Method for controlling surface charge on wafer surface in semiconductor fabrication

Patent metadata

Field	Value
Publication number	US-9704714-B2
Application number	US-201514688191-A
Country	US
Kind code	B2
Filing date	Apr 16, 2015
Priority date	Apr 16, 2015
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

A method for processing a semiconductor wafer is provided. The method includes performing a discharging process over the semiconductor wafer in a discharging chamber which is enclosed. The method further includes processing the semiconductor wafer by use of a first processing module after the discharging process. During the discharging process, charged particles applied on the semiconductor wafer are tuned based on the characteristics of the surface of the semiconductor wafer.

First claim

What is claimed is:

1. A method for processing a semiconductor wafer, comprising:
moving the semiconductor wafer from an ambient controlled environment of an interface module into a discharging chamber positioned in the ambient controlled environment;
enclosing the discharging chamber to produce an enclosed discharging chamber;
detecting at least one characteristic of a surface of the semiconductor wafer in the enclosed discharging chamber;
discharging charged particles over the semiconductor wafer in the enclosed discharging chamber based on the detection; and
removing the semiconductor wafer from the discharging chamber and moving the removed semiconductor wafer to the ambient controlled environment of the interface module;
wherein the discharging chamber is in fluid communication with the ambient controlled environment while the semiconductor wafer is moved to the discharging chamber and while the semiconductor wafer is removed from the discharging chamber.

2. The method as claimed in claim 1 , wherein the detecting at least one characteristic of a surface of the semiconductor wafer is performed at a single point of the surface of the semiconductor wafer.

3. The method as claimed in claim 1 , wherein the detecting at least one characteristic of a surface of the semiconductor wafer is performed by scanning a region of the surface of the semiconductor wafer.

4. The method as claimed in claim 1 , further comprising purging gas over the discharging chamber after the semiconductor wafer is removed from the discharging chamber or before another semiconductor wafer is transferred into the discharging chamber.

5. The method as claimed in claim 1 , wherein the semiconductor wafer is transferred from a carrier, which is configured to contain a plurality of semiconductor wafers, via the ambient controlled environment and the discharging chamber for a discharging process and is sent to the processing module.

6. The method as claimed in claim 1 , wherein the semiconductor wafer is transferred from the processing module via the ambient controlled environment and the discharging chamber for a discharging process and is sent to a carrier which is configured to contain a plurality of semiconductor wafers.

7. The method as claimed in claim 1 , wherein an air environment held in the enclosed discharging chamber is secluded from an outside of the enclosed discharging chamber.

8. The method as claimed in claim 4 , wherein the purging gas over the discharging chamber is performed when the discharging chamber is sealed.

9. The method as claimed in claim 1 , wherein the semiconductor wafer is transferred by a robotic arm which is disposed in the ambient controlled environment of the interface module.

10. A method for processing a semiconductor wafer, comprising:
moving the semiconductor wafer into a discharging chamber from an ambient controlled environment of an interface module;
enclosing the discharging chamber to produce an enclosed discharging chamber;
detecting at least one characteristic of a surface of the semiconductor wafer in the enclosed discharging chamber;
discharging charged particles over the semiconductor wafer in the enclosed discharging chamber based on the detection;
removing the semiconductor wafer from the discharging chamber and moving the removed semiconductor wafer to the ambient controlled environment of the interface module; and
wherein the semiconductor wafer is transferred from a first region of the ambient controlled environment into the discharging chamber via a first door of the discharging chamber and is removed from the discharging chamber to a second region of the ambient controlled environment via a second door of the discharging chamber, wherein the second door is different from the first door, and the first region fluidly communicates with the second region.

11. A method for processing a semiconductor wafer, comprising:
moving the semiconductor wafer from an ambient controlled environment of an interface module into a discharging chamber positioned in the ambient controlled environment;
performing a discharging process on the semiconductor wafer in the discharging chamber which is enclosed, wherein during the discharging process, charged particles applied on the semiconductor wafer are tuned based on at least one characteristic of a surface of the semiconductor wafer;
removing the semiconductor wafer from the discharging chamber and moving the semiconductor wafer to the ambient controlled environment of the interface module; and
processing the semiconductor wafer in a first processing module after the discharging process;
wherein the discharging chamber is in fluid communication with the ambient controlled environment while the semiconductor wafer is moved to the discharging chamber and while the semiconductor wafer is removed from the discharging chamber.

12. The method as claimed in claim 11 , further comprising:
performing a post discharging process in the discharging chamber or another discharging chamber which is enclosed after the semiconductor wafer has been processed by the first processing module; and
processing the semiconductor wafer which has been processed in the post discharging process by use of a second processing module.

13. The method as claimed in claim 12 , further comprising:
moving the semiconductor wafer which has been processed in the post discharging process to a carrier; and
transferring the semiconductor wafer to the second processing module via the carrier.

14. The method as claimed in claim 11 , further comprising:
moving the semiconductor wafer from a carrier and passing through the ambient controlled environment to the discharging chamber;
enclosing the discharging chamber for performing the discharging process;
moving the semiconductor wafer from the discharging module and passing through the ambient controlled environment to the carrier or another carrier; and
transferring the semiconductor wafer together with the carrier or the other carrier which has been processed in the discharging process to the first processing module.

15. The method as claimed in claim 11 , further comprising performing a gas purge during a time interval between operations of performing the discharging process over two different semiconductor wafers.

16. The method as claimed in claim 11 , wherein the charged particles are tuned based on at least one characteristic of a single point on the surface of the semiconductor wafer.

17. The method as claimed in claim 11 , wherein the charged particles are tuned based on at least one characteristic of a region on the surface of the semiconductor wafer.

18. The method as claimed in claim 11 , wherein when the discharging chamber is enclosed, an air environment held in the discharging chamber is secluded from an outside of the discharging chamber.

19. The method as claimed in claim 15 , wherein the gas purge is performed when the discharging chamber is sealed.

20. The method as claimed in claim 11 , wherein the semiconductor wafer is transferred by a robotic arm which is disposed in the ambient controlled environment of the interface module.

21. The method as claimed in claim 11 , wherein the semiconductor wafer is transferred from a first region of the ambient controlled environment into the discharging chamber via a first door of the discharging chamber and is removed from the discharging chamber to a second region of the ambient controlled environment via a second door of the discharging chamber, wherein

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Yu Weibo
• Chuang Jui-Ping
• Lu Chen-Hsiang
• Ku Shao-Yen

Classifications

• H10P72/3222

  Loading to or unloading from a conveyor · CPC title

• H10P72/3221

  Overhead conveying · CPC title

• H10P74/207 Primary

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title