Leakage detection device and fluid controller including same

Patent metadata

Field	Value
Publication number	US-9702781-B2
Application number	US-201314409121-A
Country	US
Kind code	B2
Filing date	Jul 11, 2013
Priority date	Jul 23, 2012
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

There is provided a leakage detection device which can be reduced in size and attached to a leakage detection target member, such as a fluid controller, all the time, and thus, can monitor leakage of fluid all the time, and a fluid controller having the same. A fluid controller is configured by a fluid controller main body and a leakage detection device which is attached to the fluid controller main body. In the fluid controller main body, a leakage port for detecting the leakage is provided. The leakage detection device includes a sensor holding body which is attached to the fluid controller main body; an ultrasonic sensor which is held by the sensor holding body to face the leakage port; an ultrasonic passage provided between a sensor surface of the ultrasonic sensor and the leakage port; and a processing circuit for processing an ultrasonic wave obtained by the ultrasonic sensor.

First claim

The invention claimed is:

1. A leakage detection target and a leakage detection device which detects leakage of fluid of the leakage detection target, the leakage detection device comprising:
a sensor holding body;
an ultrasonic sensor which is held by the sensor holding body to face a leakage port that is provided in a leakage detection target member and causes a sealing part in the leakage detection target member and the outside to communicate with each other;
an ultrasonic passage configured for alignment with the leakage port in a straight line between a sensor surface of the ultrasonic sensor and the leakage port; and
a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor, and the leakage port is provided for detecting a leakage and is not used as a fluid passage of the leakage detection target.

2. A fluid controller, comprising:
a fluid controller main body which controls the flow of fluid; and
a leakage detection device which detects leakage of the fluid in the fluid controller main body,
wherein, in the fluid controller main body, a leakage port which causes a sealing part in the fluid controller main body and the outside to communicate with each other, is provided, and the leakage port is provided for detecting a leakage and is not used as a fluid passage of the fluid controller, and
wherein the leakage detection device comprises:
a sensor holding body;
an ultrasonic sensor which is held by the sensor holding body to face the leakage port;
an ultrasonic passage configured for alignment with the leakage port between a sensor surface of the ultrasonic sensor and the leakage port; and
a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor.

Assignees

• Fujikin Kk

Inventors

• Dohi Ryousuke
• Shinohara Tsutomu
• Nishino Kouji
• Doh Toshio
• Ikeda Nobukazu
• Yamaji Michio

Classifications

• G01M3/243

  for pipes · CPC title

• G01M3/24 Primary

  using infrasonic, sonic or ultrasonic vibrations · CPC title