Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9702695-B2
Application number	US-201113700096-A
Country	US
Kind code	B2
Filing date	May 25, 2011
Priority date	May 27, 2010
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

An object of the present invention is to provide an image processing apparatus that quickly and precisely measures or evaluates a distortion in a field of view and a charged particle beam apparatus. To attain the object, an image processing apparatus or the like is proposed which acquires a first image of a first area of an imaging target and a second image of a second area that is located at a different position than the first area and partially overlaps with the first area and determines the distance between a measurement point in the second image and a second part of the second image that corresponds to a particular area for a plurality of sites in the overlapping area of the first image and the second image.

First claim

The invention claimed is:

1. A charged particle beam apparatus, comprising:
a charged particle source;
a deflector that moves a field of view to move a position irradiated with a beam emitted from the charged particle source;
a detector that detects a charged particle obtained through irradiation of a sample with the beam;
a stage that places the sample at the position irradiated with the beam; and
a control device that controls the deflector to move the field of view, generates an image based on an output from the detector, and measures, based on the output, a dimension of a pattern formed on the sample,
wherein the control device
controls the deflector to move the field of view so as to acquire a first image of a first area on the sample and a second image of a second area on the sample that is located in a predetermined direction with respect to the first area, is located at a different position than the first area by a predetermined amount, and partially overlaps with the first area,
determines a difference of position between a pattern in the first image of a particular area on the sample and a pattern of the second image for a plurality of sites in the overlapping area,
obtains vector information that indicates an amount of pattern movement and direction from the difference of the position between the pattern in the first image and the pattern in the second image for each of the plurality of sites, and
corrects a position of an edge of the pattern in the second image based on the vector information obtained with respect to each of the plurality of sites.

2. The charged particle beam apparatus according to claim 1 , wherein said first area is a same size as said second area.

3. The charged particle beam apparatus according to claim 1 , wherein the control device determines a distortion ratio between a reference position and each of the plurality of sites.

4. The charged particle beam apparatus according to claim 3 , wherein said control device determines whether the distortion ratio is outside of a predetermined range.

5. The charged particle beam apparatus according to claim 3 , wherein said control device sets an apparatus condition for calibrating a scan width of said beam based on an image obtained when a reference pattern is located at said reference position and acquiring said first image and said second image under the apparatus condition after the calibration.

6. The charged particle beam apparatus according to claim 1 , wherein said sample is disposed outside a sample chamber and carried into the sample chamber when said first image and said second image are to be acquired.

7. The charged particle beam apparatus according to claim 1 , wherein the sample is black silicon.

Assignees

• Kawada Hiroki
• Inoue Osamu
• Matsui Miyako
• Kawasaki Takahiro
• Itabashi Naoshi
• Takahama Takashi
• Setoguchi Katsumi
• Komuro Osamu
• Hitachi High Tech Corp

Inventors

• Kawada Hiroki
• Inoue Osamu
• Matsui Miyako
• Kawasaki Takahiro
• Itabashi Naoshi
• Takahama Takashi
• Setoguchi Katsumi
• Komuro Osamu

Classifications

• G06F18/22

  Matching criteria, e.g. proximity measures · CPC title

• H01J37/222

  Image processing arrangements associated with the tube · CPC title

• G06K9/6201

  Physics · mapped topic

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• Y10T428/24355

  Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.] · CPC title