Conductive structure body precursor, conductive structure body and method for manufacturing the same
US-2015370359-A1 · Dec 24, 2015 · US
US9704610B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9704610-B2 |
| Application number | US-201615014937-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 3, 2016 |
| Priority date | Feb 4, 2015 |
| Publication date | Jul 11, 2017 |
| Grant date | Jul 11, 2017 |
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Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of Mn x Sn 1-x O (0<x≦0.055), and the multilayer transparent conductive film includes: a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055) deposited on the metal thin film.
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What is claimed is: 1. A manganese tin oxide-based transparent conducting oxide film, wherein the manganese tin oxide has a composition Mn x Sn 1-x O (0<x≦0.055), and has an amorphous phase. 2. The manganese tin oxide-based transparent conducting oxide film according to claim 1 , wherein x is 0.035˜0.055. 3. The manganese tin oxide-based transparent conducting oxide film according to claim 1 , wherein x is 0.045. 4. The…
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