Polishing tool, polishing system and method of polishing
US-2024342850-A1 · Oct 17, 2024 · US
US9701878B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9701878-B2 |
| Application number | US-201314379046-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 14, 2013 |
| Priority date | Feb 16, 2012 |
| Publication date | Jul 11, 2017 |
| Grant date | Jul 11, 2017 |
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Technique to provide an abrasive regeneration method which, from a used abrasive slurry, can recover an abrasive by an efficient method and can thereafter obtain a high-purity regenerated abrasive by a simple method. This abrasive regeneration method uses an abrasive comprising at least one type of abrasive selected from diamond, boron nitride, silicon carbide, alumina, alumina zirconia and zirconium oxide. The abrasive regeneration involves a slurry recovery step (A) for recovering an abrasive slurry discharged from a polishing machine, a separation and concentration step (B) for adding an alkaline earth metal salt as an inorganic salt to the recovered abrasive slurry to aggregate the abrasive, and separating and concentrating the abrasive from a mother liquor, and an abrasive recovery step (C) for recovering the separated and concentrated abrasive.
Opening claim text (preview).
The invention claimed is: 1. A method for regenerating an abrasive from a used abrasive-containing slurry, the method comprising: (A) collecting an abrasive-containing slurry discharged from an abrasive device; (B) separating the abrasive from a mother liquid and concentrating the abrasive by adding an alkaline earth metal salt as an inorganic salt to the collected abrasive-containing slurry and aggregating the abrasive; (C) collecting the separated and concentrated abrasive; and (D) adjusting sizes of particles of the collected abrasive, after the step (C), wherein the abrasive is at least one selected from a group consisting of diamond, boron nitride, silicon carbide, alumina, alumina-zirconia and zirconium oxide, wherein in the step (D), a dispersing agent is added to a solution of the collected abrasive, and thereafter dispersion of the abrasive is conducted using an ultrasonic disperser or a bead mill disperser to control the sizes of the particles of the regenerated abrasive, and wherein a first abrasive-containing slurry that contains washing water and a second abrasive-containing slurry that was used are collected in the step (A). 2. The method of claim 1 , wherein the first abrasive-containing slurry and the second abrasive-containing slurry collected in the step (A) are mixed and thereafter subjected to the step (B) and the step (C). 3. The method of claim 1 , wherein the first abrasive-containing slurry and the second abrasive-containing slurry collected in the step (A) are separately subjected to the step (B) and the step (C). 4. The method of claim 1 , wherein the alkaline earth metal salt used in the step (B) is a magnesium salt. 5. The method of claim 1 , wherein in the step (C), the abrasive is collected through separation by decantation utilizing sedimentation under an influence of only ambient gravitational force. 6. The method of claim 1 , wherein the ultrasonic disperser is used in the step (D). 7. The method of claim 1 , wherein the dispersing agent is composed of a poly-carboxylic acid-based polymer. 8. The method of claim 1 , wherein the separating and concentrating are conducted at a pH of less than 10.0 of the mother liquid at 25° C. in the step (B).
from the silicate or ceramic industries, e.g. waste waters from cement or glass factories · CPC title
for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title
Aqueous liquid suspensions · CPC title
with addition of chemical agents · CPC title
using calcium compounds · CPC title
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