Full-polarization Faraday magnetic field sensor based on Sagnac interference system and modulation method therefor
US-11782100-B2 · Oct 10, 2023 · US
US9702737B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9702737-B2 |
| Application number | US-201514663230-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 19, 2015 |
| Priority date | Mar 19, 2015 |
| Publication date | Jul 11, 2017 |
| Grant date | Jul 11, 2017 |
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An optical ring resonator sensor array module for a passive SONAR system. The module includes a supporting structure; a silicon substrate mounted on the supporting structure, and a top plate mounted over the silicon structure. The silicon substrate includes an optical waveguide having an input and an output and a plurality of optical ring resonators distributed across the silicon substrate to form a two-dimensional pattern. Each optical ring resonator is positioned adjacent to the optical waveguide and each has a different predetermined diameter. The top plate includes a plurality of diaphragms, one for each of the plurality of optical ring resonators. The diaphragms are distributed on the top plate such that each of the plurality of diaphragms is positioned over an associated one of the plurality of optical ring resonators. In addition, each of the diaphragms is configured to flex in response to externally applied acoustical pressure.
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What is claimed is: 1. An optical ring resonator sensor array module for a passive SONAR system, comprising: a supporting structure; a silicon substrate mounted on the supporting structure, the silicon substrate including an optical waveguide and a plurality of optical ring resonators, the plurality of optical ring resonators distributed across the silicon substrate to form a two-dimensional array pattern thereof, the two-dimensional array forming at least two rows and at least two columns, with at least two optical ring resonators in each row and at least two optical ring resonators in each column, each of the plurality of optical ring resonators positioned adjacent to the optical waveguide, each of the plurality of optical ring resonators having a different predetermined diameter, the optical waveguide having an input for receiving light at a first end thereof and an output for emitting light at a second end thereof; and a top plate mounted over the silicon substrate, the top plate having a plurality of diaphragms, one diaphragm for each of the plurality of optical ring resonators, the diaphragms distributed on the top plate such that each of the plurality of diaphragms is positioned over an associated one of the plurality of optical ring resonators, each of the diaphragms configured to flex in response to externally applied acoustical pressure. 2. The optical ring resonator sensor array of claim 1 , wherein the supporting structure includes a mechanical stop for each of plurality of optical ring resonators, the mechanical stop configured to prevent overstress of the silicon substrate in response to the externally applied acoustical pressure. 3. The optical ring resonator sensor array of claim 1 , wherein each of the plurality of diaphragms is mounted in an associated aperture of the top plate. 4. The optical ring resonator sensor array of claim 3 , wherein each of the plurality of diaphragms is secured in the associated aperture of the top plate by an o-ring seal. 5. The optical ring resonator sensor array of claim 1 , wherein each of the plurality of diaphragms is mounted in an integral part of the top plate. 6. The optical ring resonator sensor array of claim 1 , wherein each of the plurality of diaphragms has the same diameter, the same thickness, and the same flexibility. 7. The optical ring resonator sensor array of claim 1 , wherein each of the associated ones of the plurality of optical ring resonators and of the plurality of diaphragms form a separate sensor having an associated sensitivity, wherein each of the plurality of diaphragms has the same diameter and the same flexibility, and wherein the thickness of each of the diaphragms is varied to equalize the sensitivity of each of the separate sensors. 8. The optical ring resonator sensor array of claim 1 , wherein each of the associated ones of the plurality of optical ring resonators and of the plurality of diaphragms form a separate sensor having an associated sensitivity, and wherein each of the plurality of diaphragms has the same flexibility and the same thickness, and wherein the diameter of each of the diaphragms is varied to equalize the sensitivity of each of the separate sensors. 9. The optical ring resonator sensor array of claim 1 , wherein each of the associated ones of the plurality of optical ring resonators and of the plurality of diaphragms form a separate sensor having an associated sensitivity, and wherein each of the plurality of diaphragms has the same diameter and the same thickness, and wherein the flexibility of each of the diaphragms is varied to equalize the sensitivity of each of the separate sensors. 10. A passive SONAR system, comprising: an optical source for providing a light beam; a first fiber optic cable having a first end and a second end, the first end of the first optical cable coupled to receive the light beam from the optical source; an optical ring resonator sensor array module comprising: a supporting structure; a silicon substrate mounted on the supporting structure, the silicon substrate including an optical waveguide and a plurality of optical ring resonators, the plurality of optical ring resonators distributed across the silicon substrate to form a two-dimensional array pattern thereof, the two-dimensional array forming at least two rows and at least two columns, with at least two optical ring resonators in each row and at least two optical ring resonators in each column, each of the plurality of optical ring resonators positioned adjacent to the optical waveguide, each of the plurality of optical ring resonators having a different predetermined diameter, the optical waveguide having an input coupled to the second end of the first optic cable and an output for emitting light at a second end thereof; and a top plate mounted over the silicon substrate, the top plate having a plurality of diaphragms, one diaphragm for each of the plurality of optical ring resonators, the diaphragms distributed on the top plate such that each of the plurality of diaphragms is positioned over an associated one of the plurality of optical ring resonators, each of the diaphragms configured to flex in response to externally applied acoustical pressure, each of the associated ones of the plurality of optical ring resonators and of the plurality of diaphragms forming a separate acoustical pressure sensor; a second fiber optic cable having a first end and a second end, the first end of the second optical cable coupled to the output of the optical waveguide on the silicon substrate; an optical detector coupled to the second end of the second fiber optic cable, the optical detector configured to convert any received light signal from the second fiber optic cable to an associated electrical signal; and a processor coupled to receive the electrical signal from the optical detector, the processor configured to process the received electrical signal to calculate a measurement signal for each of the separate acoustical pressure sensors based on a change in a center frequency of a notch filter formed by the optical ring resonator associated with each separate acoustical pressure sensor. 11. The passive SONAR system of claim 10 , wherein the supporting structure includes a mechanical stop for each of plurality of optical ring resonators, the mechanical stop configured to prevent overstress of the silicon substrate in response to the externally applied acoustical pressure. 12. The passive SONAR system of claim 10 , wherein each of the plurality of diaphragms is mounted in an associated aperture of the top plate. 13. The passive SONAR system of claim 12 , wherein each of the plurality of diaphragms is secured in the associated aperture of the top plate by an o-ring seal. 14. The passive SONAR system of claim 10 , wherein each of the plurality of diaphragms is mounted in an integral part of the top plate. 15. The passive SONAR system of claim 10 , wherein each of the plurality of diaphragms has the same diameter, the same thickness, and the same flexibility. 16. The passive SONAR system of claim 10 , wherein each of the associated ones of the plurality of optical ring resonators and of the plurality of diaphragms form a separate sensor having an associated sensitivity, wherein each of the plurality of diaphragms has the same diameter and the same flexibility, and wherein the thickness of each of the diaphragms is varied to equalize the sensitivity of each of the separate sensors. 17. The passive SONAR system of claim 10 , wherein each of the associated ones of the plurality of optical ring resonators and of the
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