Manganese tin oxide based transparent conducting oxide and transparent conductive film and method for fabricating transparent conductive film using the same

US9704610B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9704610-B2
Application numberUS-201615014937-A
CountryUS
Kind codeB2
Filing dateFeb 3, 2016
Priority dateFeb 4, 2015
Publication dateJul 11, 2017
Grant dateJul 11, 2017

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Abstract

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Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of Mn x Sn 1-x O (0<x≦0.055), and the multilayer transparent conductive film includes: a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055) deposited on the metal thin film.

First claim

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What is claimed is: 1. A manganese tin oxide-based transparent conducting oxide film, wherein the manganese tin oxide has a composition Mn x Sn 1-x O (0<x≦0.055), and has an amorphous phase. 2. The manganese tin oxide-based transparent conducting oxide film according to claim 1 , wherein x is 0.035˜0.055. 3. The manganese tin oxide-based transparent conducting oxide film according to claim 1 , wherein x is 0.045. 4. The…

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What does patent US9704610B2 cover?
Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition …
Who is the assignee on this patent?
Korea Inst Sci & Tech
What technology area does this patent fall under?
Primary CPC classification H01B1/02. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jul 11 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).