Optical filter including a substrate having a groove with a pair of curved surfaces and analytical instrument

Patent metadata

Field	Value
Publication number	US-9703092-B2
Application number	US-201615084637-A
Country	US
Kind code	B2
Filing date	Mar 30, 2016
Priority date	Mar 19, 2010
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

An optical filter includes: a lower substrate; a lower mirror provided to the lower substrate; a lower electrode provided to the lower substrate; an upper substrate disposed so as to be opposed to the lower electrode; an upper mirror provided to the upper substrate, and opposed to the lower mirror; and an upper electrode provided to the upper substrate, and opposed to the lower electrode, wherein the upper substrate has a groove surrounding the upper mirror in a plan view, the groove includes a first side surface section, a second side surface section, a bottom surface section, a first end section located between the first side surface section and the bottom surface section, and a second end section located between the second side surface section and the bottom surface section, in a cross-sectional view, and the first end section and the second end section each have a curved surface.

First claim

What is claimed is:

1. An optical filter comprising:
a first glass substrate;
a second glass substrate that is disposed so as to oppose the first substrate;
a first mirror that is disposed between the first glass substrate and the second glass substrate;
a second mirror that is disposed between the first mirror and the second glass substrate;
a first electrode that is disposed between the first glass substrate and the second glass substrate; and
a second electrode that is disposed between the first electrode and the second glass substrate,
the second glass substrate having a groove that surrounds the second mirror when viewed from a second glass substrate side to a first glass substrate side,
the groove including a first side surface, a second side surface, a bottom surface, a first curved surface located between the first side surface and the bottom surface, and a second curved surface located between the second side surface and the bottom surface,
the first curved surface being configured for easing a first stress concentration of the second glass substrate that is located between the first side surface and the bottom surface and that is generated during application of a voltage between the first electrode and the second electrode,
the second curved surface being configured for easing a second stress concentration of the second glass substrate that is located between the second side surface and the bottom surface that is generated during application of the voltage between the first electrode and the second electrode,
the first side surface continuing a first surface of the second glass substrate, the first surface opposing a second surface of the second glass substrate that is disposed at the first substrate side.

2. The optical filter according to claim 1 ,
the second glass substrate containing quartz.

3. The optical filter according to claim 1 ,
the second electrode overlapping to the groove when viewed from the second glass substrate side to the first glass substrate side.

4. The optical filter according to claim 1 ,
the first side surface being disposed between the second mirror and the second side surface when viewed from the second glass substrate side to the first glass substrate side.

5. The optical filter according to claim 1 ,
the first side surface and the second side surface being inclined such that a width of an opening of the groove is larger than a width of the bottom surface.

6. The optical filter according to claim 1 ,
a boundary of the first surface and the first side surface being circular when viewed from the second glass substrate side to the first glass substrate side.

7. An optical filter comprising:
a first substrate;
a second substrate that is disposed so as to oppose the first substrate;
a first mirror that is disposed between the first substrate and the second substrate;
a second mirror that is disposed between the first mirror and the second substrate;
a first electrode that is disposed between the first substrate and the second substrate; and
a second electrode that is disposed between the first electrode and the second substrate,
the second substrate having a groove that surrounds the second mirror when viewed from a second substrate side to a first substrate side,
the groove including a first side surface, a second side surface, a bottom surface, a first curved surface located between the first side surface and the bottom surface, and a second curved surface located between the second side surface and the bottom surface,
the first curved surface being configured for easing a first stress concentration of the second substrate that is located between the first side surface and the bottom surface and that is generated during application of a voltage between the first electrode and the second electrode,
the second curved surface being configured for easing a second stress concentration of the second substrate that is located between the second side surface and the bottom surface that is generated during application of the voltage between the first electrode and the second electrode,
the first side surface continuing a first surface of the second substrate, the first surface opposing to a second substrate of the second substrate that is disposed at the first substrate side.

8. The optical filter according to claim 7 ,
the second substrate being a glass.

9. An analytical instrument comprising the optical filter according to claim 1 .

10. An analytical instrument comprising the optical filter according to claim 7 .

11. The optical filter according to claim 1 , the second electrode entirely overlapping the bottom surface of the groove, in a plan view of the optical filter.

12. The optical filter according to claim 7 , the second electrode entirely overlapping the bottom surface of the groove, in a plan view of the optical filter.

Assignees

• Seiko Epson Corp

Inventors

• Shinto Susumu
• Yamazaki Seiji

Classifications

• G02F2001/213

  Physics · mapped topic

• G02F1/21

  by interference · CPC title

• G02B26/001 Primary

  based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title

• G03F7/70575

  Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength · CPC title

• G02B5/284

  of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates (etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26) · CPC title