Substrate Processing Method, Apparatus, and System
US-2024363405-A1 · Oct 31, 2024 · US
US9704694B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9704694-B2 |
| Application number | US-201514794570-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 8, 2015 |
| Priority date | Jul 11, 2014 |
| Publication date | Jul 11, 2017 |
| Grant date | Jul 11, 2017 |
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A plasma spraying device may include a first electrode and a second electrode. The first electrode may define an ionizing gas channel and at least one cooling channel. A distal end of the at least one cooling gas channel opens to an exterior of the plasma spraying spray gun proximate to a distal end of the first electrode. The second electrode is at least partially disposed in the ionizing gas channel.
Opening claim text (preview).
The invention claimed is: 1. A plasma spraying device comprising: a first electrode defining: an ionizing gas channel; and at least one cooling gas channel, wherein a distal end of the at least one cooling gas channel opens to an exterior of the plasma spraying device proximate to a distal end of the first electrode, wherein the first electrode defines a respective exit from the plasma spraying device for each distal end of the at least one cooling gas channel; and a second electrode disposed in the ionizing gas channel. 2. The plasma spraying device of claim 1 , wherein the first electrode comprises copper. 3. The plasma spraying device of claim 1 , wherein the ionizing gas channel exits the first electrode at an ionizing gas channel exit portion, wherein the ionizing gas channel exit portion defines an ionizing gas channel exit portion axis, wherein the first electrode defines a major axis, and wherein an angle between the ionizing gas channel exit portion axis and the major axis is between about 20 degrees and about 90 degrees. 4. The plasma spraying device of claim 1 , wherein the at least one cooling gas channel comprises a plurality of cooling gas channels, and wherein each of the plurality of cooling gas channels includes a distal end open to an exterior of the plasma spraying device. 5. The plasma spraying device of claim 3 , wherein the at least one cooling gas channel defines a cooling gas channel axis, and wherein the cooling gas channel axis is substantially parallel to the major axis. 6. The plasma spraying device of claim 1 , further comprising a material injection channel coupled to an external surface of the device. 7. The plasma spraying device of claim 1 , wherein the ionizing gas channel exits the first electrode at an ionizing gas channel exit portion, wherein the ionizing gas channel exit portion defines an ionizing gas channel exit portion axis, wherein the plasma spraying device further comprises a material injection channel connected to the first electrode, and wherein an axis of the material injection channel is substantially parallel with the ionizing gas channel exit portion axis. 8. A system comprising: a plasma spraying device comprising: a first electrode defining: an ionizing gas channel; and at least one cooling gas channel, wherein a distal end of the at least one cooling gas channel opens to an exterior of the plasma spraying device proximate to a distal end of the first electrode, wherein the first electrode defines a respective exit from the plasma spraying device for each distal end of the at least one cooling gas channel; and a second electrode disposed in the ionizing gas channel; and a cooling gas source fluidically coupled to the at least one cooling gas channel at a proximal end of the at least one cooling gas channel. 9. The system of claim 8 , further comprising an ionizing gas source fluidically coupled to the ionizing gas channel. 10. The system of claim 8 , further comprising a voltage source electrically coupled to the first electrode and the second electrode. 11. The system of claim 8 , wherein the plasma spraying device further comprises a material injection channel coupled to an external surface of the device, the system further comprising a material source coupled to the material injection channel. 12. The system of claim 11 , wherein the material source comprises a source of ceramic powder carried in a gas or a source of metal powder carried in a gas. 13. The system of claim 8 , wherein the plasma spraying device is configured to generate a plasma between about 5 kilowatts and about 15 kilowatts. 14. The system of claim 8 , wherein the first electrode comprises copper. 15. The system of claim 8 , wherein the ionizing gas channel exits the first electrode at an ionizing gas channel exit portion, wherein the ionizing gas channel exit portion defines an ionizing gas channel exit portion axis, wherein the first electrode defines a major axis, and wherein an angle between the ionizing gas channel exit portion axis and the major axis is between about 20 degrees and about 90 degrees. 16. The system of claim 8 , wherein the at least one cooling gas channel comprises a plurality of cooling gas channels, and wherein each of the plurality of cooling gas channels includes a distal end open to an exterior of the plasma spraying device. 17. The system of claim 15 , wherein the at least one cooling gas channel defines a cooling gas channel axis, and wherein the cooling gas channel axis is substantially parallel to the major axis. 18. The system of claim 8 , wherein the ionizing gas channel exits the first electrode at an ionizing gas channel exit portion, wherein the ionizing gas channel exit portion defines an ionizing gas channel exit portion axis, wherein the plasma spraying device further comprises a material injection channel connected to the first electrode, and wherein an axis of the material injection channel is substantially parallel with the ionizing gas channel exit portion axis, the system further comprising a material source coupled to the material injection channel. 19. A method comprising: applying a voltage between a first electrode and a second electrode of a plasma spraying device to generate an electric arc between the first electrode and the second electrode, wherein the first electrode defines an ionizing gas channel and the second electrode is at least partially disposed in the ionizing gas channel; flowing an ionizing gas through the ionizing gas channel, wherein the electric arc ionizes the gas; and flowing a cooling gas through at least one cooling gas channel defined by the first electrode, wherein the at least one cooling gas channel opens to an exterior of the plasma spraying device proximate to a distal end of the first electrode such that the cooling gas flows out of the first electrode through the open end of the at least one cooling gas channel, wherein the first electrode defines a respective exit from the plasma spraying device for each distal end of the at least one cooling gas channel. 20. The method of claim 19 , further comprising flowing a powder through a portion of the ionizing gas channel.
Oblique nozzles · CPC title
with provisions for introducing materials into the plasma, e.g. powder or liquid {(arc stabilising or constricting arrangements H05H1/3405; coaxial protecting fluids H05H1/341)} · CPC title
Relative arrangement or disposition of electrodes; moving means · CPC title
Electricity · mapped topic
Glow discharge · CPC title
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