Substrate processing apparatus
US-2015375273-A1 · Dec 31, 2015 · US
US9700816B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9700816-B2 |
| Application number | US-201514925692-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 28, 2015 |
| Priority date | Oct 28, 2014 |
| Publication date | Jul 11, 2017 |
| Grant date | Jul 11, 2017 |
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An elongated fluid degassing apparatus may be employed as a fluid transfer line for fluidly connecting components in a liquid system, while at the same time degassing, or preventing re-gassing of, the fluid. The fluid transfer line degassing apparatus forms a shell and tube degassing arrangement, wherein shell-side fluid flow is facilitated by one or more spacer elements that centrally position a semi-permeable separation membrane in the shell chamber. The degasser may include one or more tubular separation membranes that provide a gas-permeable, liquid-impermeable contact surface to effect the gas-liquid separation of the process fluid.
Opening claim text (preview).
What is claimed is: 1. An elongated fluid degassing apparatus, comprising: an outer flexible, liquid-impermeable jacket having an inner surface defining a jacket chamber along a central axis of said jacket, wherein said jacket has an inlet opening to said jacket chamber and an outlet opening to said jacket chamber, and an aspect ratio of at least 2:1; a tubular membrane extending axially in said jacket chamber along a mutual axial length, said tubular membrane having a first open end, the membrane defining a lumen with a luminal axis that is substantially parallel with said central axis, the membrane forming a gas-permeable, liquid-impermeable barrier between said jacket chamber and said lumen; and one or more spacer members extending continuously in said jacket chamber substantially along an entirety of said mutual axial length to maintain said membrane in a spaced relationship from channel regions of said inner surface of said jacket, with a radial gap being defined radially between said membrane and said channel regions of said inner surface of said jacket, said radial gap being between 50-500 micrometers. 2. An elongated fluid degassing apparatus as in claim 1 , including a first coupler unit fluidly connecting a fluid inlet to the radial gap through the inlet opening of said jacket, and fluidly connecting the lumen to a gas flow path through the first open end of the tubular membrane. 3. An elongated fluid degassing apparatus as in claim 2 , including a second coupler unit fluidly connecting a fluid outlet to the radial gap through the outlet opening of said jacket. 4. An elongated fluid degassing apparatus as in claim 1 wherein said one or more spacer members are spirally arranged about the central axis. 5. An elongated fluid degassing apparatus as in claim 1 , including a plurality of spacer members circumaxially spaced about the central axis and extending substantially parallel to the central axis. 6. An elongated fluid degassing apparatus as in claim 1 wherein said one or more spacer members are an integrally co-extruded body with said outer jacket. 7. An elongated fluid degassing apparatus as in claim 1 wherein said one or more spacer members are an integrally co-extruded body with said tubular membrane. 8. An elongated fluid degassing apparatus as in claim 1 , including a plurality of tubular membranes extending axially in said jacket chamber along said mutual axial length. 9. An elongated fluid degassing apparatus as in claim 1 , wherein said tubular membrane is non-porous. 10. An elongated fluid degassing apparatus as in claim 1 , wherein said outer jacket is tubular with a substantially circular cross-section. 11. An elongated fluid degassing apparatus as in claim 1 wherein said radial gap is substantially uniform throughout said mutual axial length. 12. A method for degassing a liquidous fluid, said method comprising: (a) providing the elongated fluid degassing apparatus of claim 3 ; (b) evacuating said lumen through the first open end of said tubular membrane along the gas flow path; (c) motivating the liquidous fluid through said fluid inlet and into contact with said membrane in said jacket chamber; and (d) delivering the liquidous fluid from said jacket chamber through said fluid outlet. 13. A method for degassing a liquidous fluid, said method comprising; (a) providing the elongated fluid degassing apparatus of claim 3 ; (b) passing a sweep gas through said lumen along the gas flow path; (c) motivating the liquidous fluid through said fluid inlet and into contact with said membrane in said jacket chamber; and (d) delivering the liquidous fluid from said jacket chamber through said fluid outlet. 14. A degassing system for degassing a liquidous fluid, said degassing system comprising: a liquidous fluid source; the elongated fluid a degassing apparatus of claim 1 ; a transfer channel fluidically connecting said liquidous fluid source to said inlet opening of said jacket; a pump for motivating the liquidous fluid from said liquidous fluid source through said jacket chamber of said outer jacket; and a vacuum source for evacuating said lumen through said first open end of said tubular membrane.
Tubular membranes · CPC title
characterised by the cross-sectional shape of the tube · CPC title
by filtration · CPC title
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