seok-Min
• Kim Dong Hyun
• Joo Chulmin

Classifications

• A61B2562/146

  for optical coupling · CPC title

• G01J3/44

  Raman spectrometry; Scattering spectrometry {; Fluorescence spectrometry} · CPC title

• G01J3/4412

  Scattering spectrometry (particle sizing by light scattering G01N15/0205; optical velocimetry of particles G01P5/20, G01P5/26) · CPC title

• G01Q60/22

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• Y10S977/954

  Of radiant energy · CPC title